Ikorwa rihoraho Mu bidukikije byo gutwikira ibikoresho bidafite amashanyarazi, harimo imbogamizi zidasanzwe zigira ingaruka ku buryo butaziguye ku guhagarara kw'ibikoresho, gusubiramo ibikorwa, no ku bwiza bwa firime nto. Mu miyoboro ya PVD ifite ubushobozi bwo gukoresha amashanyarazi menshi, gukoresha magnetron sputtering, ALD, cyangwa PECVD, gukomeza gukoresha ibipimo bihoraho mu gihe kirekire ni ingenzi, kuko n'ihindagurika rito mu miterere y'ibikoresho bidafite amashanyarazi, guhagarara kw'amaraso mu maraso, cyangwa imikorere y'intego bishobora gutuma habaho gutandukana kw'ubugari bwa firime, imiterere ya refractive, n'imiterere y'amatara cyangwa mekanike.
Imwe mu mbogamizi z'ingenzi mu mikorere ihoraho ni ugukomeza gukoresha umwuka mwinshi cyane nubwo umwuka uva mu kirere uturutse ku butaka, imyuka ikora, no kuva mu nkuta z'icyumba cyangwa ibintu byari byaratwikiriwe mbere. Ihindagurika ry'imiterere y'imyuka isigaye, harimo umwuka w'amazi, ogisijeni, cyangwa hydrocarbon, rishobora gutera ingaruka zitari ziteganijwe, guhindura imiterere y'icyuma, no guteza inenge cyangwa amashami akoresha umwuka bigatuma habaho ingaruka mbi ku mikorere y'urumuri cyangwa imikorere y'urumuri. Sisitemu zigezweho zo gupompa umwuka, nka pompe za turbomolecular na cryogenic, hamwe n'ibikoresho bipima umwuka bisigaye (RGA), ni ingenzi mu gukurikirana no kugenzura ikirere cy'icyumba mu buryo bwihuse kugira ngo habeho umutekano.
Guhagarara neza kwa plasma ni ingenzi cyane kugira ngo habeho umusaruro uhoraho. Uburyo bwo gushyiramo magnetron ifite imbaraga nyinshi cyangwa uburyo bwo gushyiramo ion bufashijwe na ion bugomba kugumana ubucucike bw'ingufu buhamye, igipimo cy'isuri iterwa n'intego, n'ikwirakwizwa ry'ingufu za ion kugira ngo hirindwe ihindagurika ry'igipimo cyo gushyiramo ion, ubucucike bwa filime, n'imiterere mito. Ibikoresho bigomba guhuza uburyo bwo kubona arc, modulation ya DC cyangwa RF ikoreshwa mu gusohora ion, na sisitemu zo kugenzura closed-loop kugira ngo bigabanye ubucucike bushobora guterwa n'imikorere y'igihe kirekire, kwanduza ion, cyangwa impinduka mu mutwaro.
Gucunga ubushyuhe ni ikindi kintu cy'ingenzi bigira ingaruka ku ituze. Gukomeza gusiga ibintu binini cyangwa ibintu byinshi bitera ubushyuhe bwinshi, bishobora gutera stress, curping, cyangwa micro-scakes muri firime zibitswe. Gukonjesha cyane kw'intego, ibikoresho bya substrate, n'inkuta z'icyumba, hamwe no gukurikirana neza ubushyuhe, bituma ingufu zikwirakwira kimwe kandi bikagabanya ingaruka z'ubushyuhe mu gihe kirekire.
Kwizerwa kwa mashini no gucunga substrate nabyo bigira uruhare runini mu kubungabunga umutekano. Sisitemu zo gushyiramo no gupakurura za roboti, kuzunguruka neza substrate, hamwe n'uburyo bwo kugenzura kohereza ibintu mu buryo bwikora bigabanya ibikorwa by'abantu, bigabanya imiterere mibi, kandi bigatuma ibintu byose biba bifatanye. Gukoresha neza birinda gushwanyagurika, kwanduza, no guhindagurika k'ubugari bwa filime bishobora kwangiza imikorere y'urumuri cyangwa imikorere ihuye.
Muri make, gukomeza imikorere ihamye y'ibikoresho byo gusiga irangi mu buryo buhoraho bisaba uburyo buhuriweho, buhuza uburyo bwo kugenzura irangi ry'ira ...
-Iyi nkuru yasohotse nauruganda rukora ibikoresho byo gusiga irangi ry'umwukaZhenhua Vacuum
Igihe cyo kohereza: Werurwe-19-2026