Fasahar tace maganadisu

Ka'idar asali ta na'urar tace maganadisu
Tsarin tacewa na na'urar tace maganadisu ga manyan ƙwayoyin cuta a cikin hasken plasma kamar haka:
Ta hanyar amfani da bambanci tsakanin plasma da manyan barbashi a cikin caji da rabon caji-zuwa-matsa, akwai "shinge" (ko dai bangon bututu mai lankwasa) wanda aka sanya tsakanin substrate da saman cathode, wanda ke toshe duk wani barbashi da ke motsawa a cikin layi madaidaiciya tsakanin cathode da substrate, yayin da ions ɗin za a iya karkatar da su ta hanyar filin maganadisu kuma su ratsa ta cikin "shinge" zuwa substrate.

Ka'idar aiki na na'urar tace maganadisu

A cikin filin maganadisu, Pe<

Pe da Pi su ne radii na Larmor na electrons da ions bi da bi, kuma a shine diamita na ciki na matatar maganadisu. Elektrons da ke cikin plasma suna shafar ƙarfin Lorentz kuma suna juyawa tare da filin maganadisu a axial, yayin da filin maganadisu ba shi da tasiri sosai akan tarin ions saboda bambancin da ke tsakanin ions da electrons a cikin radius na Larmor. Duk da haka, lokacin da motsi na electron tare da axis na na'urar tace maganadisu, zai jawo ions tare da axial don motsi na juyawa saboda mayar da hankali da ƙarfin filin lantarki mara kyau, kuma saurin electron ya fi ion girma, don haka electron koyaushe yana jan ion gaba, yayin da plasma koyaushe yana kasancewa tsaka tsaki na lantarki. Manyan barbashi suna tsaka tsaki na lantarki ko kuma suna ɗan caji mara kyau, kuma ingancin ya fi ions da electrons girma, ainihin ba ya shafar filin maganadisu da motsi na layi tare da inertia, kuma za a tace shi bayan karo da bangon ciki na na'urar.
A ƙarƙashin haɗin aikin lanƙwasa filin maganadisu mai lanƙwasa da kuma karkacewar gradient da kuma karo na ion-electron, ana iya karkatar da plasma a cikin na'urar tace maganadisu. A cikin samfuran ka'idoji da aka saba amfani da su a yau sune samfurin flux na Morozov da samfurin rotor mai tsauri na Davidson, waɗanda ke da waɗannan fasaloli gama gari: akwai filin maganadisu wanda ke sa electrons su motsa ta hanyar helical.
Ƙarfin filin maganadisu da ke jagorantar motsin axial na plasma a cikin na'urar tace maganadisu ya kamata ya zama kamar haka:

Mi, Vo, da Z sune nauyin ion, saurin jigilar kaya, da adadin cajin da ake ɗauka bi da bi. a shine diamita na ciki na matatar maganadisu, kuma e shine cajin lantarki.
Ya kamata a lura cewa wasu ions masu ƙarfi ba za a iya ɗaure su gaba ɗaya ta hanyar hasken lantarki ba. Suna iya isa ga bangon ciki na matattarar maganadisu, wanda hakan ke sa bangon ciki ya kasance mai kyau, wanda hakan ke hana ions ci gaba da isa ga bangon ciki kuma yana rage asarar jini.
Dangane da wannan lamari, ana iya amfani da matsin lamba mai kyau mai kyau a bangon na'urar tace maganadisu don hana karo da ions don inganta ingancin jigilar ions da aka yi niyya.

Rarraba na'urar tace maganadisu
(1) Tsarin layi. Filin maganadisu yana aiki a matsayin jagora ga kwararar hasken ion, yana rage girman tabo na cathode da kuma rabon tarin barbashi na macroscopic, yayin da yake ƙara yawan karo a cikin plasma, yana haifar da canza barbashi masu tsaka-tsaki zuwa ions da kuma rage adadin tarin barbashi na macroscopic, da kuma rage yawan manyan barbashi cikin sauri yayin da ƙarfin filin maganadisu ke ƙaruwa. Idan aka kwatanta da hanyar rufe ion mai yawa na al'ada, wannan na'urar da aka tsara ta shawo kan raguwar inganci da wasu hanyoyi ke haifarwa kuma tana iya tabbatar da yawan adana fim ɗin akai-akai yayin da take rage yawan manyan barbashi da kusan kashi 60%.
(2) Tsarin nau'in lanƙwasa. Duk da cewa tsarin yana da siffofi daban-daban, amma ƙa'idar asali iri ɗaya ce. Plasma tana motsawa ƙarƙashin haɗin aikin filin maganadisu da filin lantarki, kuma ana amfani da filin maganadisu don iyakancewa da sarrafa plasma ba tare da karkatar da motsi tare da alkiblar layin ƙarfin maganadisu ba. Kuma barbashi marasa caji za su motsa tare da layi kuma a raba su. Fina-finan da wannan na'urar ta shirya suna da tauri mai yawa, ƙarancin ƙaiƙayi a saman, kyakkyawan yawa, girman hatsi iri ɗaya, da mannewa mai ƙarfi na tushen fim. Binciken XPS ya nuna cewa tauri a saman fina-finan ta-C da aka lulluɓe da wannan nau'in na'urar na iya kaiwa 56 GPa, don haka na'urar tsarin lanƙwasa ita ce hanya mafi amfani kuma mai tasiri don cire manyan barbashi, amma ana buƙatar ƙara inganta ingancin jigilar ion. Na'urar tace maganadisu mai lanƙwasa 90° tana ɗaya daga cikin na'urorin tsarin lanƙwasa da aka fi amfani da su. Gwaje-gwaje akan bayanin saman fina-finan Ta-C sun nuna cewa bayanin saman na'urar tace maganadisu mai lanƙwasa 360° ba ta canzawa sosai idan aka kwatanta da na'urar tace maganadisu mai lanƙwasa 90°, don haka ana iya cimma tasirin tace maganadisu mai lanƙwasa 90° ga manyan barbashi. Na'urar tace maganadisu mai lanƙwasa 90° galibi tana da nau'ikan tsari guda biyu: ɗaya ita ce lanƙwasa solenoid da aka sanya a cikin ɗakin injin, ɗayan kuma ana sanya shi daga ɗakin injin, kuma bambancin da ke tsakaninsu yana cikin tsarin ne kawai. Matsin aiki na na'urar tace maganadisu mai lanƙwasa 90° yana cikin tsari na 10-2Pa, kuma ana iya amfani da shi a cikin aikace-aikace iri-iri, kamar su nitride mai rufi, oxide, carbon amorphous, fim ɗin semiconductor da fim ɗin ƙarfe ko fim mara ƙarfe.

Ingancin na'urar tace maganadisu
Tunda ba dukkan manyan barbashi za su iya rasa kuzarin motsi ba a ci gaba da karo da bango, wani adadi mai yawa na manyan barbashi za su isa ga substrate ta hanyar bututun fitar da bututu. Saboda haka, na'urar tace maganadisu mai tsayi da kunkuntar tana da ingantaccen tace manyan barbashi, amma a wannan lokacin zai ƙara asarar ions da aka nufa kuma a lokaci guda yana ƙara sarkakiyar tsarin. Saboda haka, tabbatar da cewa na'urar tace maganadisu tana da kyakkyawan cire manyan barbashi da ingantaccen jigilar ions wani muhimmin abu ne da ake buƙata don fasahar rufe ions masu yawa don samun fa'ida mai faɗi wajen ajiye manyan fina-finai masu aiki. Aikin na'urar tace maganadisu yana shafar ƙarfin filin maganadisu, lanƙwasa bias, buɗewar baffle na injiniya, kwararar tushen baka da kusurwar faruwar barbashi da aka caji. Ta hanyar saita sigogi masu dacewa na na'urar tace maganadisu, tasirin tace manyan barbashi da ingancin canja wurin ions na abin da ake nufi za a iya inganta shi yadda ya kamata.