Hauv kev tsim khoom niaj hnub no, cov txheej txheem nqus tsev siv dav dav hauv ntau qhov chaw xws li khoom siv hluav taws xob, kho qhov muag, tsheb, thiab aerospace. Ib qho tseem ceeb tshaj plaws hauv kev ua kom cov txheej txheem ua haujlwm yog kev tswj qhov tuab ntawm zaj duab xis, uas cuam tshuam ncaj qha rau kev ua hluav taws xob, kev coj tus cwj pwm kho qhov muag, kev tiv thaiv xeb, thiab lwm yam khoom siv ntawm zaj duab xis. Yog li ntawd, kev tswj qhov tuab ntawm zaj duab xis tau dhau los ua qhov tseem ceeb hauv kev tsim kho qhov nqus tsev. Tsab xov xwm no piav qhia txog cov ntsiab cai, cov txheej txheem siv, thiab cov yam ntxwv cuam tshuam rau kev tswj qhov tuab kom raug, muab kev nkag siab rau kev ua kom zoo dua ntawm kev tsim cov zaj duab xis nyias.
No.1 Cov Kev Ntsuas Tseem Ceeb hauvKev Tswj Xyuas Qhov Thickness ntawm Zaj Duab Xis
1. Tus Nqi Tso Tawm
Zaj duab xis tuab yog nyob ntawm qhov nqi tso tawm, txhais tias yog qhov tuab ntawm zaj duab xis tso rau ib lub sijhawm ntawm qhov chaw substrate. Hauv cov txheej txheem nqus tsev, qhov nqi tso tawm yog cuam tshuam los ntawm ntau yam:
Lub zog siv rau qhov chaw evaporation lossis sputtering
Lub siab ntawm chav tsev
Qhov deb ntawm lub substrate thiab qhov chaw tso dej
Los ntawm kev kho cov kev ntsuas no kom zoo, cov chaw tsim khoom tuaj yeem tswj tau qhov kev loj hlob ntawm cov yeeb yaj kiab uas ruaj khov thiab tswj tau.
2. Lub Sijhawm Tso Khoom
Yog tias muaj qhov nrawm ntawm kev tso dej ruaj khov, qhov tuab ntawm zaj duab xis yog sib npaug rau lub sijhawm tso dej. Los ntawm kev teeb tsa lub sijhawm ua haujlwm kom raug, qhov tuab ntawm lub hom phiaj tuaj yeem ua tiav. Txawm li cas los xij, thaum lub sijhawm tso dej ntev, kev hloov pauv ntawm qhov nrawm vim qhov chaw puas tsuaj lossis kev hloov pauv ntawm cov txheej txheem yuav tsum tau tswj hwm kom tsis txhob muaj kev tso dej tsis sib xws lossis ntau dhau.
3. Geometry ntawm qhov chaw mus rau cov khoom siv
Qhov chaw thiab lub kaum sab xis ntawm qhov chaw thiab lub substrate cuam tshuam rau qhov sib npaug ntawm cov khoom tso tawm thiab qhov tuab ntawm zaj duab xis hauv zos. Yog tias ze dhau, zaj duab xis yuav tuab dhau; deb dhau, thiab nws yuav ua rau cov khoom tso tawm tsis txaus lossis tsis npog zoo. Kev ua kom zoo dua qhov geometry ntawm qhov chaw thiab siv cov substrate rotation lossis planetary motion tuaj yeem txhim kho cov zaj duab xis sib npaug.
No.2 Cov Txheej Txheem Siv Rau Kev Saib Xyuas Thiab Tswj Qhov Thickness
1. Kev Saib Xyuas Qhov Muag
Kev saib xyuas qhov muag yog ib txoj kev siv dav dav, tshwj xeeb tshaj yog rau cov txheej txheem kho qhov muag kom raug. Raws li kev cuam tshuam ntawm qhov muag, nws taug qab cov kev hloov pauv ntawm kev cuam tshuam lossis kev xa tawm ntawm cov wavelengths tshwj xeeb hauv lub sijhawm tiag tiag. Lub kaw lus tuaj yeem hloov kho cov kev teeb tsa kom ua tiav qhov tuab xav tau nrog kev raug siab. Zoo tagnrho rau cov txheej txheem tiv thaiv kev cuam tshuam, cov iav dielectric, thiab cov lim dej.
2. Quartz Crystal Microbalance (QCM)
Cov txheej txheem no siv lub ntsuas siv lead ua los ntawm quartz los saib xyuas qhov hloov pauv ntawm qhov hnyav los ntawm kev hloov pauv zaus, uas tso cai rau kev suav cov tuab uas tau tso rau hauv lub sijhawm tiag tiag. QCMs feem ntau yog sib xyaw ua ke rau hauv cov txheej txheem thermal evaporation thiab e-beam evaporation, muab kev nkag siab zoo thiab kev tswj hwm.
3. Kev Ua Kom Qhuav Uas Tswj Tau Tam Sim No
Hauv kev ua kom cov hlau yaj thaum tshav kub, kev kho qhov tam sim no rau lub tshuab cua sov resistive cuam tshuam ncaj qha rau qhov ceev ntawm kev yaj. Txoj kev no yooj yim thiab tsim nyog tus nqi tab sis xav tau lub zog ruaj khov thiab kev kho kom raug kom tswj tau qhov tseeb ntawm kev tso dej.
4. Kev Tswj Kub ntawm Cov Khoom Siv
Qhov kub ntawm cov substrate cuam tshuam rau kev txav mus los ntawm adatom, qhov ceev ntawm zaj duab xis, thiab microstructure. Kev tswj cov cua sov ntawm cov substrate thaum lub sijhawm tso tawm tuaj yeem txhim kho kev sib txuas ntawm zaj duab xis thiab kev sib xws. Hauv cov ntawv thov xws li kev ntim khoom semiconductor lossis cov txheej txheem tawv, kev tswj qhov kub yog qhov tseem ceeb rau kev sib xws ntawm cov tuab thiab kev ua tau zoo.
No.3 Cov Yam Tseem Ceeb Uas Cuam Tshuam Rau Qhov Tseeb Ntawm Qhov Thickness
1. Cov Khoom Siv
Cov ntaub ntawv sib txawv muaj cov yam ntxwv ntawm kev ua kom qhuav thiab cov coefficients lo. Cov hlau xws li txhuas lossis nyiaj ua kom qhuav sai, thaum cov khoom siv ceramic lossis alloys (piv txwv li, SiO₂, TiN) xav tau qhov kub siab dua lossis huab cua reactive. Cov txheej txheem txheej txheem yuav tsum tau ua kom haum rau cov khoom siv lub cev thiab thermal tus cwj pwm kom tswj tau qhov tuab.
2. Chav Siab thiab Cov Khoom Siv Roj
Lub siab ua haujlwm hauv lub chamber ua lub luag haujlwm tseem ceeb. Lub siab siab ua rau muaj kev tawg thiab txo qhov nrawm ntawm kev tso tawm; lub siab qis tuaj yeem ua rau lub plasma tsis ruaj khov lossis txo qhov nrawm ntawm kev ua haujlwm hauv kev sib xyaw ua ke. Kev tswj hwm cov roj ntws ruaj khov (piv txwv li, Ar, O₂, N₂) yog qhov tseem ceeb rau kev ruaj khov ntawm cov txheej txheem.
3. Qhov Xwm Txheej Ntawm Qhov Chaw
Kev ua qias tuaj ntawm qhov chaw, cov oxides, lossis qhov roughness ntawm lub substrate tuaj yeem cuam tshuam rau qhov lo ntawm zaj duab xis thiab ua rau cov tuab tsis sib npaug. Cov txheej txheem npaj qhov chaw xws li kev ntxuav ultrasonic ntawm cov kuab tshuaj, kev ntxuav plasma, lossis kev siv ion bombardment los xyuas kom meej tias qhov chaw substrate huv thiab sib npaug.
Xaus lus
Kev tswj qhov tuab ntawm zaj duab xis kom raug yog qhov tseem ceeb rau kev ua tiav cov txheej txheem nqus tsev ua haujlwm tau zoo thiab muaj txiaj ntsig zoo. Los ntawm kev tswj hwm qhov nrawm ntawm kev tso cov khoom, lub sijhawm, qhov chaw geometry, thiab cov thev naus laus zis saib xyuas lub sijhawm tiag tiag, cov tuam txhab tsim khoom tuaj yeem ua tau raws li cov lus qhia ntawm zaj duab xis uas nruj dua. Raws li qhov kev thov rau cov zaj duab xis nyias nyias nanometer txuas ntxiv loj hlob hauv optics, microelectronics, thiab cov txheej txheem ua haujlwm, cov txheej txheem tswj qhov tuab siab heev yuav ua lub luag haujlwm tseem ceeb hauv kev tsim khoom tshiab thiab kev sib tw.
— Tsab xov xwm no tau luam tawm los ntawm cov khoom siv nqus tsev txheejChaw tsim khoom Zhenhua Lub Tshuab Nqus Tsev
Lub sijhawm tshaj tawm: Lub Xya Hli-12-2025