Te whakaputa tonu I roto i ngā taiao paninga korehau, he wero ahurei e pā tika ana ki te pumau o ngā taputapu, te auau o te tukanga, me te kounga o te kiriata angiangi. I roto i ngā raina PVD tere-whakaputa, te magnetron sputtering, te ALD, te PECVD rānei, he mea nui te pupuri i ngā tawhā whakatakotoranga ōrite mō ngā wā mahi roa, nā te mea ahakoa ngā rerekētanga iti o ngā āhuatanga korehau, te pumau o te plasma, te mahi ūnga rānei, ka arahi pea ki ngā rerekētanga tāpiri o te matotoru o te kiriata, te taupū whakaata, me ngā āhuatanga whatu, ā-ringa rānei.
Ko tētahi o ngā wero matua o te mahi tonu ko te pupuri i ngā taumata korehau tino teitei ahakoa ngā kawenga hau hihiri mai i te whakaurunga o te papa, ngā hau tauhohe, me te putanga hau mai i ngā pakitara o te rūma, i ngā papa kua pania i mua rānei. Ko ngā rerekētanga o te hanganga hau toenga, tae atu ki te mamaoa wai, te hāora, ngā warowaihā rānei, ka taea te whakaoho i ngā tauhohenga matū kāore i te whakaarohia, te whakarerekē i te stoichiometry kiriata, me te hanga hapa, ngā pokapū mimiti rānei e whakararu ana i te mahi whatu, i te mahi rānei. He mea nui ngā pūnaha papu korehau matatau, pērā i ngā papu turbomolecular me ngā papu cryogenic, me ngā tātari hau toenga (RGA), mō te aroturuki me te whakahaere i te hau o te rūma i te wā tūturu hei whakarite i te pumau o te tukanga.
He mea nui anō hoki te pumau o te parāoa mō te whakaputa tonu. Me pupuri tonu e ngā tukanga whakapūtanga magnetron kaha-teitei, ngā tukanga whakatakotoranga āwhina-katote rānei te kiato mana ōrite, ngā tere horonga ūnga, me te tohatoha pūngao katote kia kore ai e rerekē te tere whakatakotoranga, te kiato kiriata, me te hanganga moroiti. Me whakauru e ngā taputapu te kite pewa, te whakarerekētanga mana DC, RF rānei, me ngā pūnaha whakahaere porowhita-katia hei whakaiti i ngā kore pumau ka puta mai i te mahi roa, te poke ūnga, ngā huringa kawenga rānei.
Ko te whakahaere wera tētahi atu mea nui e pā ana ki te pumau. Ko te paninga tonu o ngā papa nui, o ngā puranga papa maha rānei, ka puta he wera nui, ka taea ai te whakararu, te piko, te pakaru iti rānei i roto i ngā kiriata kua whakatakotoria. Ko te whakamatao kaha o ngā ūnga, ngā kaipupuri papa, me ngā pakitara rūma, me te aroturukitanga tika o te pāmahana, ka whakarite i te tohatoha pūngao ōrite, ā, ka whakaiti i ngā pānga wera whakaemi i roto i ngā huringa whakaputa roa.
He mea nui anō hoki te pono o te miihini me te whakahaere i te papa ki te pupuri i te pumau. Mā ngā pūnaha uta/tango karetao, te hurihanga papa tika, me ngā mana whakahaere aunoa o te kaikawe ka whakaiti i te wawaotanga a te tangata, ka whakaiti i te he o te tūnga, ā, ka whakarite kia ōrite te whakatakotoranga puta noa i ngā papa katoa. Mā te whakahaere tika ka ārai i ngā karawarawa, te poke, me te rerekētanga o te matotoru o te kiriata ka pā kino ki te mahi whatu, ki te ōritetanga mahi rānei.
Hei whakarāpopototanga, ko te pupuri i te mahi pumau o ngā taputapu paninga korehau i roto i te mahi whakaputa tonu me whai huarahi whakauru, e whakakotahi ana i te mana korehau tino-tiketike, te pumau o te plasma, te whakahaere wera, me te whakahaere tika o te papa. Mā te whakamahi i te aroturuki tukanga matatau, te whakahaere urupare, me te whakahaere rauemi aunoa, ka taea e ngā pūnaha paninga tere-whakaputa te tuku i ngā kiriata angiangi kounga teitei ka taea te whakaputa anō, me te whakaiti i te wā kore mahi, ngā hapa, me ngā rerekētanga i roto i ngā huringa whakaputa roa. Mā tēnei rautaki whānui ka whakarite i te mahi pumau i roto i ngā tono nui, tae atu ki ngā paninga whatu, ngā whakaahua, ngā taputapu hiko, me ngā kiriata mahi whānui.
-Nākaihanga taputapu paninga korehauZhenhua Vacuum
Wā tuku: Maehe-19-2026