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Fasahar tacewa Magnetic

Tushen labarin: Zhenhua vacuum
Karanta:10
An buga:22-11-08

Ka'idar asali na na'urar tacewa na maganadisu
Tsarin tacewa na na'urar tace maganadisu don manyan barbashi a cikin bim ɗin plasma shine kamar haka:
Yin amfani da bambance-bambancen tsakanin plasma da manyan ƙwayoyin cuta da ke cajin da caji-zuwa-mass rabo, akwai "shamaki" (ko dai baffle ko bangon bututu mai lankwasa) sanyawa tsakanin substrate da cathode surface, wanda ke toshe duk wani barbashi da ke motsawa cikin madaidaiciyar layi tsakanin cathode da substrate, yayin da ions za a iya karkatar da ions ta hanyar "barrier" zuwa filin maganadisu.

Ƙa'idar aiki na na'urar tacewa na maganadisu

A cikin filin maganadisu, Pe<

Pe da Pi sune Larmor radii na electrons da ions bi da bi, kuma a shine diamita na ciki na tace maganadisu. Ƙarfin Lorentz yana shafar electrons a cikin plasma kuma suna jujjuyawa tare da filin maganadisu axially, yayin da filin maganadisu yana da ƙarancin tasiri akan tarin ions saboda bambancin ions da electrons a cikin radius na Larmor. Duk da haka, a lokacin da electron motsi tare da axis na Magnetic tace na'urar, zai jawo hankalin ions tare da axial ga juyi motsi saboda da mayar da hankali da kuma karfi da karfi da wutar lantarki, da kuma electron gudun ne mafi girma fiye da ion, don haka da electron kullum ja da ion gaba, yayin da plasma ko da yaushe ya kasance mai tsaka-tsaki-lantarki. Manyan barbashi suna tsaka tsaki ne ta hanyar lantarki ko kuma an caje su kaɗan, kuma ingancin ya fi girma fiye da ions da electrons, ainihin filin maganadisu da motsin linzamin kwamfuta ba ya shafa tare da inertia, kuma za a tace su bayan karo da bangon ciki na na'urar.
Karkashin aikin haɗin gwiwar lanƙwasa filin maganadisu da drift gradient da karo na ion-electron, ana iya karkatar da plasma a cikin na'urar tacewa na maganadisu. A cikin Samfuran ka'idodin gama gari da ake amfani da su a yau sune Morozov flux model da kuma na Davidson rigid rotor model, waɗanda ke da fasalin gama gari mai zuwa: akwai filin maganadisu wanda ke sa electrons su motsa cikin tsayayyen tsari.
Ƙarfin filin maganadisu wanda ke jagorantar motsin axial na plasma a cikin na'urar tacewa ta maganadisu yakamata ya kasance kamar haka:
Fasahar Filtration ta Magnetic (1)

Mi, Vo, da Z sune adadin ion, saurin sufuri, da adadin cajin da aka ɗauka. a shine diamita na ciki na matatar maganadisu, kuma e shine cajin lantarki.
Ya kamata a lura cewa wasu ions mafi girma na makamashi ba za a iya daure su gaba ɗaya da katako na lantarki ba. Suna iya isa bangon ciki na matatar maganadisu, suna sanya bangon ciki ya kasance mai inganci, wanda hakan ke hana ions daga ci gaba da isa bangon ciki kuma yana rage asarar plasma.
Dangane da wannan al'amari, ana iya amfani da matsi mai kyau na son zuciya ga bangon na'urar tace maganadisu don hana karon ions don inganta ingancin jigilar ion da aka yi niyya.
Fasahar Filtration ta Magnetic (2)

Rarraba na'urar tacewa na maganadisu
(1)Tsarin layi. Filin maganadisu yana aiki azaman jagora don kwararar igiyoyin ion, yana rage girman tabo na cathode da kuma adadin gungu na macroscopic, yayin da yake haɓaka rikice-rikice a cikin plasma, yana haifar da jujjuya ɓarna na tsaka tsaki zuwa ions da rage adadin macroscopic barbashi clusters, da sauri rage yawan manyan barbashi yayin da filin maganadisu ya karu. Idan aka kwatanta da na al'ada Multi-arc ion shafi hanya, wannan tsarin na'urar ya shawo kan gagarumin raguwa a cikin yadda ya dace da wasu hanyoyin da za a iya tabbatar da gaske akai fim jita-jita kudi yayin da rage yawan manyan barbashi da game da 60%.
(2) Tsarin nau'in lanƙwasa. Ko da yake tsarin yana da nau'i daban-daban, amma ka'idar asali iri ɗaya ce. Plasma tana motsawa ƙarƙashin aikin haɗin gwiwar filin maganadisu da filin lantarki, kuma ana amfani da filin maganadisu don iyakancewa da sarrafa plasma ba tare da karkatar da motsi tare da layin ƙarfin maganadisu ba. Kuma barbashi marasa caji za su motsa tare da linzamin kwamfuta kuma a rabu. Fina-finan da wannan tsarin na'urar ke shiryawa suna da tauri mai girma, ƙarancin ƙarancin ƙasa, ɗimbin yawa, girman hatsi iri ɗaya, da mannen tushe mai ƙarfi na fim. Binciken XPS ya nuna cewa taurin fuskar ta-C fina-finan da aka lulluɓe da irin wannan na'urar na iya kaiwa 56 GPa, don haka na'urar tsarin mai lanƙwasa ita ce mafi yawan amfani da ingantacciyar hanya don kawar da ɓarna mai girma, amma ana buƙatar haɓaka ingantaccen jigilar ion mai niyya. Na'urar tacewa ta lanƙwasa 90° ɗaya ce daga cikin na'urorin tsarin da aka fi amfani da su. Gwaje-gwajen da aka yi a saman bayanan fina-finai na Ta-C sun nuna cewa bayanan martaba na 360 ° na'urar tacewa ta lanƙwasa ba ta canzawa da yawa idan aka kwatanta da na'urar tacewa ta 90 ° lanƙwasa, don haka tasirin 90 ° lanƙwasa magnetic tacewa ga manyan barbashi za a iya cimma ta asali. 90 ° Bendend naúrar tnlration na magnetic shine mafi yawan nau'ikan nau'ikan abubuwa guda biyu: ɗayan yana da lanƙwasa bendenoid a cikin ɗakin kwana, kuma ɗayan kuma a tsakanin su kawai a cikin tsari ne kawai a cikin tsarin. Matsakaicin aiki na na'urar tacewa ta lanƙwasa 90 ° yana cikin tsari na 10-2Pa, kuma ana iya amfani dashi a cikin aikace-aikacen da yawa, kamar su nitride mai rufewa, oxide, carbon amorphous, fim ɗin semiconductor da ƙarfe ko fim ɗin ƙarfe.

Ingancin na'urar tacewa na maganadisu
Tun da ba duk manyan barbashi ba zasu iya rasa makamashin motsi a cikin ci gaba da karo da bango, wasu adadin manyan barbashi zasu isa wurin ta hanyar bututun bututu. Sabili da haka, na'urar tacewa mai tsayi da kunkuntar tana da mafi girman ingancin tacewa na manyan barbashi, amma a wannan lokacin zai ƙara asarar ions da aka yi niyya kuma a lokaci guda yana ƙara haɓakar tsarin. Saboda haka, tabbatar da cewa Magnetic tace na'urar yana da kyau kwarai manyan barbashi cire da kuma high dace da ion kai sufuri ne mai zama dole sharudda ga Multi-arc ion shafi fasahar samun fadi da aikace-aikace hange a depositing high yi bakin ciki fina-finai. Aiki na na'urar tacewa maganadisu tana shafar ƙarfin filin maganadisu, lanƙwasa son zuciya, buɗaɗɗen baffle na inji, tushen baka na halin yanzu da kusurwar abin da ya faru. Ta hanyar saita ma'auni masu ma'ana na na'urar tacewa maganadisu, tasirin tace manyan barbashi da ingancin canja wurin ion na manufa na iya inganta yadda ya kamata.


Lokacin aikawa: Nuwamba-08-2022