In ukukhutshwa komphunga ngokwasemzimbeni(PVD) kunye neenkqubo zokugquma i-vacuum ezinxulumene noko, ubunyulu befilimu budla ngokunxulunyaniswa ngokulula nobunyulu bangaphakathi bezinto ekujoliswe kuzo okanye ezivela kuzo. Nangona kunjalo, kwimveliso ebonakalayo, ubunyulu bokugqibela befilimu egciniweyo abumiselwa kuphela bubume bezinto, kodwa bukwamiselwa—ngokubalulekileyo—ngumgangatho wendawo ye-vacuum ngaphambi nangexesha lokuqala kokufakwa kwayo. Izinga lokuthotywa kwepompo kunye nokusekwa koxinzelelo lokugqibela luchaphazela ngokuthe ngqo ubume kunye noxinzelelo oluyinxenye lweegesi eziseleyo, ngaloo ndlela luchaphazela isakhiwo se-microstructure kunye nobunyulu beekhemikhali zefilimu.
Njengoko igumbi litshintsha ukusuka kwiimeko zomoya ukuya kwi-vacuum ephezulu, ukufunxwa okuqhubekayo kweegesi ezifunxwayo kunye nokufuma kwenzeka kwiindonga zegumbi, izixhobo, kunye neendawo ezingaphantsi komhlaba. Umphunga wamanzi (H₂O), ioksijini (O₂), initrogen (N₂), kunye neehydrocarbon ezahlukeneyo zihlala zikhona. Ukuba ezi ntlobo ziseleyo zithatha inxaxheba kwiimpendulo ngexesha lokufakwa okanye zifakwa kwifilimu ekhulayo, zingenisa iiathom zokungcola okanye zenze iikhompawundi ezingafunekiyo, zinciphisa ubumsulwa befilimu kunye neempawu zombane ezinokuthi zonakalise, ukusebenza kwe-optical, kunye nokuzinza kwexesha elide.
Inzuzo ephambili yokufunxa ngesantya esiphezulu kukunciphisa ngokukhawuleza ixesha lokuhlala kwinkqubo yoxinzelelo oluphezulu. Ngexesha lesigaba sokufunxa esinzima, ukuvezwa ixesha elide kwiingcinezelo eziphakathi kukhuthaza ukufunxa okuphindaphindiweyo kunye neenkqubo zokufunxa kwiindawo ezingaphakathi kwigumbi, okudala umjikelo wokufunxa. Ukwandisa isantya sokufunxa esisebenzayo kuvumela inkqubo ukuba idlule ngokukhawuleza kolu luhlu loxinzelelo, kunciphisa amathuba okufunxa kwakhona umphunga wamanzi kunye neemolekyuli eziphilayo kunye nokumisela imeko yokuqala ecocekileyo yesigaba se-vacuum ephezulu.
Xa sele ikwinkqubo ye-vacuum ephezulu, isantya sokumpompa sihlala sibalulekile ekulawuleni uxinzelelo olungaphelelanga lweegesi ezisele. Isantya esiphezulu sokumpompa sikhokelela kuxinzelelo olungaphelelanga oluzinzileyo, ngakumbi kwi-oksijini kunye nomphunga wamanzi. Kwifilimu yesinyithi, nokuguquguquka okuncinci kwi-oksijini engaphelelanga kunokubangela i-oxidation yomphezulu, okubangela ukwakheka kwe-iron oxide inclusions kunye nokuncipha kobunyulu besinyithi. Kwi-optical okanye i-functional coatings esebenza kakhulu, ukufuma okuseleleyo kunokuchaphazela uxinano lwefilimu kwaye kwandise iziphene zesakhiwo.
Ukupompa okukhawulezayo kunefuthe elikhulu kumgangatho womdibaniso wokuqala wefilimu-i-substrate. Ngaphambi kokuba umphezulu we-substrate ugutyungelwe ngokupheleleyo zizinto ezigciniweyo, uxinzelelo oluphezulu lwegesi olungasemva luyandisa amathuba okuba iimolekyuli zokungcola zithathe inxaxheba kwiimpendulo ze-interfacial, zenze iileya zokungcola okanye iileya ezidibeneyo. Ezi ziphene ze-interfacial zihlala zinzima ukuzisusa ekukhuleni okulandelayo, kodwa kamva zinokubonakala njengokusilela kokunamathela okanye imiba yokuthembeka phantsi kovavanyo lokusingqongileyo.
Kubalulekile ukuqaphela ukuba isantya esiphezulu sokupompa asifezekiswa nje ngokufaka iimpompo zevacuum ezinomthamo ophezulu. Ifuna ukulungiswa okubanzi koqwalaselo lwempompo, ukuqhuba imigca yevacuum, iimpawu zempendulo yevalvu, kunye noyilo lwesakhiwo segumbi. Kuphela xa ukusebenza kakuhle kwenkqubo yokupompa kuqinisekiswa apho iigesi eziseleyo zingasuswa ngokukhawuleza kwaye uxinzelelo oluphantsi oluncinci lugcinwe rhoqo, okubonelela ngesiseko esizinzileyo sokwenza iifilimu ezicocekileyo kakhulu.
Kwiingubo ezisebenzayo eziphambili, iifilimu ze-optical, kunye nokusetyenziswa kwe-elektroniki okuchanekileyo, umahluko wokusebenza udla ngokuvela kwimiphumo eqokelelweyo yokungcola kwinqanaba lokulandelela. Ngoko ke, amandla okupompoza ngokukhawuleza nangokuzinzileyo ayisiyonto nje yokusebenza kakuhle kwenkqubo; yimeko yenkqubo esisiseko ebandakanyeka ngokuthe ngqo kwiindlela ezilawula umgangatho wefilimu.
-Eli nqaku lipapashwe nguumenzi wezixhobo zokugquma nge-vacuum I-Zhenhua Vacuum
Ixesha lokuthumela: Feb-06-2026