No.1 Ihame ryo gukurura magnetron ifite imbaraga nyinshi
Uburyo bwo gusohora amashanyarazi bwa magnetron bufite ingufu nyinshi bukoresha imbaraga nyinshi zo gusohora amashanyarazi (umurongo 2-3 w’ubunini burenze ubw’imashini isanzwe yo gusohora amashanyarazi ya magnetron) n’umuvuduko muto wo gusohora amashanyarazi (0.5%-10%) kugira ngo hagerwe ku gipimo cyo gutandukanya ibyuma byinshi (>50%), bikomoka ku miterere yo gusohora amashanyarazi ya magnetron, nk'uko bigaragara ku Ishusho ya 1, aho ubucucike bw’amashanyarazi bwa peak target I bungana n’imbaraga za nth za exponential za voltage yo gusohora U, I = kUn (n ni constant ifitanye isano n’imiterere ya cathode, ingufu za rukuruzi n’ibikoresho). Ku bucucike bw’amashanyarazi buri hasi (voltage iri hasi) agaciro ka n gakunze kuba hagati ya 5 na 15; hamwe na voltage yo gusohora amashanyarazi yiyongera, ubucucike bw’amashanyarazi n’ubucucike bw’amashanyarazi byiyongera vuba, kandi kuri voltage iri hejuru agaciro ka n kaba 1 bitewe no gutakaza ubushobozi bwo gufunga amashanyarazi ya rukuruzi. Iyo ku bucucike bw’amashanyarazi buri hasi, gazi isohoka igenwa na iyoni za gaze ziri mu buryo busanzwe bwo gusohora amashanyarazi ya pulsed; Iyo ku bucucike bw'ingufu nyinshi, igipimo cya iyoni z'icyuma muri plasma kiriyongera kandi bimwe mu bikoresho birahinduka, ni ukuvuga mu buryo bwo kwishyira mu kanwa, ni ukuvuga ko plasma ibungabungwa no gushyiramo ionization y'uduce duto twangiritse hamwe na iyoni z'icyuma za kabiri, kandi atome za gaze zitarimo umwuka nka Ar zikoreshwa gusa mu gutwika plasma, hanyuma uduce duto twa icyuma twangiritse tugashyirwamo iyoni hafi y'aho ikintu giherereye hanyuma tukongera kwihutishwa kugira ngo dutere igitero cyangiritse munsi y'ibikorwa by'imbaraga rukuruzi n'amashanyarazi kugira ngo bikomeze gusohora umuriro mwinshi, kandi plasma ni uduce duto twa icyuma twangiritse cyane. Bitewe n'uburyo bwo gushyushya ikintu ku ntego, kugira ngo intego ikomeze gukora neza mu nganda, ubucucike bw'ingufu bukoreshwa ku ntego ntibushobora kuba bunini cyane, muri rusange ubukonje bw'amazi butaziguye n'ubushyuhe bw'ibikoresho bigamije bigomba kuba kuri 25 W / cm2 munsi, ubukonje bw'amazi butaziguye, ubushyuhe bw'ibikoresho bigamije ni bubi, ibikoresho bigamije biterwa no gucikamo ibice bitewe n'ubushyuhe cyangwa ibikoresho bigamije birimo ibice bike by'ingufu kandi ibindi bihe by'ubucucike bw'ingufu bishobora kuba kuri 2 ~ 15 W / cm2 munsi, munsi cyane y'ibisabwa n'ubucucike bw'ingufu nyinshi. Ikibazo cyo gushyuha cyane ku ntego gishobora gukemurwa hakoreshejwe imbaraga nke cyane. Anders asobanura ko magnetron pulsed sputtering ifite imbaraga nyinshi nk'ubwoko bwa pulsed sputtering aho ubucucike bw'ingufu burenze ubucucike bw'ingufu busanzwe ku rugero rwa 2 kugeza kuri 3, kandi sputtering ya ion igamije kuganza inzira yo gushyuha, kandi atome zigamije gushyuha zitandukaniye cyane.
No.2 Ibiranga imiterere y'ingufu nyinshi zo gutwikira magnetron sputtering
Gukoresha magnetron sputtering ifite imbaraga nyinshi bishobora gukora plasma ifite igipimo cyo kwitandukanya cyane n'ingufu nyinshi za iyoni, kandi bishobora gukoresha umuvuduko wa bias kugira ngo byihutishe iyoni zishyushye, kandi inzira yo gushyiramo irangi iterwa n'uduce dufite ingufu nyinshi, ari nabwo buryo busanzwe bwa IPVD. Ingufu za iyoni n'ikwirakwizwa ryayo bigira ingaruka zikomeye ku bwiza n'imikorere yayo.
Ku bijyanye na IPVD, hashingiwe ku gishushanyo mbonera cy’akarere ka Thorton cy’imiterere kizwi cyane, Anders yatanze igitekerezo cy’icyitegererezo cy’akarere k’imiterere kirimo gushyira plasma no gushushanya iyoni, yongera isano iri hagati y’imiterere y’igitambaro n’ubushyuhe n’umuvuduko w’umwuka muri Thorton imiterere y’akarere ku isano iri hagati y’imiterere y’igitambaro, ubushyuhe n’ingufu za iyoni, nk’uko bigaragara ku Ishusho ya 2. Mu gihe cyo gushyira ion mu ngufu nke, imiterere y’igitambaro ihuye n’icyitegererezo cy’akarere ka Thorton. Uko ubushyuhe bwo gushyiramo ibintu bwiyongera, ihinduka kuva mu gace ka 1 (amakristale y’imigozi) kugera mu gace ka T (amakristale y’imigozi), akarere ka 2 (amakristale y’inkingi) n’akarere ka 3 (akarere ka recrystallization); uko ingufu za iyoni ziyongera, ubushyuhe bwo guhindura ibintu kuva mu gace ka 1 kugera mu gace ka T, akarere ka 2 n’akarere ka 3 buragabanuka. Amakristale y’imigozi afite ubucucike bwinshi na kristu zishobora gutegurwa ku bushyuhe buke. Iyo ingufu za iyoni ziyongera kugeza kuri 1-10 eV, guturika no gushushanya iyoni ku buso bw’igitambaro ziyongera kandi ubunini bw’igitambaro burushaho kwiyongera.
No.3 Gutegura urwego rukomeye rwo gusiga hakoreshejwe ikoranabuhanga rya magnetron sputtering rifite imbaraga nyinshi
Igipfundikizo cyateguwe hakoreshejwe ikoranabuhanga rya magnetron sputtering rifite imbaraga nyinshi ni kinini, gifite imiterere myiza ya mekanike kandi gihamye ku bushyuhe bwinshi. Nkuko bigaragara ku Ishusho ya 3, igipfundikizo gisanzwe cya magnetron sputtered TiAlN ni imiterere ya kristale ifite ubukana bwa 30 GPa na modulus ya Young ya 460 GPa; igipfundikizo cya HIPIMS-TiAlN ni ubukana bwa 34 GPa mu gihe modulus ya Young ari 377 GPa; igipimo kiri hagati y'ubukana na modulus ya Young ni igipimo cy'ubukana bw'igipfundikizo. Ubukana bwinshi n'ubuto bwa Young's modulus bivuze ubukana bwiza. Igipfundikizo cya HIPIMS-TiAlN gifite ubukana bwiza bw'ubushyuhe bwinshi, aho AlN hexagonal phase igaragara mu gipfundikizo gisanzwe cya TiAlN nyuma yo kuvurwa ubushyuhe bwinshi kuri 1,000 °C mu gihe cy'amasaha 4. Ubukana bw'igipfundikizo bugabanuka ku bushyuhe bwinshi, mu gihe igipfundikizo cya HIPIMS-TiAlN kidahinduka nyuma yo kuvurwa ubushyuhe ku bushyuhe bumwe n'igihe kimwe. Igitambaro cya HIPIMS-TiAlN gifite ubushyuhe bwinshi bwo gushyuha cyane kurusha igitambaro gisanzwe. Kubwibyo, igitambaro cya HIPIMS-TiAlN kigaragaza imikorere myiza cyane mu bikoresho byo gukata byihuta kurusha ibindi bikoresho bitwikiriwe na PVD.
Igihe cyo kohereza: Ugushyingo-08-2022