Tekinoroji yekusefa kwemagineti

Dzidziso huru yemudziyo wekusefa wemagineti
Maitiro ekusefa emudziyo wemagnetic filtering wezvikamu zvikuru muplasma beam ndeekuti:
Uchishandisa musiyano uripo pakati peplasma nezvikamu zvikuru zviri mucharge uye charge-to-mass ratio, pane "chipingamupinyi" (chingave baffle kana curved tube wall) chinoiswa pakati pe substrate ne cathode surface, icho chinovhara chero zvikamu zviri kufamba mumutsara wakatwasuka pakati pe cathode ne substrate, nepo maion achigona kutsauswa nemagnetic field opfuura nepakati pe "chipingamupinyi" kuenda ku substrate.

Musimboti wekushanda kwemudziyo we magnetic filtration

Mumunda wemagineti, Pe<

Pe naPi ndiwo Larmor radii yemaerekitironi nemaion zvakateerana, uye a ndiyo dhayamita yemukati me magnetic filter. Maerekitironi ari mu plasma anokanganiswa nesimba reLorentz uye anotenderera pamwe chete ne magnetic field axially, nepo magnetic field isina simba rakawanda pakubatana kwemaion nekuda kwemusiyano uripo pakati pemaion nemaerekitironi ari muLarmor radius. Zvisinei, kana electron ichifamba ne axis ye magnetic filter device, inokwezva maion ari pa axial ye rotational motion nekuda kwe focus yayo uye strong negative electric field, uye speed ye electron yakakura kupfuura ion, saka electron inogara ichidhonza ion mberi, nepo plasma ichiramba iri quasi-electrically neutral. Zvidimbu zvikuru hazvina electrically neutral kana zvishoma negative charge, uye hunhu hwacho hwakakura kupfuura maion nemaerekitironi, zvisingakanganisike ne magnetic field uye linear motion pamwe chete ne inertia, uye zvichasefa mushure mekubonderana nemadziro emukati me device.
Pasi pebasa rakabatana remagineti anokombama uye gradient drift uye ion-electron collisions, plasma inogona kutsauswa mumudziyo we magnetic filtration. MuMamodheru edzidziso anoshandiswa mazuva ano ndiwo Morozov flux model uye Davidson rigid rotor model, ane chinhu chinotevera chakafanana: kune magnetic field inoita kuti maerekitironi afambe nenzira yakatenderedza.
Simba resimba remagineti rinotungamira kufamba kweplasma muchishandiso chekusefa magineti rinofanira kunge rakaita sekuti:

Mi, Vo, naZ ndiwo ma ion mass, transport velocity, uye huwandu hwechaji dzinotakurwa zvichiteerana. a ndiyo dhayamita yemukati me magnetic filter, uye e ndiyo electron charge.
Zvinofanira kucherechedzwa kuti mamwe maion ane simba rakawanda haakwanise kusungwa zvizere nemwenje wemaerekitironi. Anogona kusvika pamadziro emukati mefirita yemagineti, zvichiita kuti madziro emukati ave nesimba rakanaka, izvo zvinozodzivisa maion kuramba achisvika pamadziro emukati uye kuderedza kurasikirwa kweplasma.
Zvichienderana nechiitiko ichi, kumanikidzwa kwakakodzera kwe bias kunogona kuiswa pamadziro emudziyo we magnetic filter kudzivirira kurovera kwema ions kuti kuvandudza kushanda zvakanaka kwekutakura ma ion.

Kupatsanurwa kwemudziyo wekusefa wemagineti
(1) Chimiro chemutsetse. Simba remagineti rinoshanda senzira yekutungamira kuyerera kwemwaranzi yeion, richideredza saizi yenzvimbo yecathode uye huwandu hwemacroscopic particle clusters, ukuwo richiwedzera kuroverana mukati meplasma, zvichikonzera kushandurwa kwezvikamu zvisina kusimba kuita maion uye kuderedza huwandu hwemacroscopic particle clusters, uye nekukurumidza kuderedza huwandu hwezvikamu zvikuru sezvo simba remagineti richiwedzera. Zvichienzaniswa nenzira yekubatanidza maion akawanda-arc, mudziyo uyu wakagadzirwa unokunda kudzikira kukuru mukushanda kunokonzerwa nedzimwe nzira uye unogona kuve nechokwadi chekuti firimu rinogara richienderera mberi richideredza huwandu hwezvikamu zvikuru neinenge 60%.
(2) Chimiro cherudzi rwecurve. Kunyangwe chimiro chacho chine maumbirwo akasiyana-siyana, asi musimboti wekutanga wakafanana. Plasma inofamba pasi pebasa rakabatana remagnetic field ne electric field, uye magnetic field inoshandiswa kuvharira nekudzora plasma pasina kutsausa kufamba nenzira yemagnetic force lines. Uye zvidimbu zvisina kuchajwa zvichafamba nenzira yemutsetse uye zvichaparadzaniswa. Mafirimu akagadzirwa nechinhu ichi chechimiro ane kuomarara kwakanyanya, kusasimba kwepamusoro, density yakanaka, saizi yegorosi yakafanana, uye kunamira kwakasimba kwefirimu. Ongororo yeXPS inoratidza kuti kuomarara kwepamusoro kwemafirimu eta-C akafukidzwa nerudzi urwu rwechishandiso kunogona kusvika 56 GPa, saka chishandiso chechimiro chakakombama ndiyo nzira inonyanya kushandiswa uye inoshanda yekubvisa zvidimbu zvakakura, asi kushanda zvakanaka kwekutakura maion kunoda kuvandudzwa zvakanyanya. Chishandiso che 90° bend magnetic filtration ndechimwe chezvishandiso zvechimiro chakakombama zvinoshandiswa zvakanyanya. Kuedza pamusoro pechishandiso cheTa-C mafirimu kunoratidza kuti chimiro chepamusoro che360° bend magnetic filtration device hachichinji zvakanyanya kana tichienzanisa nechishandiso che 90° bend magnetic filtration, saka mhedzisiro ye 90° bend magnetic filtration yezvikamu zvikuru inogona kuwanikwa. Mudziyo wekusefa une magineti unokombama we90° une mhando mbiri dzemaumbirwo: imwe idenderedzwa remagineti rinoiswa mukamuri revacuum, uye imwe inoiswa kunze kwekamuri revacuum, uye musiyano uripo uri muchimiro chete. Kumanikidzwa kwekushanda kwemudziyo wekusefa une magineti unokombama we90° kuri muhurongwa hwe10-2Pa, uye unogona kushandiswa mumhando dzakasiyana-siyana dzemashandisirwo, akadai senitride yekufukidza, oxide, amorphous carbon, semiconductor film uye simbi kana firimu risiri resimbi.

Kushanda zvakanaka kwemuchina wekusefa wemagineti
Sezvo zvisiri zvese zvimedu zvikuru zvinogona kurasikirwa nesimba rekinetic kana zvikaramba zvichisangana nemadziro, huwandu hwakati hwezvimedu zvikuru hunosvika pasi pevhu kuburikidza nepombi inobuda. Saka, mudziyo we magnetic filtration wakareba uye wakamanikana une simba guru rekusefa zvimedu zvikuru, asi panguva ino unowedzera kurasikirwa kwema target ions uye panguva imwe chete unowedzera kuoma kwechimiro. Saka, kuve nechokwadi chekuti mudziyo we magnetic filtration une kubviswa kwakanaka kwezvimedu zvikuru uye kushanda zvakanaka kwekutakura ma ion chinhu chinodiwa kuti tekinoroji ye multi-arc ion coating ive netariro yakakura mukuisa mafirimu matete ane simba rakawanda. Kushanda kwemudziyo we magnetic filtration kunokanganiswa nesimba re magnetic field, bend bias, mechanical baffle aperture, arc source current uye charged particle incidence angle. Nekuisa ma parameter akakodzera emudziyo we magnetic filtration, mhedzisiro yekusefa yezvimedu zvikuru uye kushanda kwe ion transfer kwechinangwa kunogona kuvandudzwa zvinobudirira.