Mavuto Okhazikika a Zipangizo Zophikira Vacuum Pakupanga Kosalekeza

Kupanga kosalekeza M'malo opaka vacuum cleaner muli zovuta zapadera zomwe zimakhudza mwachindunji kukhazikika kwa zida, kubwerezabwereza kwa njira, komanso mtundu wa filimu yopyapyala. Mu PVD yothamanga kwambiri, magnetron sputtering, ALD, kapena PECVD mizere, kusunga magawo okhazikika oyika zinthu nthawi yayitali ndikofunikira, chifukwa ngakhale kusinthasintha pang'ono kwa vacuum conditions, plasma stability, kapena target performance kungayambitse kusokonekera kwa makulidwe a filimu, refractive index, ndi mawonekedwe a optical kapena mechanical.

Chimodzi mwa zovuta zazikulu pakugwira ntchito kosalekeza ndikukhala ndi mpweya wambiri ngakhale kuti mpweya wochuluka umachokera ku substrate, mpweya wochitapo kanthu, komanso mpweya wochokera m'makoma a chipinda kapena zinthu zomwe zinali ndi utoto kale. Kusinthasintha kwa kapangidwe ka mpweya wotsalira, kuphatikizapo nthunzi ya madzi, mpweya, kapena ma hydrocarbon, kungayambitse zotsatira zosayembekezereka za mankhwala, kusintha stoichiometry ya filimu, ndikupanga zolakwika kapena malo ogwiritsira ntchito omwe amawononga magwiridwe antchito a kuwala kapena magwiridwe antchito. Makina apamwamba opopera vacuum, monga ma turbomolecular ndi cryogenic pumps, kuphatikiza ndi residual gas analyzers (RGA), ndi ofunikira pakuwunika ndi kuwongolera mlengalenga wa chipinda nthawi yeniyeni kuti atsimikizire kukhazikika kwa njira.

Kukhazikika kwa plasma ndikofunikira kwambiri pakupanga kosalekeza. Njira zotulutsira ma magnetron amphamvu kwambiri kapena njira zotulutsira ma ion ziyenera kukhala ndi kuchuluka kwa mphamvu kokhazikika, kuchuluka kwa kukokoloka kwa zinthu zomwe zayikidwa, komanso kugawa mphamvu kwa ma ion kuti apewe kusinthasintha kwa kuchuluka kwa zinthu zomwe zayikidwa, kuchuluka kwa filimu, ndi kapangidwe kake. Zipangizo ziyenera kuphatikiza kuzindikira kwa arc, kusintha kwa mphamvu ya DC kapena RF, ndi machitidwe owongolera otsekedwa kuti achepetse kusakhazikika komwe kungachitike chifukwa cha kugwira ntchito kwa nthawi yayitali, kuipitsidwa kwa zinthu zomwe zaikidwa, kapena kusintha kwa katundu.

Kusamalira kutentha ndi chinthu china chofunikira chomwe chimakhudza kukhazikika. Kuphimba kosalekeza kwa ma substrate akuluakulu kapena ma multilayer stacks kumapanga kutentha kwakukulu, komwe kungayambitse kupsinjika, kupindika, kapena ming'alu yaying'ono m'mafilimu omwe adayikidwa. Kuziziritsa kwachangu kwa ma target, zogwirira ma substrate, ndi makoma a chipinda, kuphatikiza ndi kuwunika kolondola kwa kutentha, kumatsimikizira kugawidwa kwa mphamvu kofanana ndikuchepetsa zotsatira za kutentha zomwe zimachitika nthawi yayitali yopanga.

Kudalirika kwa makina ndi kusamalira substrate kumathandizanso kwambiri pakusunga bata. Machitidwe olowetsa/kutsitsa katundu wa robotic, kuzungulira kwa substrate molondola, ndi zowongolera zoyendetsa zokha zimachepetsa kulowerera kwa anthu, kuchepetsa kusakhazikika bwino, ndikuwonetsetsa kuti zinthu zonse zikuyenda bwino. Kusamalira bwino kumateteza kukanda, kuipitsidwa, ndi kusinthasintha kwa makulidwe a filimu zomwe zingasokoneze magwiridwe antchito a kuwala kapena magwiridwe antchito.

Mwachidule, kusunga magwiridwe antchito okhazikika a zida zophikira vacuum popanga mosalekeza kumafuna njira yophatikizana, kuphatikiza kuwongolera vacuum kwambiri, kukhazikika kwa plasma, kasamalidwe ka kutentha, ndi kusamalira bwino substrate. Pogwiritsa ntchito kuwunika kwapamwamba kwa njira, kuwongolera mayankho, ndi kusamalira zinthu zokha, machitidwe ophikira opangidwa ndi mphamvu yapamwamba amatha kupereka mafilimu opyapyala obwerezabwereza komanso apamwamba pomwe akuchepetsa nthawi yogwira ntchito, zolakwika, ndi kusiyanasiyana pakapita nthawi yayitali yopangira. Njira yonseyi imatsimikizira magwiridwe antchito okhazikika mu ntchito zofunika kwambiri, kuphatikiza zokutira zowala, ma photonics, zida zamagetsi, ndi mafilimu ogwira ntchito m'malo akuluakulu.

-Nkhaniyi yasindikizidwa ndiwopanga zida zophikira vacuumZhenhua Vacuum