Ukadaulo wosefera maginito

Chiphunzitso choyambirira cha chipangizo chosefera cha maginito
Njira yosefera ya chipangizo chosefera cha maginito cha tinthu tating'onoting'ono tating'onoting'ono ta plasma ndi iyi:
Pogwiritsa ntchito kusiyana pakati pa plasma ndi tinthu tating'onoting'ono tomwe timagwira ntchito komanso chiŵerengero cha mphamvu ndi kulemera, pali "chotchinga" (kaya ndi baffle kapena khoma lopindika la chubu) lomwe limayikidwa pakati pa substrate ndi pamwamba pa cathode, lomwe limatseka tinthu tating'onoting'ono tomwe timayenda molunjika pakati pa cathode ndi substrate, pomwe ma ayoni amatha kutembenuzidwa ndi mphamvu ya maginito ndikudutsa mu "chotchinga" kupita ku substrate.

Mfundo yogwirira ntchito ya chipangizo chosefera cha maginito

Mu mphamvu ya maginito, Pe<

Pe ndi Pi ndi ma radii a Larmor a ma electron ndi ma ayoni motsatana, ndipo a ndi m'mimba mwake wa fyuluta ya maginito. Ma electron omwe ali mu plasma amakhudzidwa ndi mphamvu ya Lorentz ndipo amazungulira mozungulira mphamvu ya maginito, pomwe mphamvu ya maginito imakhala ndi mphamvu yochepa pa kusonkhana kwa ma ayoni chifukwa cha kusiyana pakati pa ma ayoni ndi ma elekitironi mu radius ya Larmor. Komabe, pamene kuyenda kwa ma elekitironi motsatira mzere wa chipangizo cha maginito, kumakopa ma ayoni motsatira axial kuti ayende mozungulira chifukwa cha kuyang'ana kwake ndi mphamvu yamagetsi yoipa, ndipo liwiro la ma elekitironi ndi lalikulu kuposa ion, kotero elekitironi imakoka ion patsogolo nthawi zonse, pomwe plasma nthawi zonse imakhalabe yopanda magetsi. Tinthu tating'onoting'ono tamagetsi tomwe tili ndi magetsi kapena tomwe tili ndi magetsi pang'ono, ndipo khalidwe lake ndi lalikulu kwambiri kuposa ma ayoni ndi ma elekitironi, makamaka osakhudzidwa ndi mphamvu ya maginito ndi kuyenda kolunjika motsatira inertia, ndipo idzasefedwa pambuyo poti yagundana ndi khoma lamkati la chipangizocho.
Pogwiritsa ntchito ntchito yophatikizana ya kupindika kwa mphamvu ya maginito ndi kugwedezeka kwa gradient ndi ion-electron collisions, plasma imatha kuchotsedwa mu chipangizo chosefera maginito. Mu zitsanzo zodziwika bwino za chiphunzitso zomwe zimagwiritsidwa ntchito masiku ano ndi chitsanzo cha Morozov flux ndi chitsanzo cha Davidson rigid rotor, zomwe zili ndi izi: pali mphamvu ya maginito yomwe imapangitsa ma elekitironi kuyenda mozungulira.
Mphamvu ya mphamvu ya maginito yomwe imatsogolera kayendedwe ka axial ka plasma mu chipangizo chosefera maginito iyenera kukhala yoti:

Mi, Vo, ndi Z ndi kulemera kwa ayoni, liwiro la mayendedwe, ndi chiwerengero cha ma charges omwe amanyamulidwa motsatana. a ndi m'mimba mwake wa fyuluta yamaginito, ndipo e ndi ma electron charge.
Dziwani kuti ma ayoni ena amphamvu kwambiri sangalumikizidwe mokwanira ndi kuwala kwa ma elekitironi. Angafike pakhoma lamkati la fyuluta yamaginito, zomwe zimapangitsa kuti khoma lamkati likhale ndi mphamvu yabwino, zomwe zimalepheretsa ma ayoni kupitiliza kufika pakhoma lamkati ndikuchepetsa kutayika kwa plasma.
Malinga ndi chochitikachi, mphamvu yoyenera ya bias ingagwiritsidwe ntchito pakhoma la chipangizo chosefera cha maginito kuti aletse kugundana kwa ma ayoni kuti awonjezere kuyendetsa bwino kwa ma ayoni omwe akufuna.

Kugawa chipangizo chosefera maginito
(1) Kapangidwe ka mzere. Mphamvu ya maginito imagwira ntchito ngati chitsogozo cha kuyenda kwa ion beam, kuchepetsa kukula kwa malo a cathode ndi kuchuluka kwa magulu a tinthu tating'ono ...
(2) Kapangidwe ka mtundu wa curve. Ngakhale kapangidwe kake kali ndi mitundu yosiyanasiyana, koma mfundo yoyambira ndi yofanana. Plasma imayenda pansi pa ntchito yophatikizana ya mphamvu ya maginito ndi mphamvu yamagetsi, ndipo mphamvu ya maginito imagwiritsidwa ntchito kuletsa ndikuwongolera plasma popanda kupotoza kuyenda motsatira njira ya mphamvu ya maginito. Ndipo tinthu tosayatsidwa timayenda motsatira mzere ndipo timalekanitsidwa. Mafilimu okonzedwa ndi chipangizochi ali ndi kuuma kwakukulu, kuuma pang'ono pamwamba, kukhuthala kwabwino, kukula kofanana kwa tirigu, komanso kumatirira kwamphamvu kwa maziko a filimu. Kusanthula kwa XPS kukuwonetsa kuti kuuma kwa pamwamba pa mafilimu a ta-C okhala ndi chipangizochi kumatha kufika 56 GPa, motero chipangizo chopindika ndi njira yogwiritsidwa ntchito kwambiri komanso yothandiza kwambiri pochotsa tinthu tating'onoting'ono tating'ono, koma kuyendetsa bwino kwa ma ion kuyenera kuwonjezeredwa. Chipangizo chopindika cha maginito cha 90° ndi chimodzi mwazipangizo zopindika zomwe zimagwiritsidwa ntchito kwambiri. Kuyesera pa mawonekedwe a pamwamba pa mafilimu a Ta-C kukuwonetsa kuti mawonekedwe a pamwamba pa chipangizo chopindika cha maginito cha 360° sikusintha kwambiri poyerekeza ndi chipangizo chopindika cha maginito cha 90°, kotero zotsatira za kusefera maginito cha 90° bend pa tinthu tating'onoting'ono tating'onoting'ono zimatha kupezeka. Chipangizo chosefera cha maginito cha 90° bend chimakhala ndi mitundu iwiri ya kapangidwe kake: chimodzi ndi chopindika chomwe chimayikidwa mu chipinda chopanda mpweya, ndipo china chimayikidwa kunja kwa chipinda chopanda mpweya, ndipo kusiyana pakati pawo kuli kokha mu kapangidwe kake. Kupanikizika kogwira ntchito kwa chipangizo chosefera cha maginito cha 90° bend kuli mu dongosolo la 10-2Pa, ndipo chingagwiritsidwe ntchito m'njira zosiyanasiyana, monga nitride wokutira, oxide, amorphous carbon, semiconductor film ndi filimu yachitsulo kapena yopanda chitsulo.

Kugwiritsa ntchito bwino kwa chipangizo chosefera maginito
Popeza si tinthu tonse tating'onoting'ono tomwe tingataye mphamvu ya kinetic pakagundana ndi khoma mosalekeza, tinthu tating'onoting'ono tomwe timatha kufika pa substrate kudzera mu chitoliro chotulukira. Chifukwa chake, chipangizo chosefera cha maginito chachitali komanso chopapatiza chimakhala ndi mphamvu zambiri zosefera tinthu tating'onoting'ono, koma panthawiyi chidzawonjezera kutayika kwa ma ayoni ofunikira komanso nthawi yomweyo kuwonjezera zovuta za kapangidwe kake. Chifukwa chake, kuonetsetsa kuti chipangizo chosefera cha maginito chili ndi kuchotsa bwino tinthu tating'onoting'ono tating'onoting'ono tating'onoting'ono komanso kuyendetsa bwino ma ayoni ndikofunikira kwambiri kuti ukadaulo wa multi-arc ion wokutira ukhale ndi mwayi waukulu wogwiritsa ntchito popanga mafilimu opyapyala opambana. Kugwira ntchito kwa chipangizo chosefera cha maginito kumakhudzidwa ndi mphamvu ya maginito, bend bias, mechanical baffle aperture, arc source current ndi charged particle incidence angle. Mwa kukhazikitsa magawo oyenera a chipangizo chosefera cha maginito, zotsatira zosefera za tinthu tating'onoting'ono tating'onoting'ono ndi mphamvu yosinthira ma ayoni ya chandamale zitha kukonzedwa bwino.