Ingingo z'ingenzi zo kugenzura ubushyuhe mu mikorere yo gusiga ifu — Igipimo cy'ingenzi cyo guhagarara kw'imikorere

1. Impamvu ubushyuhe ari ikintu cy'ingenzi mu gusiga irangi ry'ubushyuhe

Mu buryo bwo gusiga irangi ry’ubushyuhe (PVD / CVD), ubushyuhe si ikintu cyihariye ahubwo ni igipimo cy’ibanze kigenga imiterere y’ubutaka, uburyo bwo gukura kw’urumuri, n’imiterere y’imiterere y’urumuri.
Ubushyuhe bw'ubutaka bugira ingaruka zitaziguye kuri ibi bikurikira:

Ingendo zo hejuru z'atomu zabitswe

Ubucucike bwa filime n'imiterere mito

Igipimo cy'imihangayiko isigaye mu gipfundikizo

Ingufu zo gufatana hagati ya firime n'ubutaka

Mu bikorwa nko gusiga irangi ry’urumuri, ibice by’imbere n’inyuma by’imodoka, ndetse no gusiga irangi ry’imikorere, kugenzura ubushyuhe nabi akenshi ni yo mpamvu nyamukuru yo gutakaza umusaruro no guhindagurika kw’imikorere.

2. Ingaruka zitaziguye z'ubushyuhe ku mikorere y'ikura rya firime
2.1 Uburyo atomiki igenda n'ubwiyongere bwa firime

Mu gihe cyo gushyiramo, ubushyuhe bw'ubutaka bugena niba atome zigezeyo zishobora gukwirakwira ku buso bihagije.
Ku bushyuhe buri hasi cyane:

Uburyo bwo kugenda bwa atomiki bufite aho bugarukira

Filime zigaragaza imiterere ifite imyenge cyangwa inkingi

Kuramba no kudahangana n'ibidukikije birabangamiwe

Ku bushyuhe bwiza:

Atome zigira ubushobozi bwo kugenda neza ku buso

Filime ziba nyinshi kandi zimeze kimwe

Imiterere y'amatara n'iy'imashini irarushaho kuba myiza cyane

2.2 Ingaruka zo gucika kw'ishusho n'ingaruka zo guhindagurika kw'inyuguti

Umuvuduko wa filime uterwa ahanini na:

Umuvuduko w'ubushyuhe

Ihungabana ry'ikura ry'imbere mu mutima

Ihindagurika rikomeye ry'ubushyuhe cyangwa imihindagurikire y'ikirere bishobora gutera:

Gucika kw'amafilimi

Urupapuro rw'imbunda rwo hasi

Kugabanuka k'ubufatanye

Ibi ni ingenzi cyane cyane ku bidukikije binini by'ibirahure n'ibice bya polymeri byo mu rukuta rugufi.

2.3 Imipaka y'ubushyuhe bwo munsi y'ubutaka n'imbogamizi ku idirishya

Uduce dutandukanye dufite ubushobozi bwo kwihanganira ubushyuhe butandukanye cyane:

Ibyuma by'ikirahure n'ibyuma bitanga amadirishya afite ubushyuhe bwinshi

Ibyuma bya polymer (PC, ABS, PMMA) bifite imiterere mito y'ubushyuhe

Imicungire mibi y'ubushyuhe ishobora gutera:

Guhindura ubushyuhe

Ubwinshi bw'imihangayiko yo hejuru

Kunanirwa guteranya ibintu mu buryo butunguranye

3. Impamvu zikunze gutera ubushyuhe budahindagurika mu gihe cyo gusiga irangi
3.1 Umutwaro w'ubushyuhe uterwa na Plasma n'imbaraga zo gusuka

Mu gushyuha kwa magnetron, ubucucike bw'ingufu nyinshi byongera cyane ubushyuhe bw'ubuso bwa substrate. Iyo ubushyuhe budakwirakwira bihagije, ubushyuhe bukabije bushobora kubaho.

3.2 Ikwirakwizwa ry'ubushyuhe budahuje bitewe n'imiterere y'ibicuruzwa

Ubucucike bw'umuzigo, ingano, n'imiterere y'ibikoresho bigira ingaruka ku buryo butaziguye:

Kohereza ubushyuhe hakoreshejwe imirasire

Ikwirakwizwa rya plasma

Ubushyuhe bungana

3.3 Uburyo bwo Gukonjesha no Kugenzura Ubushyuhe Butinze Gusubiza

Imiterere idahwitse y’urusobe rw’amashanyarazi cyangwa uburyo bwo kugenzura ubushyuhe buhoro byongera ibyago byo gushyuha cyane no kudahinduka kw’imikorere.

4. Ingamba z'ubuhanga mu kugenzura ubushyuhe neza
4.1 Gukurikirana neza ubushyuhe bwa substrate

Sisitemu zo kumenya ubushyuhe bw'ibice byinshi n'uburyo bwo gutanga ibitekerezo bitanga uburyo bwo gupima ubushyuhe nyabwo bw'ibice bya substrate mu gihe nyacyo, aho kwishingikiriza gusa ku bushyuhe bw'icyumba.

4.2 Ihuzabikorwa ry'ingufu n'ubushyuhe mu buryo bufunze

Guhuza imbaraga zo gusukamo amazi, ibipimo by'isoko rya iyoni, no kugenzura ubushyuhe bituma habaho kuringaniza imiterere y'umuvuduko w'amazi n'umutwaro w'ubushyuhe.

4.3 Imicungire myiza y'ubushyuhe bw'ibikoresho n'ibitwara ibikoresho

Ibikoresho bitwara ubushyuhe bwinshi hamwe n'imiterere myiza y'aho bihurira byongera ubushobozi bwo kohereza ubushyuhe kandi bigagabanya ahantu hashyuha cyane.

4.4 Ingamba zo Gushyira mu Bice Bitandukanye no Gukoresha Ubushyuhe

Gushyira ingufu mu ntambwe nyinshi, kongera ingufu, no gukonjesha hagati bigabanya ingaruka z'ubushyuhe.

5. Umwanzuro

Kugenzura ubushyuhe si imiterere imwe y'ibikoresho, ahubwo ni isomo ry'ubuhanga ku rwego rwa sisitemu rikubiyemo imiterere y'ibikorwa, imiterere y'ibikoresho, no kugenzura imikorere y'ibikoresho.
Mu mikoreshereze isaba ubwiza n'ubuziranenge, gucunga ubushyuhe mu buryo buhamye, bugenzurwa kandi busubirwamo byabaye ikimenyetso cy'ingenzi cy'uko uburyo bwo gusiga irangi ry'ibikoresho byavacuum bugeze ku rugero rwiza n'ubushobozi bw'ibikoresho.

–Iyi nkuru yasohotse na ibikoresho byo gusiga irangi ry'umwuka uruganda rwa Zhenhua Vacuum