Imveliso eqhubekayo kwiindawo zokugquma i-vacuum zizisa imingeni ekhethekileyo echaphazela ngokuthe ngqo uzinzo lwezixhobo, ukuphindaphindwa kwenkqubo, kunye nomgangatho wefilimu encinci. Kwimigca ye-PVD ephezulu, i-magnetron sputtering, i-ALD, okanye i-PECVD, ukugcina iiparameter zokubeka ezihambelanayo kwixesha elide lokusebenza kubalulekile, njengoko nokuguquguquka okuncinci kwiimeko ze-vacuum, uzinzo lwe-plasma, okanye ukusebenza kwethagethi kunokukhokelela ekuphambukeni okuqokelelweyo kubukhulu befilimu, i-refractive index, kunye neempawu ze-optical okanye ze-mechanical.
Enye yeengxaki eziphambili ekusebenzeni ngokuqhubekekayo kukugcina amanqanaba aphezulu kakhulu e-vacuum nangona imithwalo yegesi enamandla evela ekungenisweni kwe-substrate, iigesi ezisebenzayo, kunye nokuphuma kwegesi kwiindonga zegumbi okanye ii-substrate ezigqunywe ngaphambili. Ukuguquguquka kokwakheka kwegesi eseleyo, kubandakanya umphunga wamanzi, ioksijini, okanye ii-hydrocarbons, kunokubangela iimpendulo zeekhemikhali ezingalindelekanga, ukutshintsha i-stoichiometry yefilimu, kunye nokudala iziphene okanye amaziko okufunxa aphazamisa ukusebenza kwe-optical okanye okusebenzayo. Iinkqubo zokupompa i-vacuum eziphambili, ezifana neepompo ze-turbomolecular kunye ne-cryogenic, zidityaniswe nee-residual gas analyzers (RGA), zibalulekile ekujongeni nasekulawuleni umoya wegumbi ngexesha langempela ukuqinisekisa uzinzo lwenkqubo.
Uzinzo lweplasma lubaluleke ngokulinganayo kwimveliso eqhubekayo. Iinkqubo zokufaka i-magnetron enamandla aphezulu okanye iinkqubo zokufaka i-ion ezincediswa yi-ion kufuneka zigcine uxinano lwamandla oluhambelanayo, amazinga okukhukuliseka kwethagethi, kunye nokusasazwa kwamandla e-ion ukuthintela umahluko kwizinga lokufaka, uxinano lwefilimu, kunye nesakhiwo esincinci. Izixhobo kufuneka zidibanise ukufunyanwa kwe-arc, i-pulsed DC okanye i-RF power modulation, kunye neenkqubo zolawulo lwe-closed-loop ukunciphisa ukungazinzi okunokuvela ekusebenzeni ixesha elide, ungcoliseko lwethagethi, okanye utshintsho lomthwalo.
Ulawulo lobushushu lolunye uphawu oluphambili oluchaphazela uzinzo. Ukugqunywa rhoqo kweziseko ezinkulu okanye ii-multilayer stacks kuvelisa ubushushu obukhulu, obunokubangela uxinzelelo, ukugoba, okanye ukuqhekeka okuncinci kwiifilimu ezigciniweyo. Ukupholisa okusebenzayo kweethagethi, izibambi zesiseko, kunye neendonga zegumbi, kunye nokubeka esweni ubushushu ngokuchanekileyo, kuqinisekisa ukusasazwa kwamandla okufanayo kwaye kunciphisa iziphumo zobushushu eziqokelelweyo kwimijikelo emide yemveliso.
Ukuthembeka koomatshini kunye nokuphathwa kwe-substrate nako kudlala indima ebalulekileyo ekugcineni uzinzo. Iinkqubo zomthwalo/ukukhulula iirobhothi, ukujikeleza kwe-substrate ngokuchanekileyo, kunye nolawulo lokuhambisa oluzenzekelayo kunciphisa ukungenelela kwabantu, kunciphisa ukungalingani, kwaye kuqinisekisa ukufakwa okufanayo kuzo zonke ii-substrates. Ukuphathwa ngokufanelekileyo kuthintela imikrwelo, ungcoliseko, kunye nokuguquguquka kobukhulu befilimu okunokuphazamisa ukusebenza kwe-optical okanye ukufana kokusebenza.
Ngamafutshane, ukugcina ukusebenza okuzinzileyo kwezixhobo zokugquma i-vacuum kwimveliso eqhubekayo kufuna indlela edibeneyo, edibanisa ulawulo lwe-vacuum oluphezulu kakhulu, uzinzo lwe-plasma, ulawulo lobushushu, kunye nokuphathwa ngokuchanekileyo kwe-substrate. Ngokusebenzisa ukujonga inkqubo ephucukileyo, ulawulo lwempendulo, kunye nokuphathwa kwezinto ezizenzekelayo, iinkqubo zokugquma ezisebenzisa amandla aphezulu zinokubonelela ngeefilimu ezincinci ezinokuphinda zivele, ezikumgangatho ophezulu ngelixa zinciphisa ixesha lokungasebenzi, iziphene, kunye notshintsho kwimijikelo yemveliso ende. Eli cebo libanzi liqinisekisa ukusebenza rhoqo kwizicelo ezibalulekileyo, kubandakanya ukugquma okubonakalayo, ii-photonics, izixhobo zamandla, kunye neefilimu ezisebenzayo kwindawo enkulu.
-Eli nqaku lipapashwe nguumenzi wezixhobo zokugquma nge-vacuumI-Zhenhua Vacuum
Ixesha lokuthumela: Matshi-19-2026