Inkqubo yokufudumeza izinto eziqinileyo kwindawo ephezulu ye-vacuum ukuze zinyibilike okanye ziphele kwaye zifakwe kwi-substrate ethile ukuze kufunyanwe ifilimu encinci yaziwa ngokuba yi-vacuum evaporation coating (ebizwa ngokuba yi-evaporation coating).
Imbali yokulungiswa kweefilimu ezincinci ngenkqubo yokuphuma komoya nge-vacuum inokulandelwa emva kwiminyaka yoo-1850. Ngo-1857, uM. Farrar waqala ukuzama ukuvala i-vacuum ngokukhupha iingcingo zesinyithi kwi-nitrogen ukuze zenze iifilimu ezincinci. Ngenxa yetekhnoloji ye-vacuum ephantsi ngelo xesha, ukulungiswa kweefilimu ezincinci ngale ndlela kwakuthatha ixesha elininzi kwaye kwakungeyonto isebenzayo. Ukuza kuthi ga ngo-1930 ipompo yokusasazwa kweoyile yasekwa inkqubo yokumpompa ipompo yomatshini, itekhnoloji ye-vacuum inokuphuhliswa ngokukhawuleza, kodwa yenza ukuba ukuvala i-evaporation kunye ne-sputtering kube yitekhnoloji esebenzayo.
Nangona ukufuthwa kwe-vacuum evaporation yiteknoloji yakudala yokubeka ifilimu encinci, kodwa yindawo yelebhu kunye neyemizi-mveliso esetyenziswa kakhulu kwindlela eqhelekileyo. Iingenelo zayo eziphambili kukusebenza okulula, ulawulo olulula lweeparamitha zokubeka kunye nobunyulu obuphezulu beefilimu ezivelayo. Inkqubo yokugquma i-vacuum inokwahlulwahlulwa ibe ngamanyathelo amathathu alandelayo.
1) izinto ezisisiseko ziyafudunyezwa kwaye zinyibilike ukuze ziphele okanye zincibilike; 2) umphunga ususwa kwizinto ezisisiseko ukuze ziphele okanye zincibilike.
2) Umphunga udluliselwa ukusuka kwizinto ezisisiseko ukuya kwisiseko.
3) Umphunga uyajiya phezu komphezulu we-substrate ukuze wenze ifilimu eqinileyo.
Ukufuma kwe-vacuum yeefilimu ezincinci, ngokubanzi ziifilimu ze-polycrystalline okanye ifilimu engenasimo, ifilimu ukuya ekukhuleni kwesiqithi iyona nto iphambili, ngokusebenzisa i-nucleation kunye ne-film iinkqubo ezimbini. Ii-athomu eziphumayo (okanye iimolekyuli) zingqubana ne-substrate, inxalenye yokuncamathelisa okusisigxina kwi-substrate, inxalenye ye-adsorption ize iphume kwi-substrate, kwaye inxalenye yokubonakalisa ngqo ngasemva ukusuka kumphezulu we-substrate. Ukunamathela kumphezulu we-substrate wee-athomu (okanye iimolekyuli) ngenxa yokuhamba kobushushu kunokuhamba phezu komphezulu, njengokuchukumisa ezinye ii-athomu kuya kuqokelelana zibe zii-clusters. Ii-clusters zinokwenzeka kakhulu apho uxinzelelo kumphezulu we-substrate luphezulu, okanye kumanyathelo okusombulula i-substrate yekristale, kuba oku kunciphisa amandla asimahla ee-athomu ezifakweyo. Le yinkqubo ye-nucleation. Ukufakwa ngakumbi kwee-athomu (iimolekyuli) kubangela ukwanda kwe-clusters ezimile okwesiqithi (i-nuclei) ezikhankanyiweyo apha ngasentla de zandiswe zibe yifilimu eqhubekayo. Ke ngoko, ulwakhiwo kunye neempawu zeefilimu ze-polycrystalline eziphumayo ze-vacuum zinxulumene kakhulu nesantya sokufuma kunye nobushushu be-substrate. Ngokubanzi, xa ubushushu be-substrate buphantsi, kokukhona izinga lokuphuma kwamanzi liphezulu, kokukhona i-film grain incipha kwaye ixinene.
–Eli nqaku likhutshwe nguumenzi womatshini wokugquma nge-vacuumGuangdong Zhenhua
Ixesha leposi: Matshi-23-2024