Kev tsim khoom tas mus li Hauv cov chaw txheej txheej nqus tsev muaj cov teeb meem tshwj xeeb uas cuam tshuam ncaj qha rau kev ruaj khov ntawm cov khoom siv, kev ua haujlwm rov ua dua, thiab qhov zoo ntawm zaj duab xis nyias. Hauv cov kab PVD, magnetron sputtering, ALD, lossis PECVD uas muaj zog heev, kev tswj cov kev tso tawm tsis tu ncua dhau lub sijhawm ua haujlwm ntev yog qhov tseem ceeb, vim tias txawm tias qhov kev hloov pauv me me hauv cov xwm txheej nqus tsev, kev ruaj khov ntawm plasma, lossis kev ua tau zoo ntawm lub hom phiaj tuaj yeem ua rau muaj kev hloov pauv ntau hauv cov tuab ntawm zaj duab xis, cov ntsuas refractive, thiab cov khoom siv kho qhov muag lossis kho tshuab.
Ib qho ntawm cov teeb meem tseem ceeb hauv kev ua haujlwm tas mus li yog kev tswj hwm cov qib nqus tsev siab heev txawm tias muaj cov roj ntau ntau los ntawm kev nkag mus rau hauv cov khoom siv, cov pa roj reactive, thiab cov pa tawm ntawm phab ntsa chav lossis cov khoom siv uas tau coated ua ntej. Kev hloov pauv ntawm cov roj seem, suav nrog cov pa dej, oxygen, lossis hydrocarbons, tuaj yeem ua rau muaj kev tshuaj lom neeg tsis xav tau, hloov cov zaj duab xis stoichiometry, thiab tsim cov qhov tsis zoo lossis cov chaw nqus uas ua rau muaj kev cuam tshuam rau kev ua haujlwm ntawm lub zeem muag lossis kev ua haujlwm. Cov tshuab nqus tsev siab heev, xws li cov twj turbomolecular thiab cryogenic, ua ke nrog cov roj seem analyzers (RGA), yog qhov tseem ceeb rau kev saib xyuas thiab tswj lub sijhawm tiag tiag ntawm huab cua hauv chav kom ntseeg tau tias cov txheej txheem ruaj khov.
Kev ruaj khov ntawm cov ntshav kuj tseem ceeb heev rau kev tsim khoom tas mus li. Cov txheej txheem tso zis magnetron sputtering lossis cov txheej txheem tso zis uas muaj zog heev yuav tsum tswj hwm qhov ceev ntawm lub zog, qhov nrawm ntawm kev tawg, thiab kev faib hluav taws xob ntawm cov ion kom tiv thaiv kev hloov pauv ntawm qhov nrawm ntawm kev tso zis, qhov ceev ntawm zaj duab xis, thiab microstructure. Cov khoom siv yuav tsum koom ua ke kev kuaj pom arc, pulsed DC lossis RF fais fab modulation, thiab cov kab ke tswj hwm kaw-loop kom txo qhov tsis ruaj khov uas tuaj yeem tshwm sim los ntawm kev ua haujlwm ntev, kev ua qias tuaj ntawm lub hom phiaj, lossis kev hloov pauv ntawm qhov hnyav.
Kev tswj cua sov yog lwm yam tseem ceeb uas cuam tshuam rau kev ruaj khov. Kev txheej txheej ntawm cov substrates loj lossis ntau txheej sib tshooj tsim kom muaj cua sov ntau, uas tuaj yeem ua rau muaj kev ntxhov siab, kev sib txhuam, lossis kev tawg me me hauv cov yeeb yaj kiab uas tau tso tseg. Kev txias ntawm cov hom phiaj, cov tuav substrate, thiab phab ntsa chamber, ua ke nrog kev saib xyuas qhov kub thiab txias, ua kom muaj kev faib hluav taws xob sib npaug thiab txo cov teebmeem thermal sib sau ua ke dhau lub voj voog ntev.
Kev ntseeg tau ntawm cov khoom siv thiab kev tswj cov khoom siv kuj tseem ceeb heev rau kev tswj kom ruaj khov. Cov tshuab thauj khoom/tso tawm uas siv neeg hlau, kev tig cov khoom siv kom raug, thiab kev tswj cov khoom siv conveyor tsis siv neeg txo cov kev cuam tshuam ntawm tib neeg, txo qhov tsis sib xws, thiab xyuas kom muaj kev sib npaug ntawm txhua cov khoom siv. Kev tswj kom zoo tiv thaiv kev khawb, kev ua qias tuaj, thiab kev hloov pauv ntawm cov tuab ntawm zaj duab xis uas tuaj yeem ua rau kev ua haujlwm ntawm qhov muag pom lossis kev ua haujlwm tsis sib xws.
Hauv kev xaus lus, kev ua haujlwm ruaj khov ntawm cov khoom siv nqus tsev txheej hauv kev tsim khoom tas mus li xav tau kev sib koom ua ke, kev sib xyaw ua ke ntawm kev tswj hwm lub tshuab nqus tsev siab heev, kev ruaj khov ntawm plasma, kev tswj hwm thermal, thiab kev tswj hwm cov khoom siv kom raug. Los ntawm kev siv cov txheej txheem saib xyuas siab heev, kev tswj hwm cov lus teb rov qab, thiab kev tswj hwm cov khoom siv tsis siv neeg, cov txheej txheem txheej txheem siab-throughput tuaj yeem xa cov yeeb yaj kiab nyias nyias zoo dua qub thaum txo qis lub sijhawm tsis ua haujlwm, qhov tsis xws luag, thiab kev hloov pauv ntawm cov voj voog ntau lawm. Lub tswv yim ua tiav no ua kom muaj kev ua tau zoo tas mus li hauv cov ntawv thov tseem ceeb, suav nrog cov txheej txheem kho qhov muag, photonics, cov khoom siv hluav taws xob, thiab cov yeeb yaj kiab ua haujlwm loj.
- Tsab xov xwm no tau luam tawm los ntawmChaw tsim khoom siv nqus tsev txheejZhenhua Nqus Tsev
Lub sijhawm tshaj tawm: Lub Peb Hlis-19-2026