Whakataki Hangarau HiPIMS

Mātāpono Nama 1 o te pupuhi magnetron kaha teitei
Ko te tikanga whakapūtanga magnetron kaha teitei e whakamahi ana i te mana whakapūtanga teitei (2-3 ngā ota teitei ake i te whakapūtanga magnetron tikanga) me te huringa mahi whakapūtanga iti (0.5%-10%) hei whakatutuki i ngā reiti wehenga whakarewa teitei (>50%), e ahu mai ana i ngā āhuatanga whakapūtanga magnetron, e whakaaturia ana i te Pikitia 1, ko te kiato iahiko whāinga teitei I he rite ki te mana nth taupū o te ngaohiko tukunga U, I = kUn (he pūmau te n e pā ana ki te hanganga cathode, te papa aukume me te rauemi). I ngā kiato mana iti (ngaohiko iti) ko te uara n kei roto i te awhe o te 5 ki te 15; me te piki haere o te ngaohiko tukunga, ka tere te piki haere o te kiato iahiko me te kiato mana, ā, i te ngaohiko teitei ka huri te uara n ki te 1 nā te ngaronga o te herenga papa aukume. Mena kei ngā kiato mana iti, ka whakatauhia te tukunga hau e ngā katote hau kei roto i te aratau tukunga whakapūtanga noa; Mena i ngā kiato mana teitei, ka piki ake te ōwehenga o ngā katote konganuku i roto i te plasma, ā, ka huri ētahi rauemi, arā, i roto i te aratau whakapūpū-whaiaro, arā, ka puritia te plasma e te whakapūpū o ngā matūriki kūpapa me ngā katote konganuku tuarua, ā, ka whakamahia ngā ngota hau kore mahi pērā i te Ar hei whakakā i te plasma, ā, muri iho ka whakapūpūhia ngā matūriki konganuku tata ki te ūnga, ka whakaterehia hoki ki te pupuhi i te ūnga i raro i te mahi a ngā mara aukume me te hiko hei pupuri i te tukunga iahiko teitei, ā, ko te plasma he matūriki konganuku tino whakapūpū. Nā te tukanga whakamahana o te pānga whakamahana ki te ūnga, kia mau ai te mahi a te ūnga i roto i ngā tono ahumahi, kaua e nui rawa te mātotoru mana e pā ana ki te ūnga. Ko te tikanga, ko te whakamatao wai tika me te kawe wera o te rauemi ūnga me noho ki raro i te 25 W / cm2. Ko te whakamatao wai ā-kore, he ngoikore te kawe wera o te rauemi ūnga, ko te rauemi ūnga i puta mai i te pakaru o te ahotea wera, i te rauemi ūnga rānei he iti ngā wāhanga koranu pupuhi, ā, ko ētahi atu take o te mātotoru mana ka taea anake te noho ki raro i te 2 ~ 15 W / cm2, he iti rawa i ngā whakaritenga o te mātotoru mana teitei. Ka taea te whakatau i te raruraru o te wera nui o te ūnga mā te whakamahi i ngā pāoro mana teitei tino whaiti. Ka tautuhia e Anders te pāoro magnetron mana teitei hei momo pāoro pāoro i reira ko te mātotoru mana tihi e nui ake ana i te mātotoru mana toharite mā te 2 ki te 3 ngā whakahau o te kaha, ā, ko te pāoro katote ūnga te rangatira o te tukanga pāoro, ā, ko ngā ngota pāoro ūnga he tino wehea.

Nama 2 Ngā āhuatanga o te whakatakotoranga paninga magnetron pulsed mana teitei

Ka taea e te pupuhi magnetron kaha teitei te whakaputa i te plasma me te tere wehewehe teitei me te kaha katote teitei, ā, ka taea te whakamahi i te pēhanga whakahāngai hei whakatere i ngā katote kua utua, ā, ka pupuhihia te tukanga whakatakotoranga paninga e ngā matūriki kaha-teitei, he hangarau IPVD noa. He tino pānga nui te kaha katote me te tohatoha ki te kounga me te mahi paninga.
Mō te IPVD, i runga i te tauira rohe hanganga rongonui o Thorton, i whakaarohia e Anders he tauira rohe hanganga e whakauru ana i te whakatakotoranga plasma me te whakairo katote, i whakawhānui ake i te whanaungatanga i waenga i te hanganga paninga me te pāmahana me te pēhanga hau i roto i te tauira rohe hanganga Thorton ki te whanaungatanga i waenga i te hanganga paninga, te pāmahana me te kaha katote, e whakaaturia ana i te Pikitia 2. Mō te paninga whakatakotoranga katote kaha iti, ka rite te hanganga paninga ki te tauira rohe hanganga Thorton. I te pikinga o te pāmahana whakatakotoranga, ka whakawhiti mai i te rohe 1 (ngā tioata muka wetekina) ki te rohe T (ngā tioata muka matotoru), te rohe 2 (ngā tioata pou) me te rohe 3 (te rohe whakahou tioata); i te pikinga o te kaha katote whakatakotoranga, ka heke te pāmahana whakawhiti mai i te rohe 1 ki te rohe T, te rohe 2 me te rohe 3. Ka taea te whakarite i ngā tioata muka matotoru me ngā tioata pou i te pāmahana iti. Ina piki te kaha o ngā katote kua whakatakotoria ki te 1-10 eV, ka whakanuia te pupuhi me te whakairo o ngā katote ki runga i te mata o ngā paninga kua whakatakotoria, ā, ka piki ake te matotoru o ngā paninga.

Nama 3 Te whakarite i te paparanga paninga mārō mā te hangarau pupuhi magnetron kaha teitei
He matotoru ake te paninga i whakaritea mā te hangarau magnetron sputtering kaha teitei, he pai ake ngā āhuatanga miihini me te pumau pāmahana teitei. E ai ki te Pikitia 3, ko te paninga magnetron sputtered TiAlN tikanga he hanganga karaihe poutū me te pakeke o te 30 GPa me te modulus Young o te 460 GPa; ko te paninga HIPIMS-TiAlN he 34 GPa te pakeke, ko te modulus Young he 377 GPa; ko te ōwehenga i waenga i te pakeke me te modulus Young he ine i te pakari o te paninga. Ko te pakeke teitei me te modulus Young iti te tikanga he pai ake te pakari. He pai ake te pumau pāmahana teitei o te paninga HIPIMS-TiAlN, me te wāhanga hexagonal AlN i whakatōngia ki roto i te paninga TiAlN tikanga i muri i te maimoatanga whakamahana pāmahana teitei i te 1,000 °C mō te 4 hāora. Ka heke te pakeke o te paninga i te pāmahana teitei, ko te paninga HIPIMS-TiAlN ka noho tonu i muri i te maimoatanga wera i te pāmahana me te wā kotahi. He nui ake te pāmahana tīmatanga o te waikura i te paninga HIPIMS-TiAlN i te paninga tikanga. Nō reira, he pai ake te mahi a te paninga HIPIMS-TiAlN i roto i ngā taputapu tapahi tere-tiketike i ērā atu taputapu paninga i hangaia mā te tukanga PVD.