Magnetic filtration tekinoroji

Basic theory yemagnetic filtration device
Iyo yekusefa dhizaini yekusefa mudziyo wezvimedu zvakakura muplasma danda iri seizvi:
Uchishandisa mutsauko uripo pakati peplasma uye zvidimbu zvakakura mukutonga uye kubhadharisa-kune-misa chiyero, pane "chipingamupinyi" (chingave chibhavhu kana chakakomberedzwa chubhu madziro) chinoisa pakati peiyo substrate nenzvimbo yecathode, iyo inovharira chero zvimedu zvinofamba mumutsara wakatwasuka pakati pecathode neiyo substrate, nepo maion anogona kutsauswa kuburikidza neiyo substrate munda.

Kushanda musimboti wemagnetic filtration mudziyo

Munzvimbo yemagineti, Pe <

Pe nePi ndiyo Larmor radii yemaerekitironi nemaoni zvichiteerana, uye a ndiyo dhayamita yemukati megineti sefa. Maerekitironi ari muplasma anobatwa nechisimba cheLorentz uye anotenderera negineti axially, ukuwo magineti ane simba shoma pakuunganidzwa kwemaion nekuda kwemutsauko uripo pakati pemaioni nemaerekitironi muradio yeLarmor. Zvisinei, kana maerekitironi kufamba achitevedza axis yegineti sefa mudziyo, inokwezva maion pamwe neaxial yekutenderera inofamba nekuda kwekutarisa kwayo uye simba regetsi rakasimba, uye kumhanya kweerekitironi kwakakura kupfuura ayoni, saka erekitironi inogara ichidhonza iyoni kumberi, nepo plasma inogara ichiramba isina kwayakarerekera kwemagetsi. Zvimedu zvihombe hazvina kwazvakarerekera pamagetsi kana kubhadhariswa zvishoma zvisina kunaka, uye mhando yacho yakakura kudarika maion nemaerekitironi, haina kukanganiswa nemagnetic field uye mutsara wekufamba uchitevedza inertia, uye inosefa kunze mushure mekudhumhana nemadziro emukati emudziyo.
Pasi pebasa rakabatanidzwa rekukombama remagineti curvature uye gradient drift uye ion-electron kudhumhana, plasma inogona kutsauswa mugineti yekusefa mudziyo. In The common theoretical models anoshandiswa nhasi ndiyo Morozov flux model uye Davidson rigid rotor model, ine zvinotevera zvinowanzoitika: kune magnetic field inoita kuti maerekitironi afambe nenzira yakasimba yehelical.
Simba remagineti rinotungamira kufamba kweaxial yeplasma mune magineti kusefa mudziyo unofanirwa kunge wakadaro:

Mi, Vo, uye Z ndiwo maion mass, kukurumidza kwekufambisa, uye nhamba yemhosva inotakurwa zvichiteerana. a ndiyo dhayamita yemukati yegineti sefa, uye e ndiyo ichaja maerekitironi.
Zvinofanira kucherechedzwa kuti mamwe epamusoro simba ayoni haigoni kusungwa zvizere nerekitironi danda. Vanogona kusvika kumadziro emukati megineti sefa, zvichiita kuti madziro emukati ave neakanaka, izvo zvinotadzisa iyo ions kuramba ichisvika kumadziro emukati uye inoderedza kurasikirwa kweplasma.
Zvinoenderana nechiitiko ichi, yakakodzera bias pressure inogona kuiswa kumadziro eiyo magineti sefa mudziyo kumisa kudhumhana kwemaion kuvandudza chinangwa chekufambisa ion.

Kurongwa kwemagnetic filtration device
(1) Mutsara chimiro. Iyo magineti inoshanda segwara rekuyerera kweiyo ion beam, ichidzikisa saizi yenzvimbo yecathode uye chikamu chemacroscopic particle masumbu, ichiwedzera kudhumhana mukati meplasma, zvichiita kuti kushandurwa kwezvimedu zvisina kwazvakarerekera kuita ion uye kuderedza huwandu hwemacroscopic particle masumbu, uye nekukasira kuderedza huwandu hwesimba remagineti. Zvichienzaniswa neyakajairwa multi-arc ion coating method, ichi chakarongeka chigadziriso chinokunda kudzikisira kwakakosha kwekushanda kunokonzerwa nedzimwe nzira uye chinogona kuve nechokwadi chenguva dzose yekuisa bhaisikopo chiyero ichidzikisa huwandu hwezvikamu zvakakura ne60%.
(2) Curve-mhando chimiro. Kunyangwe chimiro chine mafomu akasiyana, asi musimboti wekutanga wakafanana. Iyo plasma inofamba pasi pebasa rakabatanidzwa remagineti nemunda wemagetsi, uye iyo magineti inoshandiswa kuvharira nekudzora plasma pasina kutsausa mafambiro achitevedza gwara remagineti simba mitsara. Uye zvidimbu zvisina kubhadharwa zvichafamba pamwe chete nemutsara uye zvichaparadzaniswa. Mafirimu akagadzirwa neichi chigadziriso chine kuoma kwakanyanya, kuderera kwepasi roughness, yakanaka density, saizi yezviyo yakafanana, uye yakasimba firimu base adhesion. Ongororo yeXPS inoratidza kuti kuomarara kwepamusoro kwemafirimu e-ta-C akaputirwa nerudzi urwu rwechishandiso anogona kusvika 56 GPa, saka iyo yakakomberedzwa chimiro chishandiso ndiyo inonyanya kushandiswa uye inoshanda nzira yekubvisa particle hombe, asi chinangwa chekufambisa ion chinoda kuvandudzwa. Iyo 90 ° bend magineti kusefa mudziyo ndeimwe yeanonyanya kushandiswa yakakomberedzwa magadzirirwo emidziyo. Kuedza pamusoro pechimiro cheTa-C mafirimu anoratidza kuti chimiro chepamusoro che 360 ​​° bend magnetic filtration device haishanduki zvakanyanya kana ichienzaniswa ne90 ° bend magnetic filtration device, saka mhedzisiro ye90 ° bend magnetic filtration yezvikamu zvikuru zvinogona kuwanikwa. 90 ° bend magnetic filtration device inonyanya kuve nemhando mbiri dzezvivakwa: imwe bend solenoid yakaiswa mukamuri yevacuum, uye imwe inoiswa kunze kwekamuri yevacuum, uye mutsauko pakati pavo unongova muchimiro. Kumanikidza kwekushanda kwe90 ° bend magnetic filtration device iri muhurongwa hwe10-2Pa, uye inogona kushandiswa mune zvakasiyana-siyana zvekushandisa, zvakadai sekuvhara nitride, oxide, amorphous carbon, semiconductor firimu uye simbi kana isiri-simbi firimu.

Kushanda kwemagnetic filtration device
Sezvo zvisiri zvese zvakakura zvimedu zvinogona kurasikirwa kinetic simba mukurovera kunoramba kuripo nemadziro, imwe nhamba yezvimedu zvakakura ichasvika kune substrate kuburikidza nekubuda kwepombi. Nokudaro, iyo yakareba uye yakamanikana magnetic filtration device ine yakakwirira yefiltration inobudirira yezvikamu zvakakura, asi panguva ino ichawedzera kurasikirwa kweiyoni inotarirwa uye panguva imwechete inowedzera kuoma kwechimiro. Naizvozvo, kuve nechokwadi chekuti iyo magineti yekusefa mudziyo ine yakanakisa kubviswa kwechikamu uye kugona kwakanyanya kwekutakura ion chinhu chinodiwa kuti multi-arc ion coating tekinoroji kuve netarisiro yakakura yekushandisa mukuisa yakakwira kuita mafirimu matete. Iko kushanda kweiyo magineti yekusefa mudziyo kunokanganiswa neiyo magineti simba, bend bias, mechanical baffle aperture, arc source yazvino uye inochajiswa particle incidence angle. Nekumisikidza inonzwisisika paramita yegineti yekusefa mudziyo, kusefa kwezvimedu zvakakura uye ion kutamisa kushanda zvakanaka kwechinangwa kunogona kuvandudzwa.