Ubuchwepheshe bokuhlunga bukazibuthe

Umbono oyisisekelo wedivayisi yokuhlunga yamagnetic
Indlela yokuhlunga yedivayisi yokuhlunga yamagnetic yezinhlayiya ezinkulu emsebeni we-plasma imi kanje:
Ukusebenzisa umehluko phakathi kwe-plasma nezinhlayiya ezinkulu ezisebenza ngogesi kanye nesilinganiso sokushaja-kuya-ku-mass, kukhona "umgoqo" (kungaba i-baffle noma udonga lweshubhu olugobile) olubekwa phakathi kwe-substrate kanye nobuso be-cathode, oluvimba noma yiziphi izinhlayiya ezihamba ngomugqa oqondile phakathi kwe-cathode kanye ne-substrate, kuyilapho ama-ion angaphambukiswa yi-magnetic field futhi adlule "emgoqo" aye kwi-substrate.

Isimiso sokusebenza sedivayisi yokuhlunga yamagnetic

Ensimini yamagnetic, i-Pe<

I-Pe ne-Pi ziyi-radii ye-Larmor yama-electron nama-ion ngokulandelana, kanti u-a uwububanzi bangaphakathi besihlungi se-magnetic. Ama-electron aku-plasma athintwa amandla e-Lorentz futhi ajikeleza ensimini yamagnetic ngokwe-axial, kuyilapho insimu yamagnetic inomthelela omncane ekuhlanganisweni kwama-ion ngenxa yomehluko phakathi kwama-ion nama-electron ku-radius ye-Larmor. Kodwa-ke, lapho ukunyakaza kwama-electron ku-axis yedivayisi yesihlungi se-magnetic, kuzodonsela ama-ion ku-axial ukuze kuhambisane nokujikeleza ngenxa yokugxila kwayo kanye nensimu kagesi enamandla negative, futhi ijubane lama-electron likhulu kune-ion, ngakho-ke i-electron idonsa njalo i-ion phambili, kuyilapho i-plasma ihlala ingathathi hlangothi ngogesi. Izinhlayiya ezinkulu azithathi hlangothi ngogesi noma zishajwe kancane kabi, futhi ikhwalithi inkulu kakhulu kune-ion nama-electron, empeleni azithintwa yinsimu yamagnetic kanye nokunyakaza okuqondile ku-inertia, futhi zizohlungwa ngemva kokushayisana nodonga lwangaphakathi lwedivayisi.
Ngaphansi komsebenzi ohlangene wokugoba kwensimu yamagnetic field kanye nokukhukhuleka kwe-gradient kanye nokushayisana kwe-ion-electron, i-plasma ingaphambukiswa kudivayisi yokuhlunga yamagnetic. Kumamodeli avamile e-theory asetshenziswa namuhla yimodeli ye-Morozov flux kanye nemodeli ye-rotor eqinile ye-Davidson, anesici esilandelayo esivamile: kukhona insimu yamagnetic eyenza ama-electron ahambe ngendlela ejikelezayo ngokuqinile.
Amandla ensimu yamagnetic eqondisa ukunyakaza kwe-axial kwe-plasma kudivayisi yokuhlunga yamagnetic kufanele abe kanje:

I-Mi, i-Vo, kanye ne-Z yisisindo se-ion, ijubane lokuhamba, kanye nenani lamacala athwalwa ngokulandelana. I-a yi-diameter yangaphakathi yesihlungi sikamazibuthe, kanti i-e yi-electron charge.
Kufanele kuqashelwe ukuthi amanye ama-ion anamandla aphezulu awakwazi ukuboshwa ngokuphelele yi-electron beam. Angase afinyelele odongeni lwangaphakathi lwesihlungi sikagesi, okwenza udonga lwangaphakathi lube namandla amahle, okuthi kamuva kuvimbele ama-ion ukuthi aqhubeke nokufinyelela odongeni lwangaphakathi futhi kunciphise ukulahleka kwe-plasma.
Ngokwalesi simo, ingcindezi efanele yokukhetha okuhle ingasetshenziswa odongeni lwedivayisi yokuhlunga yamagnetic ukuvimbela ukungqubuzana kwama-ion ukuthuthukisa ukusebenza kahle kokuthutha kwama-ion aqondiwe.

Ukuhlukaniswa kwedivayisi yokuhlunga yamagnetic
(1) Isakhiwo esiqondile. Insimu yamagnetic isebenza njengesiqondiso sokugeleza komsebe we-ion, inciphisa usayizi wendawo ye-cathode kanye nesilinganiso samaqoqo ezinhlayiya ezinkulu, kuyilapho iqinisa ukushayisana ngaphakathi kwe-plasma, ikhuthaza ukuguqulwa kwezinhlayiya ezingathathi hlangothi zibe ama-ion futhi inciphise inani lamaqoqo ezinhlayiya ezinkulu, futhi inciphise ngokushesha inani lezinhlayiya ezinkulu njengoba amandla ensimu yamagnetic ekhuphuka. Uma kuqhathaniswa nendlela evamile yokumboza ama-ion amaningi, le divayisi ehlelekile inqoba ukwehla okukhulu kokusebenza kahle okubangelwa ezinye izindlela futhi ingaqinisekisa izinga lokufakwa kwefilimu elihlala njalo ngenkathi inciphisa inani lezinhlayiya ezinkulu cishe ngo-60%.
(2) Isakhiwo sohlobo lwejika. Nakuba isakhiwo sinezinhlobo ezahlukene, kodwa isimiso esiyisisekelo sifana. I-plasma ihamba ngaphansi komsebenzi ohlangene wensimu yamagnetic kanye nensimu kagesi, futhi insimu yamagnetic isetshenziselwa ukuvimba nokulawula i-plasma ngaphandle kokuphambukisa ukunyakaza eceleni kwemigqa yamandla kazibuthe. Futhi izinhlayiya ezingashajwanga zizohamba eceleni komugqa bese zihlukaniswa. Amafilimu alungiselelwe yile divayisi yesakhiwo anobulukhuni obuphezulu, ubulukhuni obuphansi bomphezulu, ubuningi obuhle, usayizi wezinhlamvu ezifanayo, kanye nokunamathela okuqinile kwesisekelo sefilimu. Ukuhlaziywa kwe-XPS kukhombisa ukuthi ubulukhuni bomphezulu wamafilimu e-ta-C ambozwe ngalolu hlobo lwedivayisi bungafinyelela ku-56 GPa, ngakho-ke idivayisi yesakhiwo esigobile iyindlela esetshenziswa kakhulu futhi ephumelelayo yokususa izinhlayiya ezinkulu, kodwa ukusebenza kahle kokuthutha kwe-ion okuqondiwe kudinga ukuthuthukiswa kakhulu. Idivayisi yokuhlunga i-magnetic egobile engu-90° ingenye yamadivayisi esakhiwo esigobile asetshenziswa kakhulu. Ukuhlolwa kuphrofayela yobuso bamafilimu e-Ta-C kukhombisa ukuthi iphrofayili yobuso bedivayisi yokuhlunga i-magnetic egobile engu-360° ayishintshi kakhulu uma kuqhathaniswa nedivayisi yokuhlunga i-magnetic egobile engu-90°, ngakho-ke umphumela wokuhlunga i-magnetic egobile engu-90° yezinhlayiya ezinkulu ungafinyelelwa ngokuyisisekelo. Idivayisi yokuhlunga i-magnetic bend engu-90° inezinhlobo ezimbili zezakhiwo: eyodwa iyi-solenoid egobile ebekwe ekamelweni le-vacuum, kanti enye ibekwa ngaphandle kwegumbi le-vacuum, futhi umehluko phakathi kwazo usesakhiweni kuphela. Ingcindezi yokusebenza yedivayisi yokuhlunga i-magnetic bend engu-90° iku-oda elingu-10-2Pa, futhi ingasetshenziswa ezinhlobonhlobo zezicelo, njenge-nitride yokumboza, i-oxide, i-carbon e-amorphous, ifilimu ye-semiconductor kanye nefilimu yensimbi noma engeyona eyensimbi.

Ukusebenza kahle kwedivayisi yokuhlunga nge-magnetic
Njengoba kungezona zonke izinhlayiya ezinkulu ezingalahlekelwa amandla e-kinetic ekushayisaneni okuqhubekayo nodonga, inani elithile lezinhlayiya ezinkulu lizofinyelela i-substrate ngokusebenzisa ipayipi lokukhipha. Ngakho-ke, idivayisi yokuhlunga ende nencane yamagnetic inokusebenza kahle kokuhlunga kwezinhlayiya ezinkulu, kodwa ngalesi sikhathi izokwandisa ukulahleka kwama-ion aqondiwe futhi ngesikhathi esifanayo yandise ubunzima besakhiwo. Ngakho-ke, ukuqinisekisa ukuthi idivayisi yokuhlunga yamagnetic inokususwa kwezinhlayiya ezinkulu okuhle kakhulu kanye nokusebenza kahle kokuthutha kwama-ion kuyisidingo esidingekayo ukuze ubuchwepheshe bokumboza ama-ion amaningi bube nethuba elibanzi lokufaka amafilimu amancane asebenza kahle kakhulu. Ukusebenza kwedivayisi yokuhlunga yamagnetic kuthintwa amandla ensimu yamagnetic, ukugoba kwe-bend, i-mechanical baffle aperture, i-arc source current kanye ne-charged particle incidence angle. Ngokubeka amapharamitha afanele edivayisi yokuhlunga yamagnetic, umphumela wokuhlunga wezinhlayiya ezinkulu kanye nokusebenza kahle kokudlulisa ama-ion kwethagethi kungathuthukiswa ngempumelelo.