Izici Ezibalulekile Zokulawula Izinga Lokushisa Ezinqubweni Zokumboza Nge-Vacuum — Ipharamitha Eyinhloko Yokuzinza Kwenqubo

1. Kungani Izinga Lokushisa Liyipharamitha Ebalulekile Ekumbozeni I-Vacuum

Ezinqubweni zokumboza nge-vacuum (i-PVD / i-CVD), izinga lokushisa aliyona into eguquguqukayo ezimele kodwa liyipharamitha eyisisekelo elawula isimo se-substrate, izindlela zokukhula kwefilimu, kanye nokwakheka kwesakhiwo se-interfacial.
Ukushisa kwe-substrate kuthinta ngqo:

Ukuhamba komhlaba kwama-athomu agciniwe

Ubuningi befilimu kanye nesakhiwo esincane

Amazinga okucindezeleka okusele ngaphakathi kwesembozo

Amandla okunamathela phakathi kwefilimu ne-substrate

Ezinhlelweni ezifana nokugqoka okubonakalayo, izingxenye zangaphakathi nezangaphandle zezimoto, kanye nokugqoka okusebenzayo, ukulawulwa kokushisa okungafanele ngokuvamile kuyimbangela eyinhloko yokulahlekelwa kwesivuno kanye nokuguquguquka kokusebenza.

2. Umthelela Oqondile Wezinga Lokushisa Ekukhuleni Kwefilimu
2.1 Ukuhamba Kwe-Atomic Nokuqiniswa Kwamafilimu

Ngesikhathi sokufakwa, izinga lokushisa le-substrate linquma ukuthi ama-athomu afikayo angadlula yini ekusakazweni okwanele kobuso.
Emazingeni okushisa aphansi kakhulu:

Ukuhamba kwe-athomu kunqunyelwe

Amafilimu abonisa izakhiwo ezinezimbobo noma ezinezinsika

Ukuqina kanye nokumelana nemvelo kuyaphazamiseka

Emazingeni okushisa afanele:

Ama-athomu athola ukuhamba okwanele kobuso

Amafilimu aba makhulu futhi afanayo

Izakhiwo ezibonakalayo nezemishini zithuthuke kakhulu

2.2 Ingozi Yokucindezeleka Kwefilimu Nokuwohloka Kwe-Substrate

Ukucindezeleka kwefilimu kuvela kakhulu ku:

Ukucindezeleka kokushisa

Ukucindezeleka kokukhula kwangaphakathi

Ukushintshashintsha okukhulu kwezinga lokushisa noma ama-gradients kungaholela ku:

Ukuqhekeka kwefilimu

I-warpage ye-substrate

Ukunamathela okuncishisiwe

Lokhu kubaluleke kakhulu ezindaweni ezinkulu zeglasi kanye nezingxenye ze-polymer ezisodongeni oluncane.

2.3 Imikhawulo Yokushisa Engaphansi Kwe-Substrate kanye Nezithiyo Zenqubo Yefasitela

Izingxenye ezihlukene zinezinga lokushisa elihlukile kakhulu:

Izisekelo zengilazi nezensimbi zinikeza amafasitela anokushisa okubanzi

Izingxenye ze-polymer (PC, ABS, PMMA) zinemingcele emincane yokushisa

Ukuphathwa kabi kwezinga lokushisa kungabangela:

Ukuguqulwa kokushisa

Ukuhlushwa kokucindezeleka kobuso

Ukwehluleka kokuhlanganiswa kwezansi

3. Izimbangela Ezivamile Zokungazinzile Kwezinga Lokushisa Ngesikhathi Sokumboza
3.1 Umthwalo Wokushisa Obangelwa Yi-Plasma Namandla Okuphalaza

Ekuqhumeni kwe-magnetron, ukuminyana kwamandla aphezulu kukhulisa kakhulu izinga lokushisa lobuso be-substrate. Ngaphandle kokushabalalisa okwanele kokushisa, kungenzeka ukushisa ngokweqile kwendawo.

3.2 Ukusatshalaliswa Kwezinga Lokushisa Elingalingani Ngenxa Yomklamo Wokulayisha

Ubuningi bokulayisha kwe-substrate, usayizi, kanye nokucushwa kwe-fixture kuthinta ngqo:

Ukudluliselwa kokushisa okubangelwa imisebe

Ukusatshalaliswa kwe-plasma

Ukufana kwezinga lokushisa

3.3 Impendulo Ebambezelekile Yezinhlelo Zokupholisa Nokulawula Izinga Lokushisa

Ukwakheka kwesekethe yokupholisa okungalungile noma impendulo yokulawula izinga lokushisa ehamba kancane kwandisa ingozi yokushisa ngokweqile kanye nokungazinzi kwenqubo.

4. Amasu Obunjiniyela Okulawula Izinga Lokushisa Okuphumelelayo
4.1 Ukuqapha Izinga Lokushisa Eliqondile Le-Substrate

Izinhlelo zokuzwa izinga lokushisa ezinamaphoyinti amaningi kanye nezinhlelo zokuphendula zinikeza isilinganiso sangempela sokushisa kwangempela kwe-substrate, kunokuthembela kuphela ekushiseni kwegumbi.

4.2 Ukuxhumanisa Okuvaliwe Phakathi Kwamandla Nokushisa

Ukuhlanganisa amandla okubhoboza, amapharamitha omthombo we-ion, kanye nokulawula izinga lokushisa kwenza kube lula ukulinganisa izinga lokufakwa kanye nomthwalo wokushisa.

4.3 Ukuphathwa Okuthuthukisiwe Kokushisa Kwezinto Ezihlanganisiwe Nezithwali

Izinto zokushisa eziphezulu kanye nomklamo wendawo yokuxhumana olungiselelwe kahle kuthuthukisa ukusebenza kahle kokudlulisa ukushisa futhi kunciphise izindawo ezishisayo zendawo.

4.4 Amasu Okubeka Izingxenye kanye Nokubhafa Kwe-Thermal

Ukufakwa kwezinyathelo eziningi, ukusheshisa amandla, kanye nokupholisa okuphakathi kuvimbela ngempumelelo imiphumela yokushisa eqongelelekayo.

5. Isiphetho

Ukulawulwa kwezinga lokushisa akuyona into eyodwa esetshenziswayo, kodwa kuyindlela yobunjiniyela esezingeni lesistimu ehlanganisa ukwakheka kwenqubo, ukwakheka kwemishini, kanye nokulawula okuzenzakalelayo.
Ezinhlelweni zokusebenza ezifuna ukuhambisana okuphezulu nokuthembeka, ukuphathwa kwezinga lokushisa okuzinzile, okulawulwayo, nokuphindaphindekayo sekuyisinkomba esibalulekile sokuvuthwa kwenqubo yokumboza nge-vacuum kanye nekhono lemishini.

–Lesi sihloko sishicilelwe ngu imishini yokumboza nge-vacuum umenzi we-Zhenhua Vacuum