In ukufakwa komusi ongokoqobo(PVD) kanye nezinqubo zokumboza i-vacuum ezihlobene, ubumsulwa befilimu buvame ukuhlotshaniswa kalula nobumsulwa bangaphakathi bezinto eziqondiwe noma zomthombo. Nokho, ekukhiqizweni okusebenzayo, ubumsulwa bokugcina befilimu efakiwe abunqunywa kuphela ngokwakheka kwezinto, kodwa futhi—ngokubucayi—yikhwalithi yendawo ye-vacuum ngaphambi nangesikhathi sezigaba zokuqala zokufakwa. Izinga lokwehlisa ipompo kanye nokwakhiwa kwengcindezi yokugcina kuthinta ngqo ukwakheka kanye nengcindezi engaphelele yamagesi asele, ngaleyo ndlela kuthinte isakhiwo esincane kanye nobumsulwa bamakhemikhali befilimu.
Njengoba igumbi lishintsha lisuka ezimweni zomkhathi liye ku-vacuum ephezulu, ukumuncwa okuqhubekayo kwamagesi afakwe emanzini kanye nomswakama kwenzeka ezindongeni zegumbi, izinto ezifakiwe, kanye nezingxenye ezingaphansi komhlaba. Umhwamuko wamanzi (H₂O), umoya-mpilo (O₂), i-nitrogen (N₂), kanye nama-hydrocarbon ahlukahlukene kuvame ukuba khona. Uma lezi zinhlobo ezisele zihlanganyela ekuphenduleni ngesikhathi sokufakwa noma zifakwa efilimini ekhulayo, zethula ama-athomu okungcola noma zakha ama-compounds angafuneki, kunciphisa ubumsulwa befilimu kanye nezakhiwo zikagesi ezingase zonakalise, ukusebenza kokukhanya, kanye nokuzinza kwesikhathi eside.
Inzuzo ebalulekile yokuphampa ngesivinini esikhulu ukunciphisa ngokushesha isikhathi sokuhlala ohlelweni lokucindezela okuphezulu. Ngesikhathi sesigaba sokuphampa esinzima, ukuchayeka isikhathi eside ezingcindezini eziphakathi kukhuthaza izinqubo zokumunca nokukhipha amanzi ezindaweni ezingaphakathi kwegumbi, okudala umjikelezo wokuhlanza. Ukwandisa isivinini sokuphampa esisebenzayo kuvumela uhlelo ukuthi ludlule ngokushesha kulolu hlu lokucindezela, kunciphisa amathuba okumunca kabusha umhwamuko wamanzi nama-molecule ezinto eziphilayo futhi kumise isimo sokuqala esihlanzekile sesigaba se-vacuum ephezulu.
Uma ususesimweni se-vacuum ephezulu, isivinini sokupompa sihlala sibalulekile ekulawuleni ingcindezi engaphelele yamagesi asele. Isivinini sokupompa esisebenza kahle kakhulu siholela ekucindezelweni okungaphelele okuzinzile, ikakhulukazi komoya-mpilo kanye nomhwamuko wamanzi. Ekubekweni kwefilimu yensimbi, ngisho nokushintshashintsha okuncane komfutho ongaphelele womoya-mpilo kungabangela ukubola kwendawo, okuholela ekwakhekeni kwe-iron oxide inclusions kanye nokwehla kokuhlanzeka kwensimbi. Ezimbozweni ezibonakalayo noma ezisebenzayo, umswakama osele ungathinta nobuningi befilimu futhi wandise amaphutha esakhiwo.
Ukuphampa okusheshayo okuphansi kuthinta kakhulu ikhwalithi yesixhumi sokuqala sefilimu ne-substrate. Ngaphambi kokuba ubuso be-substrate bumbozwe ngokuphelele yizinto ezifakiwe, umfutho ophezulu wegesi yangemuva ukhulisa amathuba okuba ama-molecule okungcola ahlanganyele ekusabeleni kwe-interfacial, akhe izendlalelo zokungcola noma izendlalelo eziboshiwe kancane. Amaphutha anjalo e-interfacial ngokuvamile kunzima ukuwasusa ekukhuleni okulandelayo, kodwa kamuva angabonakala njengokwehluleka kokunamathela noma izinkinga zokuthembeka ngaphansi kokuhlolwa kwemvelo.
Kubalulekile ukuqaphela ukuthi isivinini esikhulu sokupompa asifinyelelwa nje ngokufaka amaphampu e-vacuum anomthamo ophezulu. Kudinga ukwenziwa ngcono okuphelele kokucushwa kwephampu, ukuhanjiswa kwemigqa ye-vacuum, izici zokuphendula kwe-valve, kanye nokwakheka kwesakhiwo segumbi. Kuphela lapho ukusebenza kahle kokupompa kwesistimu iyonke kuqinisekiswa khona lapho amagesi asele angasuswa ngokushesha futhi ukucindezeleka okuphansi okuyingxenye kugcinwe njalo, okuhlinzeka ngesisekelo esiqinile sokwakheka kwamafilimu ahlanzekile kakhulu.
Ezimbozweni ezisebenzayo ezithuthukisiwe, amafilimu okukhanya, kanye nezinhlelo zokusebenza ze-elekthronikhi ezinembile, umehluko wokusebenza uvame ukuvela emiphumeleni eqongelelekayo yokungcola kwezinga lokulandelela. Ngakho-ke ikhono lokuphampa elisheshayo nelizinzile aliyona nje indaba yokusebenza kahle kwenqubo; kuyisimo senqubo esiyisisekelo esihileleke ngqo ezindleleni ezilawula ikhwalithi yefilimu.
-Lesi sihloko sishicilelwe nguumenzi wemishini yokumboza nge-vacuum I-Zhenhua Vacuum
Isikhathi sokuthunyelwe: Feb-06-2026