No.1 Mfundo yamphamvu kwambiri pulsed magnetron sputtering
The mkulu mphamvu pulsed magnetron sputtering njira ntchito mkulu pachimake zimachitika mphamvu (2-3 madongosolo a ukulu kuposa ochiritsira magnetron sputtering) ndi otsika zimachitika ntchito mkombero (0.5% -10%) kukwaniritsa mkulu zitsulo dissociation mitengo (> 50%), amene anachokera ku maginito chandamale chandamale, 1 monga sputter chandamale chandamale Pic sputter, panopa sputter sputter kusonyeza ndi molingana ndi exponential nth mphamvu ya kutulutsa voteji U, I = kUn (n ndi nthawi zonse yokhudzana ndi kapangidwe ka cathode, maginito ndi zinthu). Pakachulukidwe kakang'ono ka mphamvu (magetsi otsika) mtengo wa n nthawi zambiri umakhala pakati pa 5 mpaka 15; ndi kuchuluka kwa magetsi otulutsa, kachulukidwe kakali pano ndi kachulukidwe ka mphamvu zimakula mwachangu, ndipo pamagetsi apamwamba kwambiri mtengo wa n umakhala 1 chifukwa cha kutayika kwa maginito. Ngati paotsika mphamvu kachulukidwe, mpweya kumaliseche anatsimikiza ndi ayoni mpweya amene ali yachibadwa pulsed kumaliseche akafuna; ngati pamphamvu kachulukidwe mphamvu, chiŵerengero cha ayoni zitsulo mu plasma ukuwonjezeka ndi zinthu zina kusinthana, amene ali mu mode kudzigwetsa sputtering, mwachitsanzo, madzi a m'magazi kusamalidwa ndi ionization wa sputtered ndale particles ndi yachiwiri zitsulo ayoni, ndi inert mpweya maatomu monga Ar amagwiritsidwa ntchito poyatsa madzi a m'magazi ndi particles chandamale, kenako chitsulo chandamale. kubwerera kuphulitsa chandamale sputtered pansi zochita za minda maginito ndi magetsi kukhala mkulu panopa kumaliseche, ndi madzi a m'magazi kwambiri ionized zitsulo particles. Chifukwa cha sputtering ndondomeko Kutentha zotsatira pa chandamale, pofuna kuonetsetsa ntchito khola chandamale mu ntchito mafakitale, mphamvu kachulukidwe mwachindunji ntchito chandamale sangakhale lalikulu kwambiri, zambiri mwachindunji madzi kuzirala ndi chandamale zinthu matenthedwe madutsidwe ayenera kukhala mu nkhani ya 25 W / cm2 pansipa, kuzirala madzi, chandamale chuma chandamale matenthedwe madutsidwe lili ndi chandamale chandamale matenthedwe madutsidwe, kapena chandamale chandamale matenthedwe madutsidwe chifukwa chandalama otsika chandamale chandamale matenthedwe madutsidwe kapena frarg. zosakhazikika aloyi zigawo zikuluzikulu ndi zina za kachulukidwe mphamvu akhoza kukhala mu 2 ~ 15 W / cm2 pansipa, pansi pa zofunika mkulu kachulukidwe mphamvu. Vuto la chandamale kutenthedwa akhoza kuthetsedwa ntchito yopapatiza mkulu mphamvu zimachitika. Anders amatanthauzira sputtering yamphamvu kwambiri ya pulsed pulsed magnetron ngati mtundu wa pulsed sputtering pomwe kachulukidwe kakang'ono ka mphamvu kumaposa kuchuluka kwa mphamvu kwa 2 mpaka 3 magnitude, ndipo chandamale sputtering ya ayoni imayang'anira njira yopunthira, ndipo chandamale chowombera ndi maatomu ogwirizana kwambiri.
No.2 The makhalidwe mkulu mphamvu pulsed magnetron sputtering ❖ kuyanika mafunsidwe
Mkulu mphamvu pulsed maginito sputtering akhoza kutulutsa madzi a m'magazi ndi mkulu dissociation mlingo ndi mkulu ion mphamvu, ndipo angagwiritse ntchito kukondera kukakamiza imathandizira ma ion mlandu, ndi ❖ kuyanika ndondomeko mafumbidwe ndi particles mkulu-mphamvu, amene ali mmene IPVD luso. Mphamvu ya ion ndi kugawa kumakhala ndi mphamvu yofunikira kwambiri pakuyika bwino komanso magwiridwe antchito.
Ponena za IPVD, kutengera chitsanzo chodziwika bwino cha Thorton structural region, Anders anakonza zachitsanzo chachigawo chomwe chimaphatikizapo kuyika kwa plasma ndi ion etching, kukulitsa ubale pakati pa kapangidwe ka ❖ kuyanika ndi kutentha ndi kupanikizika kwa mpweya mu gawo la Thorton structural model ku ubale pakati pa kapangidwe ka ❖ kuyanika, kutentha ndi mphamvu ya ion, monga momwe zikusonyezedwera mu Pic 2. Pankhani ya kutsika kwa mphamvu ya coating, tofood coating, to conform to the model of corton structure. Ndi kuwonjezeka kwa kutentha kwa malo, kusintha kuchokera ku dera la 1 (lotayirira porous fiber crystals) kupita ku dera T (dense fiber crystals), dera 2 (columnar crystals) ndi dera 3 (recrystallization region); ndi kuwonjezeka kwa mphamvu ya ma ion mphamvu, kutentha kwa kusintha kuchokera ku dera 1 kupita ku dera T, dera 2 ndi dera 3 kumachepa. Makhiristo okwera kwambiri komanso ma kristalo a columnar amatha kukonzedwa pa kutentha kochepa. Mphamvu ya ma ion oyikidwa ikakwera kufika pa dongosolo la 1-10 eV, kuphulika kwa ma ion ndi kuyamwa kwa ma ion pa zokutira zoyikidwa kumawonjezeka ndipo makulidwe a zokutira amakula.
No.3 Kukonzekera zolimba ❖ kuyanika wosanjikiza ndi mkulu mphamvu pulsed magnetron sputtering luso
The ❖ kuyanika okonzedwa ndi mkulu mphamvu pulsed magnetron sputtering luso ndi wandiweyani, ndi bwino makina katundu ndi mkulu kutentha bata. Monga momwe tawonetsera mu Pic 3, maginito ochiritsira opangidwa ndi TiAlN ❖ kuyanika ndi mawonekedwe a kristalo omwe ali ndi kuuma kwa 30 GPa ndi modulus ya Young ya 460 GPa; Chophimba cha HIPMS-TiAlN ndi kuuma kwa 34 GPa pomwe modulus ya Young ndi 377 GPa; chiŵerengero pakati pa kuuma ndi modulus Young ndi muyeso wa kulimba kwa zokutira. Kulimba kwambiri ndi kuchepera kwa Young modulus kumatanthauza kulimba bwino. Kupaka kwa HIPMS-TiAlN kumakhala ndi kukhazikika kwa kutentha kwapamwamba, ndi gawo la AlN hexagonal lomwe limakhazikika mu zokutira wamba za TiAlN pambuyo pa kutentha kwapakati pa 1,000 ° C kwa 4 h. Kuuma kwa chophimba kumachepa kutentha kwakukulu, pamene kuphimba kwa HIPMS-TiAlN kumakhalabe kosasintha pambuyo pa chithandizo cha kutentha pa kutentha ndi nthawi yomweyo. Kupaka kwa HIPMS-TiAlN kumakhalanso ndi kutentha kwakukulu kwa kutentha kwa okosijeni kuposa kuyanika wamba. Chifukwa chake, zokutira za HPIMS-TiAlN zikuwonetsa kuchita bwino kwambiri pazida zodula kwambiri kuposa zida zina zokutira zokonzedwa ndi njira ya PVD.
Nthawi yotumiza: Nov-08-2022