Itekhnoloji yokuhluza ngemagnethi

Ithiyori esisiseko yesixhobo sokucoca ngemagnethi
Indlela yokucoca isixhobo sokucoca imagnethi samasuntswana amakhulu kwi-plasma beam yile ilandelayo:
Ukusebenzisa umahluko phakathi kweplasma kunye neenxalenye ezinkulu ezisebenza kunye nomlinganiselo we-charge-to-mass, kukho "umqobo" (nokuba yi-baffle okanye udonga olugobileyo lwetyhubhu) olubekwe phakathi kwe-substrate kunye nomphezulu we-cathode, ovimba naziphi na iinxalenye ezihamba kumgca othe tye phakathi kwe-cathode kunye ne-substrate, ngelixa ii-ion zinokuphambukiswa yi-magnetic field kwaye zidlule "kumqobo" ukuya kwi-substrate.

Umgaqo wokusebenza wesixhobo sokucoca ngemagnethi

Kwintsimi yemagnethi, iPe<

I-Pe kunye ne-Pi zii-radii ze-Larmor zee-electron kunye nee-ion ngokulandelelana, kwaye u-a bububanzi bangaphakathi besihluzo semagnethi. Ii-electron kwi-plasma zichaphazeleka ngamandla e-Lorentz kwaye zijikeleza kwi-magnetic field nge-axially, ngelixa i-magnetic field ingenampembelelo ingako ekuhlanganiseni kwee-ion ngenxa yomahluko phakathi kwee-ion kunye nee-electron kwi-Larmor radius. Nangona kunjalo, xa intshukumo ye-electron ijikeleze i-axis yesixhobo sesihluzo semagnethi, iya kutsala ii-ions kwi-axial ukuze ihambe ngokujikelezayo ngenxa yokugxila kwayo kunye ne-powerful negative electric field, kwaye isantya se-electron sikhulu kune-ion, ngoko ke i-electron itsala i-ion rhoqo phambili, ngelixa i-plasma ihlala ingathathi cala ngombane. Amasuntswana amakhulu angathathi cala ngombane okanye atshajwe kancinci, kwaye umgangatho mkhulu kakhulu kunee-ion kunye nee-electron, ngokusisiseko ayichaphazeleki yi-magnetic field kunye ne-linear motion ecaleni kwe-inertia, kwaye iya kuhluzwa emva kokungqubana nodonga lwangaphakathi lwesixhobo.
Phantsi komsebenzi odibeneyo we-bending magnetic field curvature kunye ne-gradient drift kunye ne-ion-electron collisions, i-plasma inokujikwa kwisixhobo sokucoca i-magnetic. Kwiimodeli eziqhelekileyo zethiyori ezisetyenziswayo namhlanje yiMorozov flux model kunye neDavidson rigid rotor model, ezinale mpawu ilandelayo: kukho i-magnetic field eyenza ii-electron zihambe ngendlela ejikelezayo.
Amandla e-magnetic field akhokela intshukumo ye-axial ye-plasma kwisixhobo sokucoca i-magnetic kufuneka abe ngolu hlobo:

I-Mi, i-Vo, kunye ne-Z zi-ion mass, i-transport velocity, kunye nenani lee-charges ezithwalwa ngokwahlukeneyo. I-a yi-inner diameter ye-magnetic filter, kwaye i-e yi-electron charge.
Kufuneka kuqatshelwe ukuba ezinye ii-ion zamandla aphezulu azinakubotshelelwa ngokupheleleyo ngumqadi we-electron. Zinokufikelela eludongeni lwangaphakathi lwesihluzo semagnethi, zenze udonga lwangaphakathi lube namandla angcono, nto leyo ethintela ii-ion ukuba zingaqhubeki zifikelela eludongeni lwangaphakathi kwaye inciphise ukulahleka kwe-plasma.
Ngokwale meko, uxinzelelo olufanelekileyo lwe-bias lunokusetyenziswa eludongeni lwesixhobo sesihluzo semagnethi ukuthintela ukungqubana kwee-ion ukuphucula ukusebenza kakuhle kothutho lwee-ion ekujoliswe kuzo.

Uhlu lwezixhobo zokucoca ngemagnethi
(1) Ulwakhiwo olunemigca. Intsimi yemagnethi isebenza njengesikhokelo sokuhamba komqadi we-ion, inciphisa ubungakanani bendawo ye-cathode kunye nomlinganiselo weqela lee-macroscopic particle, ngelixa iqinisa ukungqubana ngaphakathi kwe-plasma, ikhuthaza ukuguqulwa kwee-neutral particles zibe yi-ions kwaye inciphisa inani lee-macroscopic particle clusters, kwaye inciphisa ngokukhawuleza inani lee-macroscopic particles njengoko amandla e-magnetic field esanda. Xa kuthelekiswa nendlela eqhelekileyo yokugquma i-multi-arc ion, esi sixhobo sicwangcisiweyo soyisa ukuncipha okukhulu kokusebenza okubangelwa zezinye iindlela kwaye sinokuqinisekisa izinga lokubekwa kwefilimu rhoqo ngelixa sinciphisa inani lee-macroscopic particles malunga ne-60%.
(2) Ulwakhiwo olufana negophe. Nangona ulwakhiwo luneemilo ezahlukeneyo, kodwa umgaqo osisiseko uyafana. I-plasma ihamba phantsi komsebenzi odibeneyo we-magnetic field kunye ne-electric field, kwaye i-magnetic field isetyenziselwa ukuvalela nokulawula i-plasma ngaphandle kokutshintsha intshukumo kwicala lemigca yamandla e-magnetic. Kwaye amasuntswana angatshajwayo aya kuhamba ecaleni komgca kwaye ahlulwe. Iifilimu ezilungiselelwe sesi sixhobo solwakhiwo zinobunzima obuphezulu, uburhabaxa obuphantsi bomphezulu, uxinano oluhle, ubungakanani obufanayo bengqolowa, kunye nokunamathela okuqinileyo kwesiseko sefilimu. Uhlalutyo lwe-XPS lubonisa ukuba ubunzima bomphezulu weefilimu ze-ta-C ezigqunywe ngolu hlobo lwesixhobo bunokufikelela kwi-56 GPa, ngoko ke isixhobo solwakhiwo olugobileyo sesona sisetyenziswa kakhulu kwaye sisebenzayo sokususa amasuntswana amakhulu, kodwa ukusebenza kakuhle kokuthutha kwe-ion ekujoliswe kuyo kufuneka kuphuculwe ngakumbi. Isixhobo sokucoca i-magnetic esigobileyo se-90° sesinye sezixhobo zolwakhiwo olugobileyo ezisetyenziswa kakhulu. Uvavanyo kwiprofayili yomphezulu weefilimu ze-Ta-C lubonisa ukuba iprofayili yomphezulu wesixhobo sokucoca i-magnetic esigobileyo se-360° ayitshintshi kakhulu xa kuthelekiswa nesixhobo sokucoca i-magnetic esigobileyo se-90°, ngoko ke isiphumo sokucoca i-magnetic esigobileyo se-90° kumasuntswana amakhulu sinokufezekiswa ngokusisiseko. Isixhobo sokucoca imagnethi esigobileyo esingu-90° ikakhulu sineentlobo ezimbini zezakhiwo: esinye sisixhobo sokucoca i-bend esibekwe kwigumbi lokucoca i-vacuum, kwaye esinye sibekwe ngaphandle kwegumbi lokucoca i-vacuum, kwaye umahluko phakathi kwazo ukwisakhiwo kuphela. Uxinzelelo olusebenzayo lwesixhobo sokucoca imagnethi esigobileyo esingu-90° lukwi-10-2Pa, kwaye singasetyenziswa kwiintlobo ngeentlobo zezicelo, ezifana ne-nitride yokugquma, i-oxide, i-carbon engabonakaliyo, ifilimu ye-semiconductor kunye nefilimu yesinyithi okanye engeyiyo yesinyithi.

Ukusebenza kakuhle kwesixhobo sokucoca ngemagnethi
Ekubeni ingezizo zonke iinxalenye ezinkulu ezinokulahlekelwa ngamandla e-kinetic xa zingqubana rhoqo nodonga, inani elithile leenxalenye ezinkulu liya kufikelela kwi-substrate nge-outlet yombhobho. Ke ngoko, isixhobo sokucoca esinemagnethi eside nesincinci sinokusebenza okuphezulu kokucoca kweenxalenye ezinkulu, kodwa ngeli xesha siya kwandisa ukulahleka kwee-ions ezijoliswe kuzo kwaye kwangaxeshanye sonyusa ubunzima besakhiwo. Ke ngoko, ukuqinisekisa ukuba isixhobo sokucoca esinemagnethi sinokususa iinxalenye ezinkulu kakhulu kunye nokusebenza kakuhle kokuthutha ii-ion kuyimfuneko ebalulekileyo ukuze iteknoloji yokugquma ii-ion ezininzi ibe nethuba elibanzi lokufaka iifilimu ezincinci ezisebenzayo. Ukusebenza kwesixhobo sokucoca esinemagnethi kuchatshazelwa ngamandla e-magnetic field, i-bend bias, i-mechanical baffle aperture, i-arc source current kunye ne-charged particle incidence angle. Ngokumisela iiparameter ezifanelekileyo zesixhobo sokucoca esinemagnethi, isiphumo sokucoca seenxalenye ezinkulu kunye nokusebenza kokudlulisa ii-ion kwethagethi kunokuphuculwa ngempumelelo.