Ekwenzeni kwesimanje, ubuchwepheshe bokumboza nge-vacuum busetshenziswa kabanzi emikhakheni efana ne-elekthronikhi, i-optics, izimoto, kanye ne-aerospace. Esinye sezici ezibaluleke kakhulu ekuqinisekiseni ukusebenza kokubopha ukulawula ukujiya kwefilimu okunembile, okuthinta ngqo ukuqhutshwa kukagesi, ukuziphatha kokukhanya, ukumelana nokugqwala, kanye nezinye izakhiwo zokusebenza kwefilimu. Ngakho-ke, ukulawulwa kobukhulu befilimu sekuyinto ebalulekile ekuthuthukisweni kobunjiniyela bokufaka i-vacuum. Lesi sihloko sichaza izimiso, izindlela ezivamile, kanye nezici ezithonya ukulawula ukujiya okunembile, okunikeza ukuqonda kokuthuthukisa ukukhiqizwa kwefilimu encane.
Amapharamitha Ayisihluthulelo angu-1 kuUkulawula Ubukhulu Befilimu
1. Izinga Lokufaka Imali
Ubukhulu befilimu buxhomeke kakhulu esilinganisweni sokufakwa, esichazwa njengobukhulu befilimu efakwe ngesikhathi ngasinye ebusweni be-substrate. Ezinqubweni ze-vacuum, izinga lokufakwa lithonywa yizici eziningana:
Amandla asetshenziswa emthonjeni wokuhwamuka noma wokuchitha amanzi
Ingcindezi yegumbi
Ibanga phakathi kwe-substrate nomthombo wokufaka
Ngokulungisa kahle la mapharamitha, abakhiqizi bangagcina amazinga okukhula kwefilimu ahambisanayo futhi alawulekayo.
2. Isikhathi Sokufaka Imali
Uma sicabanga ukuthi izinga lokufakwa elizinzile, ukujiya kwefilimu kuhambisana nesikhathi sokufakwa. Ngokubeka ngokunembile ubude benqubo, ukujiya okuqondiwe kungafinyelelwa. Kodwa-ke, phakathi nemijikelezo emide yokufakwa, ukuguquguquka kwesilinganiso ngenxa yokuwohloka komthombo noma ukukhukhuleka kwenqubo kumele kulawulwe ukuze kugwenywe ukufakwa okungafani noma okweqile.
3. Ijiyometri Yomthombo Ovela Ku-Substrate
Ukuma okuhlobene kanye ne-engeli phakathi komthombo kanye ne-substrate kuthinta kakhulu ukufana kokubekwa kanye nobukhulu befilimu yendawo. Uma isondelene kakhulu, ifilimu ingaba nkulu kakhulu; ikude kakhulu, futhi kungabangela ukubekwa okunganele noma ukumbozwa okubi. Ukwenza ngcono i-geometry yomthombo nokusebenzisa ukujikeleza kwe-substrate noma ukunyakaza kwamaplanethi kungathuthukisa ukufana kwefilimu.
Cha.2 Amasu Avamile Okuqapha Nokulawula Ubukhulu
1. Ukuqapha Okubonakalayo
Ukuqapha okubonakalayo kuyindlela esetshenziswa kabanzi, ikakhulukazi ekumbozweni okubonakalayo okunembile. Ngokusekelwe ekuphazamisekeni okubonakalayo, kulandelela izinguquko ekukhanyeni noma ekudluliseleni kuma-wavelength athile ngesikhathi sangempela. Uhlelo lungalungisa ngokuguquguqukayo amapharamitha okubeka ukuze kufezwe ukujiya okufiselekayo ngokunemba okuphezulu. Kulungele ukumbozwa okulwa nokukhanya, izibuko ze-dielectric, kanye nezihlungi.
2. I-Quartz Crystal Microbalance (QCM)
Le ndlela isebenzisa inzwa yekristalu ye-quartz ukuqapha ushintsho lwesisindo ngokushintsha kwemvamisa, okuvumela ukubalwa kwesikhathi sangempela kobukhulu obubekiwe. Ama-QCM avame ukuhlanganiswa ezinhlelweni zokuhwamuka kokushisa kanye nezinhlelo zokuhwamuka kwe-e-beam, okunikeza ukuzwela okuphezulu nokulawula.
3. Ukuhwamuka Okulawulwa Ngamanje
Ekuhwamukeni kwezinsimbi ngokushisa, ukulungisa ugesi kuya kwento yokushisa evimbelayo kuthinta ngqo izinga lokuhwamuka. Le ndlela ilula futhi ingabizi kodwa idinga ukunikezwa kwamandla okuzinzile kanye nokulinganiswa ukuze kugcinwe ukunemba kokufakwa.
4. Ukulawula Izinga Lokushisa Elingaphansi Kwe-Substrate
Izinga lokushisa le-substrate lithinta ukuhamba kwe-adatom, ukuminyana kwefilimu, kanye nesakhiwo esincane. Ukulawula ukushisa kwe-substrate ngesikhathi sokufakwa kungathuthukisa ukunamathela kwefilimu kanye nokufana. Ezinhlelweni ezifana nokupakishwa kwe-semiconductor noma ukumbozwa okuqinile, ukulawula izinga lokushisa kubalulekile ukuze kube nokujiya nokusebenza okuhambisanayo.
Izici Eziyinhloko Ezithinta Ukunemba Kokujiya
1. Izakhiwo Zezinto
Izinto ezahlukene zibonisa izici zokuhwamuka ezihlukene kanye nama-coefficient okunamathela. Izinsimbi ezifana ne-aluminium noma isiliva ziyahwamuka kalula, kuyilapho i-ceramics noma ama-alloy (isb., i-SiO₂, i-TiN) zidinga amazinga okushisa aphezulu noma imimoya esabelayo. Amapharamitha enqubo kumele alungiselelwe ukuziphatha komzimba nokushisa kwezinto ukuze kulawulwe ukujiya okuphumelelayo.
2. Ukucindezeleka Kwegumbi Nokwakheka Kwegesi
Ingcindezi yokusebenza ngaphakathi kwegumbi idlala indima ebalulekile. Ingcindezi ephezulu ikhulisa ukusabalala futhi inciphise izinga lokufakwa; ingcindezi ephansi ingase iphazamise i-plasma noma inciphise amazinga okusabela ekuqhumeni okusabelayo. Ukugcina ukugeleza kwegesi okuzinzile (isb., Ar, O₂, N₂) kubalulekile ekuzinzeni kwenqubo.
3. Isimo Somphezulu We-Substrate
Ukungcola kwendawo, ama-oxide, noma ubulukhuni ku-substrate kungathinta ukunamathela kwefilimu futhi kuholele ekujiyeni okungalingani. Amasu okulungisa indawo njengokuhlanza i-solvent ultrasonic, ukuhlanza i-plasma, noma ukuqhuma kwe-ion kuyasetshenziswa ukuqinisekisa ukuthi indawo engaphansi komhlaba ihlanzekile futhi iyafana.
Isiphetho
Ukulawulwa okunembile kobukhulu befilimu kubalulekile ekufinyeleleni izembozo ze-vacuum ezisebenza kahle kakhulu nezikhiqiza kakhulu. Ngokulawulwa okunembile kwesilinganiso sokufakwa, isikhathi, i-geometry yomthombo, kanye nobuchwepheshe bokuqapha ngesikhathi sangempela, abakhiqizi bangahlangabezana nezincazelo zefilimu eziqinile. Njengoba isidingo samafilimu amancane esikali se-nanometer siqhubeka nokukhula kuma-optics, ama-microelectronics, kanye nezembozo ezisebenzayo, amasu okulawula ubukhulu obuthuthukisiwe azodlala indima ebalulekile ekusungulweni okusha kanye nokuncintisana.
—Lesi sihloko sishicilelwe ngu imishini yokumboza nge-vacuumumenzi we-Zhenhua Vacuum
Isikhathi sokuthunyelwe: Julayi-12-2025