Cov plasma muaj zog heev tuaj yeem foob pob thiab ua rau cov khoom polymer tawg, rhuav tshem lawv cov saw hlau, tsim cov pab pawg nquag, ua rau lub zog ntawm qhov chaw nce ntxiv, thiab tsim cov etching. Kev kho qhov chaw ntawm cov plasma tsis cuam tshuam rau cov qauv sab hauv thiab kev ua tau zoo ntawm cov khoom loj, tab sis tsuas yog hloov pauv cov yam ntxwv ntawm qhov chaw xwb.
Yuav kom tsis txhob ua puas rau cov yam ntxwv ntawm cov khoom nws tus kheej, kev kho mob hloov kho qhov chaw plasma feem ntau tsis siv plasma nrog lub zog ceev dua. Qhov sib txawv ntawm kev kho mob no thiab lwm yam kev kho mob plasma yog:
1) Tsis txhob txhaj cov ions lossis cov atoms rau hauv qhov chaw kho (xws li kev cog cov ion).
2) Tsis txhob tshem cov khoom loj dua (xws li sputtering lossis etching).
3) Tsis txhob ntxiv ntau tshaj ob peb txheej (atomic) ntawm cov khoom rau saum npoo (xws li kev tso cov khoom).
Hauv ntej, kev kho qhov chaw plasma tsuas yog cuam tshuam nrog ob peb txheej atomic sab nraud xwb.
Cov txheej txheem txheej txheem rau kev hloov kho qhov chaw plasma feem ntau suav nrog lub zog roj, zaus hluav taws xob, lub zog tso tawm, lub sijhawm ua haujlwm, thiab lwm yam. Cov txheej txheem txheej txheem yooj yim kho. Thaum lub sijhawm hloov kho plasma, ntau cov khoom siv nquag yuav cuam tshuam nrog qhov chaw kho uas lawv kov, thiab tuaj yeem siv los kho qhov chaw ntawm cov khoom siv. Piv nrog cov txheej txheem ib txwm muaj, kev hloov kho qhov chaw plasma muaj qhov zoo ntawm cov txheej txheem yooj yim, kev ua haujlwm yooj yim, tus nqi qis, tsis muaj kuab paug, tsis muaj khib nyiab, kev tsim khoom nyab xeeb, thiab kev ua haujlwm zoo.
Lub sijhawm tshaj tawm: Lub Rau Hli-07-2023