Ikoranabuhanga rya magnetiki

Inyigisho yibanze yibikoresho bya magnetiki
Uburyo bwo kuyungurura ibikoresho bya magnetiki yo kuyungurura ibice binini mumashanyarazi ya plasma nibi bikurikira:
Ukoresheje itandukaniro riri hagati ya plasma nuduce twinshi dushinzwe no kugereranya-misa, hariho "bariyeri" (yaba uruzitiro cyangwa urukuta rugoramye) rushyira hagati ya substrate nubuso bwa cathode, ikabuza ibice byose bigenda kumurongo ugororotse hagati ya cathode na substrate, mugihe ion zishobora guhindurwa numurima wa rukuruzi hanyuma ukanyura kuri "bariyeri" kuri substrate.

Ihame ryakazi ryibikoresho bya magnetiki

Mubice bya rukuruzi, Pe <

Pe na Pi ni Larmor radii ya electron na ion bikurikiranye, kandi a ni diameter y'imbere ya magnetiki. Electron muri plasma yibasiwe nimbaraga za Lorentz hanyuma ikazunguruka kumurima wa magneti mu buryo butandukanye, mugihe umurima wa magneti utagira ingaruka nke kumasoko ya ion kubera itandukaniro riri hagati ya ion na electron muri radiyo ya Larmor. Ariko, mugihe electron igenda kumurongo wigikoresho cya magnetiki iyungurura, izakurura ion kumurongo wa axial kugirango izenguruke bitewe nibitekerezo byayo hamwe numurima ukomeye w'amashanyarazi, kandi umuvuduko wa electron uruta ion, nuko electron ihora ikurura ion imbere, mugihe plasma ihora ikomeza kutagira aho ibogamiye. Ibice binini bidafite aho bibogamiye mumashanyarazi cyangwa byashizwemo nabi, kandi ubuziranenge ni bunini cyane kuruta ion na electron, ahanini ntibiterwa numurima wa magneti hamwe numurongo ugana kumurongo wa inertia, kandi bizungururwa nyuma yo kugongana nurukuta rwimbere rwigikoresho.
Munsi yimikorere ikomatanyirijwe hamwe ya magnetiki yumurongo uhetamye hamwe na gradient drift hamwe na ion-electron kugongana, plasma irashobora guhindurwa mugikoresho cyo kuyungurura. Muri moderi zisanzwe zikoreshwa muri iki gihe ni moderi ya flux ya Morozov na moderi ya Davidson igoye ya rotor, ifite ibintu bikurikira bikurikira: hariho umurima wa rukuruzi utuma electron zigenda muburyo bukomeye.
Imbaraga zumurima wa rukuruzi ziyobora icyerekezo cya plasma mubikoresho bya magnetiki byungurura bigomba kuba gutya:

Mi, Vo, na Z ni ion ya misa, umuvuduko wo gutwara, n'umubare w'amafaranga yatanzwe. a ni diameter y'imbere ya magnetiki muyunguruzi, na e nuburyo bwa electron.
Twabibutsa ko ingufu zimwe na zimwe ion zidashobora guhambirwa byuzuye na electron. Bashobora kugera ku rukuta rw'imbere rwa rukuruzi ya rukuruzi, bigatuma urukuta rw'imbere rushobora kuba rwiza, ari nako rubuza ion gukomeza kugera ku rukuta rw'imbere kandi bikagabanya gutakaza plasma.
Ukurikije iki kintu, igitutu gikwiye kibogamye kirashobora gukoreshwa kurukuta rwigikoresho cya magnetiki cyungurura kugirango kibuze kugongana kwa ion kugirango tunoze intego yo gutwara ion.

Gutondekanya ibikoresho bya magnetiki
(1) Imiterere y'umurongo. Umwanya wa magneti ukora nk'ubuyobozi bwo gutembera kwa ion beam, kugabanya ubunini bwa cathode hamwe nigipimo cya macroscopique ya classe classe, mugihe gukaza umurego muri plasma, bigatuma ihinduka ryibice bitagira aho bibogamiye muri ion no kugabanya umubare wibice bya macroscopique, kandi bikagabanya vuba umubare wibice binini uko imbaraga za magneti ziyongera. Ugereranije nuburyo busanzwe bwa arc ion uburyo bwo gutwikira, iki gikoresho cyubatswe cyatsinze igabanuka ryinshi ryimikorere iterwa nubundi buryo kandi birashobora gutuma igipimo cya firime gihoraho mugihe kigabanya umubare wibice binini hafi 60%.
(2) Imiterere y'ubwoko. Nubwo imiterere ifite uburyo butandukanye, ariko ihame shingiro nimwe. Plasma igenda munsi yumurimo uhuriweho wumurima wa magneti numurima wamashanyarazi, kandi umurima wa magneti ukoreshwa muguhagarika no kugenzura plasma utayobye icyerekezo cyerekezo cyumurongo wa magneti. Kandi ibice bitarishye bizagenda kumurongo hanyuma bitandukane. Filime zateguwe niki gikoresho cyubaka zifite ubukana bwinshi, hejuru yubuso buke, ubwinshi bwiza, ingano imwe, hamwe na firime ikomeye. Isesengura rya XPS ryerekana ko ubukana bwa firime ya ta-C yashizwemo nubu bwoko bwibikoresho bushobora kugera kuri GPa 56, bityo igikoresho cyubatswe kigoramye nuburyo bukoreshwa cyane kandi bunoze bwo kuvanaho ibice binini, ariko intego yo gutwara ion ikeneye kurushaho kunozwa. Igikoresho cya 90 ° kigoramye igikoresho cyo kuyungurura ni kimwe mubikoresho bikoreshwa cyane bigoramye. Ubushakashatsi bwakozwe ku buso bwa firime ya Ta-C bwerekana ko imiterere yubuso bwa 360 ° igoramye igikoresho cyo kuyungurura ibintu idahinduka cyane ugereranije na 90 ° igikoresho cyo kuyungurura magnetiki, bityo rero ingaruka za 90 ° zigoramye zungurura ibice binini zishobora kugerwaho ahanini. 90 ° kugoreka ibyuma bya magnetiki byungurura ahanini bifite ubwoko bubiri bwuburyo: bumwe ni belen solenoid yashyizwe mucyumba cya vacuum, indi igashyirwa hanze yicyumba cya vacuum, kandi itandukaniro riri hagati yaryo riri mumiterere gusa. Umuvuduko wakazi wa 90 ° kugoreka ibikoresho bya magnetiki byungurura biri murutonde rwa 10-2Pa, kandi birashobora gukoreshwa muburyo butandukanye, nko gutwikira nitride, okiside, karubone ya amorphous, firime ya semiconductor hamwe nicyuma cyangwa firime idafite ibyuma.

Imikorere yibikoresho bya magnetiki
Kubera ko ibice byose binini bidashobora gutakaza imbaraga za kinetic mugukomeza guhura nurukuta, umubare munini wibice binini bizagera kuri substrate unyuze mumiyoboro. Kubwibyo, ibikoresho birebire kandi bigufi bya magnetiki byo kuyungurura bifite ubushobozi bwo kuyungurura hejuru yingingo nini, ariko muriki gihe bizongera igihombo cya ion intego kandi icyarimwe byongere ubunini bwimiterere. Kubwibyo, kwemeza ko igikoresho cya magnetiki cyo kuyungurura gifite uburyo bunini bwo kuvanaho ibice no gukora neza cyane mu gutwara ion ni ikintu cya ngombwa gisabwa kugira ngo tekinoroji ya arc ion ikoreshwe kugira ngo igire ibyifuzo byinshi mu kubitsa firime yoroheje. Imikorere yibikoresho bya magnetiki yungurura bigira ingaruka kumbaraga za magnetique, kugoreka kubogama, imashini ya baffle aperture, arc inkomoko yumuriro hamwe nuduce duto duto duto. Mugushiraho ibipimo bifatika bya magnetiki yo kuyungurura, ingaruka zo kuyungurura ibice binini hamwe na ion ihererekanyabubasha ryintego irashobora kunozwa neza.