Itekhnoloji yokucoca imagnethi

Ithiyori esisiseko yesixhobo sokuhluza ngemagnethi
Indlela yokucoca yesixhobo sokuhluza imagnethi yamasuntswana amakhulu kumqadi weplasma yile ilandelayo:
Ukusebenzisa umahluko phakathi kweplasma kunye namasuntswana amakhulu aphetheyo kunye nentlawulo-to-mass ratio, kukho "umqobo" (mhlawumbi i-baffle okanye udonga lwetyhubhu egobileyo) ibeka phakathi kwe-substrate kunye ne-cathode surface, evimba nawaphi na amasuntswana ahamba kumgca othe ngqo phakathi kwe-cathode kunye ne-substrate, ngelixa ii-ion ziyakwazi ukuphambuka kwi-substrate ye-substrate.

Umgaqo osebenzayo wesixhobo sokuhluza samagnetic

Kwintsimi yamagnetic, Pe <

I-Pe kunye ne-Pi yiLarmor radii yee-electron kunye nee-ion ngokulandelelanayo, kwaye i-diameter yangaphakathi yesihluzo samagnetic. Ii-elektroni ezikwiplasma zichatshazelwa ngamandla eLorentz kwaye zijikelezisa ecaleni kommandla wemagnethi nge-axially, ngelixa i-magnetic field inesiphumo esincinci kwi-ion clustering ngenxa yomahluko phakathi kwee-ion kunye nee-electron kwiradiyasi yeLarmor. Nangona kunjalo, xa intshukumo ye-electron ecaleni kwe-axis yesixhobo sokucoca imagnethi, iya kutsala i-ion ecaleni kwe-axial yentshukumo ejikelezayo ngenxa yokugxila kwayo kunye nentsimi yombane eyomeleleyo, kwaye isantya se-electron sikhulu kune-ion, ngoko i-electron ihlala idonsa i-ion phambili, ngelixa i-plasma ihlala ihlala i-quasi-electric neutral. Amasuntswana amakhulu angathathi hlangothi ngombane okanye ahlawuliswe kakubi kancinci, kwaye umgangatho mkhulu kakhulu kune-ion kunye nee-electron, ngokusisiseko awuchatshazelwa yimagnethi kunye nentshukumo yomgca ecaleni kwe-inertia, kwaye iya kuhluzwa ngaphandle emva kokungqubana nodonga lwangaphakathi lwesixhobo.
Ngaphantsi komsebenzi odityanisiweyo we-curvature yemagnethi egobayo kunye ne-gradient drift kunye ne-ion-electron collisions, i-plasma inokuphambuka kwisixhobo sokuhluza magnetic. In Iimodeli eziqhelekileyo zethiyori ezisetyenziswayo namhlanje ziyimodeli ye-Morozov flux kunye ne-Davidson rigid rotor model, enezinto ezilandelayo eziqhelekileyo: kukho indawo yamagnetic eyenza ukuba i-electron ihambe ngendlela engqongqo ye-helical.
Amandla ommandla wemagnethi okhokela intshukumo ye-axial yeplasma kwisixhobo sokuhluza imagnethi kufuneka ibe ngolu hlobo:

I-Mi, i-Vo, kunye no-Z bubunzima be-ion, isantya sothutho, kunye nenani leentlawulo eziqhutywe ngokulandelelanayo. a yidayamitha engaphakathi yesihluzo samagnetic, kwaye u-e yintlawulo ye-electron.
Kufuneka kuqatshelwe ukuba ezinye ii-ion zamandla eziphezulu azikwazi ukubotshwa ngokupheleleyo ngumqa we-electron. Banokufikelela kudonga lwangaphakathi lwesihluzi samagnetic, okwenza udonga lwangaphakathi lube yinto efanelekileyo, enokuthi ithintele i-ion ukuba iqhubeke nokufikelela kudonga lwangaphakathi kunye nokunciphisa ilahleko yeplasma.
Ngokwale nto, uxinzelelo olufanelekileyo olulungileyo lunokusetyenziswa eludongeni lwesixhobo sokucoca samagnetic ukuthintela ukungqubana kwee-ion ukuphucula ukuhanjiswa kwe-ion ekujoliswe kuyo.

Ukuhlelwa kwesixhobo sokuhluza samagnetic
(1)Isakhiwo somgca. Ummandla wamagnetic usebenza njengesikhokelo sokuhamba kwe-ion beam, ukunciphisa ubungakanani bendawo ye-cathode kunye nomlinganiselo we-macroscopic particle clusters, ngelixa uqinisa ukungqubana kwe-plasma, ukukhuthaza ukuguqulwa kwamasuntswana angathathi hlangothi kwi-ion kunye nokunciphisa inani leengqungquthela ze-macroscopic, kunye nokunciphisa ngokukhawuleza amandla ombane njengenani lamandla amakhulu. Xa kuthelekiswa nendlela eqhelekileyo yokwaleka i-arc ion ye-arc, esi sixhobo sicwangcisiweyo soyisa ukuncitshiswa okubonakalayo kokusebenza okubangelwa zezinye iindlela kwaye kunokuqinisekisa ngokusisiseko isantya sokubekwa kwefilimu ngelixa sinciphisa inani lamasuntswana amakhulu malunga nama-60%.
(2) Isakhiwo sohlobo lwegophe. Nangona isakhiwo sineendlela ezahlukeneyo, kodwa umgaqo osisiseko uyafana. Iplasma ihamba phantsi komsebenzi odityanisiweyo wemagnethi kunye nentsimi yombane, kwaye intsimi yamagnetic isetyenziselwa ukuvala kunye nokulawula i-plasma ngaphandle kokuphambuka intshukumo ecaleni kwendlela yamandla ombane. Kwaye amaqhekeza angahlawulwanga aya kuhamba kunye nomgca kwaye ahlulwe. Iifilimu ezilungiselelwe sesi sixhobo solwakhiwo zinobulukhuni obuphezulu, uburhabaxa obuphantsi komhlaba, ukuxinana okulungileyo, ubungakanani obufanayo obuziinkozo, kunye nesiseko sefilimu eyomeleleyo. Uhlalutyo lwe-XPS lubonisa ukuba ukuqina komphezulu weefilimu ze-ta-C ezigqunywe ngolu hlobo lwesixhobo zinokufikelela kwi-56 GPa, ngoko ke isixhobo sesakhiwo esigobileyo sesona sixhobo sisetyenziswa kakhulu kwaye sisebenzayo sokususwa kwamasuntswana amakhulu, kodwa ukuhanjiswa kwe-ion ekujoliswe kuyo kufuneka kuphuculwe ngakumbi. Isixhobo sokuhluza semagnethi se-90° sesinye sezona zixhobo zisetyenziswa kakhulu kwisakhiwo esigobileyo. Iimvavanyo kwiprofayile yomphezulu weefilimu ze-Ta-C zibonisa ukuba iprofayile yomphezulu we-360 ° igoba isixhobo sokuhluza imagnethi ayitshintshi kakhulu xa ithelekiswa nesixhobo sokuhluza semagnethi ye-90 ° bend, ngoko ke isiphumo se-90 ° bend ukuhluza kazibuthe kumasuntswana amakhulu sinokufezekiswa. I-90 ° i-bend isixhobo sokucoca imagnethi ineentlobo ezimbini zezakhiwo: enye i-solenoid egobileyo ebekwe kwigumbi lokucoca, kwaye enye ibekwe ngaphandle kwegumbi lokucoca, kwaye umahluko phakathi kwabo ukwisakhiwo kuphela. Uxinzelelo olusebenzayo lwe-90 ° i-bend yesixhobo sokucoca i-magnetic i-oda ye-10-2Pa, kwaye ingasetyenziselwa uluhlu olubanzi lwezicelo, ezifana ne-coating nitride, i-oxide, i-amorphous carbon, ifilimu ye-semiconductor kunye nefilimu okanye ifilimu engeyiyo-metal.

Ukusebenza kakuhle kwesixhobo sokuhluza samagnetic
Ekubeni akuzona zonke iinqununu ezinkulu ezinokulahlekelwa amandla e-kinetic kwiingxabano eziqhubekayo kunye nodonga, inani elithile leengqungquthela ezinkulu liya kufikelela kwi-substrate ngokusebenzisa umbhobho wokuphuma. Ngoko ke, isixhobo sokucoca samagnetic eside kunye esincinci sinomsebenzi ophezulu wokucoca iinqununu ezinkulu, kodwa ngeli xesha liya kwandisa ukulahlekelwa kwee-ion ezijoliswe kuyo kwaye ngexesha elifanayo ukwandisa ubunzima besakhiwo. Ke ngoko, ukuqinisekisa ukuba isixhobo sokuhluza samagnetic sinokususwa kwamasuntswana amakhulu kunye nokusebenza okuphezulu kothutho lwe-ion yimfuneko eyimfuneko kwitekhnoloji yokwambatha ye-arc ion eninzi ukuze ibe nethemba elibanzi lokufaka iifilimu ezibhityileyo. Ukusebenza kwesixhobo sokuhluza samagnetic kuchatshazelwa ngamandla omhlaba wamagnetic, i-bend bias, i-mechanical baffle aperture, i-arc source yangoku kunye ne-angle ye-particle ehlawulweyo ye-angle yesiganeko. Ngokumisela iiparitha ezifanelekileyo zesixhobo sokuhluza samagnetic, umphumo wokucoca amaqhekeza amakhulu kunye nokusebenza kakuhle kokudluliselwa kwe-ion ekujoliswe kuyo kunokuphuculwa ngokufanelekileyo.