No.1 Mfundo yamphamvu kwambiri pulsed magnetron sputtering
The mkulu mphamvu pulsed magnetron sputtering njira ntchito mkulu pachimake zimachitika mphamvu (2-3 madongosolo kukula kuposa ochiritsira magnetron sputtering) ndi otsika zimachitika ntchito mkombero (0.5% -10%) kukwaniritsa mkulu zitsulo dissociation mitengo (> 50%), amene amachokera ku magnetron sputtering makhalidwe, monga momwe Pic 1, pamene pachimake chandamale panopa kachulukidwe I ndi molingana ndi exponential nth mphamvu kumaliseche voteji U, I = kUn (n ndi zonse zokhudzana ndi dongosolo cathode, maginito mphamvu ndi zinthu).Pakachulukidwe kakang'ono ka mphamvu (magetsi otsika) mtengo wa n nthawi zambiri umakhala pakati pa 5 mpaka 15;ndi kuchuluka kwa magetsi otulutsa, kachulukidwe kakali pano ndi kachulukidwe ka mphamvu zimakula mwachangu, ndipo pamagetsi apamwamba kwambiri mtengo wa n umakhala 1 chifukwa cha kutayika kwa maginito.Ngati paotsika mphamvu kachulukidwe, mpweya kumaliseche anatsimikiza ndi ayoni mpweya amene ali yachibadwa pulsed kumaliseche akafuna;ngati pamphamvu kachulukidwe mphamvu, chiŵerengero cha ayoni zitsulo mu plasma ukuwonjezeka ndi zinthu zina kusinthana, kuti ali mu mode kudzigwetsa sputtering, mwachitsanzo, madzi a m'magazi kukhalabe ndi ionization wa sputtered ndale particles ndi ayoni yachiwiri zitsulo, ndi maatomu mpweya inert. monga Ar amagwiritsidwa ntchito poyatsa madzi a m'magazi, pambuyo pake zitsulo zotayidwa zimayikidwa pafupi ndi chandamale ndikufulumizitsa kubwereranso kuti ziwombere chandamale chophwanyidwa pansi pa mphamvu ya maginito ndi magetsi kuti apitirize kutuluka, ndipo plasma imakhala yochuluka kwambiri. zitsulo ionized particles.Chifukwa sputtering ndondomeko ya Kutentha zotsatira pa chandamale, pofuna kuonetsetsa ntchito khola chandamale mu ntchito mafakitale, mphamvu kachulukidwe mwachindunji ntchito chandamale sangakhale lalikulu kwambiri, zambiri mwachindunji madzi kuzirala ndi chandamale chuma matenthedwe madutsidwe. kuyenera kukhala pa 25 W / cm2 pansipa, kuzirala kwamadzi osalunjika, kukhazikika kwazinthu zomwe chandamale kumakhala kovutirapo, chandamale chomwe chimayambitsidwa ndi kugawikana chifukwa cha kupsinjika kwamafuta kapena chandamale chimakhala ndi zigawo zotsika zosakhazikika za aloyi ndi milandu ina ya kachulukidwe kamphamvu imatha kukhala mkati. 2 ~ 15 W / cm2 m'munsimu, pansi pa zofunikira za mphamvu zambiri.Vuto la chandamale kutenthedwa akhoza kuthetsedwa ntchito yopapatiza mkulu mphamvu zimachitika.Anders amatanthauzira kutulutsa kwamphamvu kwamphamvu kwa maginito amphamvu ngati kutulutsa kwamphamvu komwe mphamvu yamphamvu kwambiri imapitilira kuchuluka kwa mphamvu ndi ma 2 mpaka 3 magnitude, ndipo kuphulika kwa ayoni kumayang'anira njira yopunthira, ndipo maatomu omwe amawaza amasiyana kwambiri. .
No.2 The makhalidwe mkulu mphamvu pulsed magnetron sputtering ❖ kuyanika mafunsidwe
Mkulu mphamvu pulsed maginito sputtering akhoza kutulutsa madzi a m'magazi ndi mkulu dissociation mlingo ndi mkulu ion mphamvu, ndipo angagwiritse ntchito kukondera kukakamiza imathandizira ma ion mlandu, ndi ❖ kuyanika ndondomeko mafumbidwe ndi particles mkulu-mphamvu, amene ali mmene IPVD luso.Mphamvu ya ion ndi kugawa kumakhala ndi mphamvu yofunikira kwambiri pakuyika bwino komanso magwiridwe antchito.
About IPVD, kutengera mtundu wotchuka wa Thorton structural region, Anders adaganiza zopanga chigawo chachigawo chomwe chimaphatikizapo kuyika kwa plasma ndi ion etching, kukulitsa ubale pakati pa kapangidwe kawo ndi kutentha ndi kupanikizika kwa mpweya mumtundu wa Thorton structural region ku ubale pakati pa kapangidwe ka zokutira, kutentha ndi mphamvu ya ion, monga momwe zasonyezedwera pa Chithunzi 2. Pankhani ya zokutira zochepetsera za ion zoyikapo mphamvu, mawonekedwe ophikira amagwirizana ndi mtundu wa zone ya Thorton.Ndi kuwonjezeka kwa kutentha kwa malo, kusintha kuchokera ku dera la 1 (lotayirira porous fiber crystals) kupita ku dera T (dense fiber crystals), dera 2 (columnar crystals) ndi dera 3 (recrystallization region);ndi kuwonjezeka kwa mphamvu ya ma ion mphamvu, kutentha kwa kusintha kuchokera ku dera 1 kupita ku dera T, dera 2 ndi dera 3 kumachepa.Makhiristo okwera kwambiri komanso ma kristalo a columnar amatha kukonzedwa pa kutentha kochepa.Mphamvu ya ma ion oyikidwa ikakwera kufika pa dongosolo la 1-10 eV, kuphulika kwa ma ion ndi kuyamwa kwa ma ion pa zokutira zoyikidwa kumawonjezeka ndipo makulidwe a zokutira amakula.
No.3 Kukonzekera zolimba ❖ kuyanika wosanjikiza ndi mkulu mphamvu pulsed magnetron sputtering luso
The ❖ kuyanika okonzedwa ndi mkulu mphamvu pulsed magnetron sputtering luso ndi wandiweyani, ndi bwino makina katundu ndi mkulu kutentha bata.Monga momwe tawonetsera pa Pic 3, maginito ochiritsira opangidwa ndi TiAlN ❖ kuyanika ndi mawonekedwe a kristalo omwe ali ndi kuuma kwa 30 GPa ndi modulus ya Young ya 460 GPa;Chophimba cha HIPMS-TiAlN ndi kuuma kwa 34 GPa pomwe modulus ya Young ndi 377 GPa;chiŵerengero pakati pa kuuma ndi modulus Young ndi muyeso wa kulimba kwa zokutira.Kulimba kwambiri ndi kuchepera kwa Young modulus kumatanthauza kulimba bwino.Kupaka kwa HIPMS-TiAlN kumakhala ndi kukhazikika kwa kutentha kwapamwamba, ndi gawo la AlN hexagonal lomwe limakhazikika mu zokutira wamba za TiAlN pambuyo pa kutentha kwapakati pa 1,000 ° C kwa 4 h.Kuuma kwa chophimba kumachepa kutentha kwakukulu, pamene kuphimba kwa HIPMS-TiAlN kumakhalabe kosasintha pambuyo pa chithandizo cha kutentha pa kutentha ndi nthawi yomweyo.Kupaka kwa HIPMS-TiAlN kumakhalanso ndi kutentha kwakukulu kwa kutentha kwa okosijeni kuposa kuyanika wamba.Chifukwa chake, zokutira za HPIMS-TiAlN zikuwonetsa kuchita bwino kwambiri pazida zodula kwambiri kuposa zida zina zokutira zokonzedwa ndi njira ya PVD.
Nthawi yotumiza: Nov-08-2022