In kev tso pa tawm ntawm lub cev(PVD) thiab lwm yam txheej txheem nqus tsev, qhov huv ntawm zaj duab xis feem ntau yog txuam nrog qhov huv ntawm cov khoom siv lossis cov khoom siv. Txawm li cas los xij, hauv kev tsim khoom siv, qhov huv kawg ntawm zaj duab xis tso tawm tsis yog txiav txim siab los ntawm cov khoom siv sib xyaw, tab sis kuj - qhov tseem ceeb - los ntawm qhov zoo ntawm qhov chaw nqus tsev ua ntej thiab thaum lub sijhawm pib ntawm kev tso tawm. Qhov nrawm ntawm lub twj tso kua mis thiab kev tsim kom muaj qhov siab kawg cuam tshuam ncaj qha rau qhov sib xyaw thiab qhov siab ib nrab ntawm cov pa roj seem, yog li cuam tshuam rau qhov microstructure thiab tshuaj lom neeg huv ntawm zaj duab xis.
Thaum lub chamber hloov ntawm huab cua mus rau qhov chaw nqus tsev siab, cov pa roj thiab dej noo uas tau nqus tawm tas li tshwm sim los ntawm phab ntsa chamber, cov khoom siv, thiab cov khoom siv hauv qab. Cov pa dej (H₂O), oxygen (O₂), nitrogen (N₂), thiab ntau yam hydrocarbons feem ntau muaj nyob. Yog tias cov tsiaj seem no koom nrog cov tshuaj tiv thaiv thaum lub sijhawm tso tawm lossis koom nrog rau hauv zaj duab xis uas loj hlob, lawv qhia cov atoms impurity lossis tsim cov tshuaj tsis xav tau, txo cov zaj duab xis purity thiab ua rau cov khoom hluav taws xob, kev ua haujlwm optical, thiab kev ruaj khov mus sij hawm ntev poob qis.
Ib qho txiaj ntsig tseem ceeb ntawm kev siv lub twj tso kua dej ceev ceev yog qhov ua rau lub sijhawm nyob hauv qhov siab dua sai dua. Thaum lub sijhawm twj tso kua dej tsis ruaj khov, kev raug rau qhov siab nruab nrab ntev ua rau cov txheej txheem nqus thiab tshem tawm ntau zaus ntawm cov nplaim hauv lub chamber, tsim kom muaj kev rov ua kom huv. Kev ua kom lub twj tso kua dej ceev dua ua rau lub kaw lus hla dhau qhov siab no sai sai, txo cov sijhawm rau kev rov ua kom cov pa dej thiab cov organic molecules thiab tsim kom muaj qhov pib huv dua rau theem nqus dej siab.
Thaum nyob rau hauv lub tshuab nqus tsev siab, qhov ceev ntawm lub twj tso kua tseem ceeb heev rau kev tswj qhov siab ib nrab ntawm cov pa roj seem. Qhov ceev ntawm lub twj tso kua zoo dua ua rau qhov siab ib nrab qis dua, tshwj xeeb tshaj yog rau cov pa oxygen thiab cov dej pa. Hauv cov yeeb yaj kiab hlau, txawm tias qhov hloov pauv me me ntawm qhov siab ib nrab ntawm cov pa oxygen tuaj yeem ua rau qhov oxidation ntawm qhov chaw, ua rau muaj cov hlau oxide thiab txo qhov huv ntawm cov hlau. Hauv cov txheej txheem kho qhov muag lossis ua haujlwm zoo, cov dej noo seem kuj tseem yuav cuam tshuam rau qhov ceev ntawm zaj duab xis thiab ua rau cov qauv tsis zoo.
Qhov kev nqus dej ceev ceev kuj tseem cuam tshuam rau qhov zoo ntawm qhov pib zaj duab xis-substrate interface. Ua ntej qhov chaw substrate raug npog tag nrho los ntawm cov khoom tso, qhov siab ntawm cov pa roj keeb kwm yav dhau los ua rau muaj feem ntau ntawm cov molecules impurity koom nrog hauv kev sib cuam tshuam interfacial, tsim cov khaubncaws sab nraud povtseg lossis cov khaubncaws sab nraud povtseg tsis muaj zog. Cov teeb meem interfacial no feem ntau nyuaj rau tshem tawm hauv kev loj hlob tom qab, tab sis lawv tom qab yuav tshwm sim ua qhov tsis ua haujlwm ntawm kev sib txuas lossis teeb meem kev ntseeg siab hauv qab kev sim ib puag ncig.
Nws yog ib qho tseem ceeb uas yuav tsum nco ntsoov tias qhov ceev ntawm kev nqus dej siab tsis yog ua tiav los ntawm kev teeb tsa cov twj tso kua mis muaj peev xwm siab dua. Nws yuav tsum tau ua kom zoo dua ntawm kev teeb tsa ntawm lub twj tso kua mis, kev coj ua ntawm cov kab nqus dej, cov yam ntxwv ntawm lub valve teb, thiab kev tsim qauv ntawm chav. Tsuas yog thaum ua kom ntseeg tau tias qhov ua haujlwm ntawm kev nqus dej ntawm lub cev tag nrho tuaj yeem tshem tawm cov pa roj seem sai thiab tswj tau qhov siab tsawg ib nrab tas li, muab lub hauv paus ruaj khov rau kev tsim cov zaj duab xis huv siab.
Hauv cov txheej txheem ua haujlwm siab heev, cov yeeb yaj kiab kho qhov muag, thiab cov ntawv thov hluav taws xob raug, qhov sib txawv ntawm kev ua tau zoo feem ntau tshwm sim los ntawm cov teebmeem sib sau ua ke ntawm cov khoom tsis huv. Yog li ntawd, lub peev xwm nqus dej sai thiab ruaj khov tsis yog tsuas yog qhov teeb meem ntawm kev ua haujlwm zoo xwb; nws yog ib qho tseem ceeb ntawm cov txheej txheem uas koom nrog ncaj qha rau cov txheej txheem tswj hwm qhov zoo ntawm zaj duab xis.
- Tsab xov xwm no tau luam tawm los ntawmChaw tsim khoom siv nqus tsev txheej Zhenhua Nqus Tsev
Lub sijhawm tshaj tawm: Lub Ob Hlis-06-2026