Ikoranabuhanga ryo kuyungurura ibyuma hakoreshejwe magnetique

Inyigisho y'ibanze y'igikoresho cyo kuyungurura magnetic
Uburyo bwo kuyungurura bw'igikoresho gikoresha ikoranabuhanga rya rukuruzi ku bice binini biri mu muyoboro wa plasma ni ubu bukurikira:
Dukoresheje itandukaniro riri hagati ya plasma n'uduce tunini turi mu muyoboro w'amashanyarazi n'igipimo cy'umuvuduko w'amashanyarazi, hari "inzitizi" (yaba urukuta rw'umuyoboro w'amazi cyangwa urukuta rw'umuyoboro ruzungurutse) ishyirwa hagati y'umuyoboro w'amazi n'ubuso bwa cathode, ibuza uduce twose tugenda mu murongo ugororotse hagati ya cathode n'umuyoboro w'amazi, mu gihe iyoni zishobora guhindurwa n'imbaraga za rukuruzi zikanyura muri "inzitizi" zijya muri substrate.

Ihame ry'imikorere y'igikoresho cyo kuyungurura magnetic

Mu gakoresho ka rukuruzi, Pe<

Pe na Pi ni radiyo ya Larmor ya electron na ions, naho a ni umurambararo w'imbere wa filter ya magneti. Electron ziri muri plasma zigirwaho ingaruka n'imbaraga za Lorentz zikazenguruka mu butaka bwa magnetici mu buryo bw'umurongo, mu gihe ingufu za magneti zigira ingaruka nke ku guhurira kwa ions bitewe n'itandukaniro riri hagati ya ions na electron muri radius ya Larmor. Ariko, iyo electron igenda ku murongo w'igikoresho cya filteri ya magneti, izakurura ions ku murongo w'umurongo kugira ngo izunguruke bitewe n'icyerekezo cyayo n'imbaraga zikomeye z'amashanyarazi, kandi umuvuduko wa electron uruta iyon, bityo electron ihora ikurura iyon imbere, mu gihe plasma ihora idafite ingufu nyinshi. Uduce duto dufite ingufu nke cyangwa dufite ingufu nke, kandi ubwiza ni bunini cyane kuruta ions na electron, muri rusange ntabwo bigizweho ingaruka n'imbaraga za magnetici na linear motion ku buryo butihuta, kandi izayungururwa nyuma yo kugongana n'urukuta rw'imbere rw'igikoresho.
Mu rwego rw’imikorere ihuriweho yo kugonga umurima wa rukuruzi hamwe no kuzamuka k’umuvuduko w’ubushyuhe hamwe no kugongana kwa ion-electron, plasma ishobora guhindurirwa mu gikoresho cyo kuyungurura magnetic. Muri moderi zisanzwe zikoreshwa muri iki gihe ni moderi ya Morozov flux na moderi ya rotor ihamye ya Davidson, zifite imiterere ikurikira: hari umurima wa rukuruzi utuma electron zigenda mu buryo bwa helical gusa.
Imbaraga z'imbaraga za rukuruzi ziyobora ingendo y'amaraso mu gikoresho cyo kuyungurura rukuruzi zigomba kuba ku buryo:

Mi, Vo, na Z ni uburemere bwa iyoni, umuvuduko w'ubwikorezi, n'umubare w'ibishari byinjizwamo. a ni umurambararo w'imbere wa filter ya rukuruzi, naho e ni charge ya electron.
Icyitonderwa ni uko ioni zimwe na zimwe zifite ingufu nyinshi zidashobora gufatwa neza n'umuyoboro wa electron. Zishobora kugera ku rukuta rw'imbere rwa filter ya rukuruzi, bigatuma urukuta rw'imbere rugira ubushobozi bwiza, ibyo bigatuma ioni zidakomeza kugera ku rukuta rw'imbere kandi bikagabanya igihombo cya plasma.
Dukurikije iki kibazo, umuvuduko ukwiye wa bias ushobora gushyirwa ku rukuta rw'igikoresho cya magnetic filter kugira ngo hirindwe impanuka ya iyoni kugira ngo hongerwe uburyo bwo gutwara iyoni ku ntego.

Ishyirwa mu byiciro ry'igikoresho cyo kuyungurura gikoresheje ikoranabuhanga rya rukuruzi
(1) Imiterere y'umurongo. Imbaraga rukuruzi ikora nk'iyobora ry'urujya n'uruza rw'imirasire ya ion, ikagabanya ingano y'ahantu hafite kato n'umubare w'udutsi duto cyane, mu gihe yongera imbaraga zo gukubitana muri plasma, bigatuma udutsi duto tudafite aho duhuriye na two duhinduka iyoni kandi ikagabanya umubare w'udutsi duto cyane, kandi ikagabanya vuba umubare w'udutsi duto cyane uko imbaraga z'imbaraga rukuruzi ziyongera. Ugereranyije n'uburyo busanzwe bwo gusiga iyoni nyinshi, iki gikoresho cyubatswe gitsinda igabanuka rikomeye ry'imikorere riterwa n'ubundi buryo kandi gishobora kwemeza ko filime ikomeza gukwirakwira mu gihe kigabanya umubare w'udutsi duto cyane ku kigero cya 60%.
(2) Imiterere y’ubwoko bw’impande. Nubwo imiterere ifite imiterere itandukanye, ariko ihame ry’ibanze ni rimwe. Plasma igenda munsi y’imikorere ihuriweho y’imbaraga za rukuruzi n’amashanyarazi, kandi imbaraga za rukuruzi zikoreshwa mu gufunga no kugenzura plasma nta guhindura icyerekezo ku murongo w’imbaraga za rukuruzi. Kandi uduce tudafite umuriro tuzagenda ku murongo kandi tugatandukana. Filimi zitegurwa n’iki gikoresho zifite ubukana bwinshi, ubukana buke bw’ubuso, ubucucike bwiza, ingano imwe y’ibinyampeke, n’ubufatanye bukomeye bwa firime. Isesengura rya XPS ryerekana ko ubukana bw’ubuso bwa firime za ta-C zitwikiriwe n’ubu bwoko bw’igikoresho bushobora kugera kuri 56 GPa, bityo igikoresho cy’imiterere igonze ni bwo buryo bukoreshwa cyane kandi bufite akamaro mu gukuraho uduce duto, ariko imikorere yo gutwara ioni ikenewe igomba kunozwa kurushaho. Igikoresho cy’iyungurura rya 90° ni kimwe mu bikoresho by’imiterere igonze bikoreshwa cyane. Igerageza ku ishusho y’ubuso bwa firime za Ta-C ryerekana ko ishusho y’ubuso bwa firime za 360° zigonze idahinduka cyane ugereranije n’igikoresho cy’iyungurura rya 90° zigonze, bityo ingaruka zo kuyungurura rya 90° zigonze ku duce duto zishobora kugerwaho. Igikoresho cyo kuyungurura magnetic cya 90° gifite ahanini ubwoko bubiri bw'imiterere: kimwe ni solenoid yo kuyungurura ishyirwa mu cyumba cy'imyanda, ikindi gishyirwa hanze y'icyumba cy'imyanda, kandi itandukaniro riri hagati yabyo riri mu miterere gusa. Umuvuduko w'imikorere y'igikoresho cyo kuyungurura magnetic cya 90° kiri kuri 10-2Pa, kandi gishobora gukoreshwa mu buryo butandukanye, nko gusiga nitride, okiside, karubone idahinduka, firime ya semiconductor na firime y'icyuma cyangwa idafite icyuma.

Imikorere myiza y'igikoresho cyo kuyungurura icyuma gikoresha ikoranabuhanga rya rukuruzi
Kubera ko atari uduce duto twose tunini dushobora gutakaza ingufu za kinetike mu gihe dukomeza kugongana n'urukuta, umubare runaka w'uduce duto tugera ku gice cy'ubutaka binyuze mu muyoboro w'amazi. Kubwibyo, igikoresho kirekire kandi gito cyo kuyungurura gikoresha magnetism gifite ubushobozi bwo kuyungurura uduce duto, ariko muri iki gihe kizongera igihombo cya spectulation ions kandi icyarimwe kikongera imiterere y'imiterere. Kubwibyo, kwemeza ko igikoresho cyo kuyungurura gikoresha magnetism gifite uburyo bwiza bwo gukuraho uduce duto no gutwara ion neza cyane ni ngombwa kugira ngo ikoranabuhanga rya multi-arc ion coating rigire amahirwe menshi yo gushyiramo filime ntoya zikora neza. Imikorere y'igikoresho cyo kuyungurura gikoresha magnetism igirwaho ingaruka n'imbaraga za magnetic field, bend bias, mechanical baffle aperture, arc source current na charged particle incidence angle. Hamwe no gushyiraho ibipimo byumvikana by'igikoresho cyo kuyungurura gikoresha magnetism, ingaruka zo kuyungurura uduce duto n'ubushobozi bwo kohereza ion mu ntego bishobora kunozwa neza.