Inkqubo yokufudumeza imathiriyeli eyomeleleyo kwindawo efunxayo ephezulu ukuze i-sublimate okanye ibe ngumphunga kwaye ifakwe kwi-substrate ethile ukufumana ifilimu ebhityileyo eyaziwa ngokuba yi-vacuum evaporation coating (ebizwa ngokuba yi-evaporation coating).
Imbali yokulungiswa kweefilimu ezibhityileyo ngenkqubo yokufunxa ivacuum inokulandelwa emva phaya kwiminyaka yoo-1850. Ngo-1857, uM. Farrar waqala umzamo wokugquma i-vacuum ngokukhupha iingcingo zetsimbi kwinitrogen ukuze zenze iifilimu ezibhityileyo. Ngenxa yetekhnoloji ye-vacuum ephantsi ngelo xesha, ukulungiswa kweefilimu ezibhityileyo ngale ndlela kwakuthatha ixesha elininzi kwaye kungenzeki. Kude kube ngo-1930 ipompo yokusasazwa kweoyile, inkqubo yokumpompa edibeneyo yempompo yasekwa, itekhnoloji yokucoca inokukhula ngokukhawuleza, kuphela ukwenza ukuba umphunga kunye ne-sputtering coating ibe yitekhnoloji esebenzayo.
Nangona i-vacuum evaporation iyitekhnoloji yakudala ecekethekileyo yokubeka ifilim, kodwa yindawo elebhu kunye nemizi-mveliso esetyenziswa kweyona ndlela ixhaphakileyo. Iinzuzo zayo eziphambili kukusebenza okulula, ukulawula okulula kweeparamitha zokubeka kunye nokucoceka okuphezulu kweefilimu ezibangelwayo. Inkqubo yokwambathisa ivacuum inokwahlulwa ibe ngamanyathelo amathathu alandelayo.
1) umthombo wemithombo uyafudumala kwaye unyibilike ukuze uphume okanye u-sublimate; 2) umphunga uyasuswa kwisixhobo somthombo ukuze uphuphe okanye u-sublimate.
2) Umphunga ukhutshelwa ukusuka kwisixhobo somthombo ukuya kwi-substrate.
3) Umphunga ujiya kwi-substrate surface ukwenza ifilimu eqinileyo.
Ukukhutshwa komphunga kwiifilimu ezicekethekileyo, ngokubanzi ziyifilimu ye-polycrystalline okanye ifilimu ye-amorphous, ifilimu ukuya kwisiqithi sokukhula kongamele, ngokusebenzisa i-nucleation kunye nefilimu iinkqubo ezimbini. Ii-athomu ezikhutshwa ngumphunga (okanye iimolekyuli) zingqubana ne-substrate, inxalenye yoqhotyoshelwano olusisigxina kwi-substrate, inxalenye ye-adsorption emva koko ikhuphe i-substrate, kunye nenxalenye yokubonisa ngokuthe ngqo umva ukusuka kwi-substrate surface. Ukubambelela kwi-substrate surface yee-athomu (okanye iiathomu) ngenxa yentshukumo ye-thermal inokuhamba phezu komhlaba, njengokuchukumisa ezinye ii-athomu ziya kuqokelelana zibe ngamaqela. Amaqela anokwenzeka ukuba ayenzeka apho uxinzelelo kwi-substrate surface luphezulu, okanye kumanyathelo okusombulula i-crystal substrate, kuba oku kunciphisa amandla amahhala e-athomu ezibhengezo. Le yinkqubo ye-nucleation. Ukubekwa ngakumbi kwee-athomu (iimolekyuli) kubangela ukwandiswa kwamaqoqo amile okwesiqithi (nuclei) akhankanywe ngasentla ade anwenwe abe yifilimu eqhubekayo. Ke ngoko, ubume kunye neepropathi ze-vacuum evaporated iifilimu ze-polycrystalline zihambelana ngokusondeleyo nezinga lokunyuka komphunga kunye nobushushu be-substrate. Xa sithetha ngokubanzi, okukhona usezantsi ubushushu besubstrate, kokukhona unyuka umyinge wokuphuphuma komphunga, kokukhona ucotha kwaye uxinene kweenkozo zefilimu.
–Eli nqaku likhutshwa nguumenzi womatshini wokugqumaGuangdong Zhenhua
Ixesha lokuposa: Mar-23-2024