Kwimveliso yanamhlanje, iteknoloji yokugquma nge-vacuum isetyenziswa kakhulu kumacandelo afana ne-elektroniki, i-optics, iimoto, kunye ne-aerospace. Enye yezona zinto zibalulekileyo ekuqinisekiseni ukusebenza kokugquma kukulawula ngokuchanekileyo ubukhulu befilimu, okuchaphazela ngokuthe ngqo ukuhanjiswa kombane, ukuziphatha kwe-optical, ukumelana nokugqwala, kunye nezinye iipropati zokusebenza kwefilimu. Ngenxa yoko, ukulawulwa kobukhulu befilimu kuye kwaba yinto ephambili kubunjineli bokubeka i-vacuum. Eli nqaku lichaza imigaqo, iindlela eziqhelekileyo, kunye nezinto ezichaphazela ulawulo oluchanekileyo lobukhulu, linika ulwazi lokuphucula imveliso yefilimu encinci.
Iiparameter eziphambili zeNombolo 1 kwiUlawulo loButyebi beFilimu
1. Izinga lokuFakelwa kweMali
Ubukhulu befilimu buxhomekeke kakhulu kwizinga lokufakwa kwezinto, elichazwa njengobukhulu befilimu efakwe ngexesha ngalinye kumphezulu we-substrate. Kwiinkqubo ze-vacuum, izinga lokufakwa kwezinto liphenjelelwa zizinto ezahlukeneyo:
Amandla asetyenziswa kumthombo wokufuma okanye wokutshiza
Uxinzelelo lwegumbi
Umgama phakathi kwesiseko kunye nomthombo wokufaka
Ngokulungisa ezi parameters kakuhle, abavelisi banokugcina amazinga okukhula kwefilimu ehambelanayo nelawulekayo.
2. Ixesha lokufaka imali
Ukuba sicinga ukuba izinga lokufaka lizinzile, ubukhulu befilimu buhambelana ngokuchanekileyo nexesha lokufaka. Ngokumisela ngokuchanekileyo ubude benkqubo, ubukhulu ekujoliswe kubo bungafezekiswa. Nangona kunjalo, ngexesha lemijikelo emide yokubeka, ukutshintshatshintsha kwesantya ngenxa yokuwohloka komthombo okanye ukushukuma kwenkqubo kufuneka kulawulwe ukuze kuthintelwe ukubekwa okungalinganiyo okanye okugqithisileyo.
3. Ijiyometri yomthombo ukuya kwi-substrate
Indawo ebekwe kuyo kunye ne-engile phakathi komthombo kunye ne-substrate ichaphazela kakhulu ukufana kwe-deposition kunye nobukhulu befilimu yendawo. Ukuba ikufutshane kakhulu, ifilimu inokuba nkulu kakhulu; ikude kakhulu, kwaye inokubangela ukuba ingabi nkulu kakhulu okanye igqunywe kakubi. Ukuphucula i-geometry yomthombo kunye nokusebenzisa ukujikeleza kwe-substrate okanye intshukumo yeplanethi kunokuphucula ukufana kwefilimu.
Hayi.2 Iindlela Eziqhelekileyo Zokujonga Nokulawula Ubukhulu
1. Ukubeka iliso ngokubonakalayo
Ukubeka iliso kwi-optical yindlela esetyenziswa kakhulu, ingakumbi kwiingubo ezichanekileyo ze-optical. Ngokusekelwe kukuphazamiseka kwe-optical, ilandelela utshintsho ekukhanyeni okanye ekudluliseleni kwii-wavelengths ezithile ngexesha langempela. Inkqubo inokulungisa ngokuguquguqukayo iiparameter zokubeka ukuze kufezekiswe ubukhulu obufunekayo ngokuchanekileyo okuphezulu. Ifanelekile kwiingubo ezichasene nokukhanya, izibuko ze-dielectric, kunye nezihluzi.
2. I-Quartz Crystal Microbalance (QCM)
Le ndlela isebenzisa i-quartz crystal sensor ukujonga utshintsho lobunzima ngokusebenzisa i-frequency shift, okuvumela ukubalwa kobukhulu obugciniweyo ngexesha langempela. Ii-QCM zihlala zidityaniswe kwiinkqubo zokufudumala kunye ne-e-beam evaporation, ezibonelela ngobuntununtunu obuphezulu kunye nolawulo.
3. Ukufuma Okulawulwa Ngumsinga
Kwi-thermal evaporation yesinyithi, ukulungisa i-current ukuya kwi-resistive heating element inefuthe ngqo kwi-evaporation rate. Le ndlela ilula kwaye ingabizi kakhulu kodwa ifuna umbane ozinzileyo kunye nokulinganiswa ukuze kugcinwe ukuchaneka kokufakwa.
4. Ulawulo lobushushu be-substrate
Ubushushu be-substrate buchaphazela ukuhamba kwe-adatom, uxinano lwefilimu, kunye ne-microstructure. Ukulawula ukufudumeza kwe-substrate ngexesha lokufakwa kwayo kunokuphucula ukunamathela kwefilimu kunye nokufana kwayo. Kwizicelo ezifana nokupakishwa kwe-semiconductor okanye ii-hard coating, ulawulo lobushushu lubalulekile ukuze kubekho ubukhulu kunye nokusebenza okulinganayo.
Inombolo 3 Izinto Eziphambili Ezichaphazela Ukuchaneka Kokutyeba
1. Iimpawu zezinto ezibonakalayo
Izinto ezahlukeneyo zibonisa iimpawu ezahlukeneyo zokufuma kunye nee-coefficients ezinamathelayo. Iintsimbi ezifana ne-aluminium okanye isilivere ziyanyamalala ngokukhawuleza, ngelixa ii-ceramics okanye ii-alloys (umz., i-SiO₂, i-TiN) zifuna amaqondo obushushu aphezulu okanye i-reactive atmospheres. Iiparamitha zenkqubo kufuneka zilungelelaniswe ngendlela yokuziphatha komzimba kunye nobushushu bezinto ukuze kulawulwe ubukhulu ngempumelelo.
2. Uxinzelelo lweGumbi kunye noBume beGesi
Uxinzelelo olusebenzayo ngaphakathi kwigumbi ludlala indima ebalulekileyo. Uxinzelelo oluphezulu lunyusa ukusasazeka kwaye lunciphisa izinga lokufakwa; uxinzelelo oluphantsi lunokuphazamisa i-plasma okanye lunciphise amazinga okusabela kwi-reactive sputtering. Ukugcina ukuhamba kwegesi okuzinzileyo (umz., u-Ar, u-O₂, u-N₂) kubalulekile ukuze inkqubo izinze.
3. Imeko yoMphezulu weSubstrate
Ungcoliseko lomphezulu, ii-oxides, okanye uburhabaxa kwi-substrate kunokuchaphazela ukunamathela kwefilimu kwaye kubangele ukungalingani kobukhulu. Iindlela zokulungiselela umphezulu ezifana nokucoca i-solvent ultrasonic, ukucoca i-plasma, okanye i-ion bombardment ziyasetyenziswa ukuqinisekisa ukuba umphezulu we-substrate ucocekile kwaye uyafana.
Isiphelo
Ulawulo oluchanekileyo lobukhulu befilimu lubalulekile ekufezekiseni ii-vacuum coats ezisebenza kakuhle nezivelisa isivuno esiphezulu. Ngokusebenzisa ulawulo oluchanekileyo lwesantya sokufakwa, ixesha, i-source geometry, kunye neetekhnoloji zokujonga ixesha langempela, abavelisi banokuhlangabezana neenkcukacha zefilimu ezingqongqo ngakumbi. Njengoko imfuno yeefilimu ezincinci zesikali se-nanometer iqhubeka nokukhula kwi-optics, i-microelectronics, kunye neengubo ezisebenzayo, iindlela zokulawula ubukhulu obuphambili ziya kudlala indima ephambili ekuveliseni izinto ezintsha kunye nokukhuphisana.
—Eli nqaku lipapashwe ngu izixhobo zokugquma nge-vacuumumenzi we-Zhenhua Vacuum
Ixesha leposi: Julayi-12-2025