Maitirwo ekudziisa zvinhu zvakasimba munzvimbo yakakwira vacuum kuti zvinyunguduke kana kunyunguduka nekuzviisa pane imwe substrate kuti uwane firimu rakatetepa rinozivikanwa sevacuum evaporation coating (inonzi evaporation coating).
Nhoroondo yekugadzirira kwemafirimu matete nevacuum evaporation process inogona kurondwa kumashure kuma1850's. Muna 1857, M. Farrar akatanga kuedza kwevacuum coating kuburikidza nekuputira waya dzesimbi munitrogen kuti dzigadzire mafirimu matete. Nekuda kweiyo yakaderera vacuum tekinoroji panguva iyoyo, kugadzirira kwemafirimu matete nenzira iyi kwaitora nguva uye kusingaite. Kusvika 1930 oiri diffusion pombi mechanical pombi yejoint pumping system yakagadzwa, vacuum tekinoroji inogona kukurumidza kusimudzira, kungoita evaporation uye sputtering coating kuve tekinoroji inoshanda.
Kunyangwe vacuum evaporation ndeyekare yakatetepa firimu deposition tekinoroji, asi ndiyo marabhoritari nenzvimbo dzemaindasitiri dzinoshandiswa nenzira yakajairika. Mabhenefiti ayo makuru ndeye nyore kushanda, nyore kudzora kwekuisa paramita uye kuchena kwepamusoro kwemafirimu anoguma. Iyo vacuum coating process inogona kukamurwa kuita matanho matatu anotevera.
1) iyo sosi yemidziyo inopisa uye yakanyungudutswa kuti ibude kana kuti sublimate; 2) mhute inobviswa kubva kune iyo sosi zvinhu kuti inyunguduke kana kuti sublimate.
2) Vapor inotamiswa kubva kune sosi zvinhu kuenda kune substrate.
3) Iyo mhute inodonhedza pane substrate pamusoro kuti iite yakasimba firimu.
Vacuum evaporation yemafirimu matete, anowanzo ari polycrystalline firimu kana amorphous firimu, firimu kusvika kuchitsuwa kukura kuri kutonga, kuburikidza ne nucleation uye firimu maitiro maviri. Evaporated maatomu (kana mamorekuru) anodhumhana neiyo substrate, chikamu chechigarire chinonamirwa kune substrate, chikamu cheiyo adsorption uye yobva yabuda kubva pasubstrate, uye chikamu chekutarisisa kwakananga kumashure kubva kune substrate pamusoro. Kunamatira kune substrate pamusoro pemaatomu (kana mamorekuru) nekuda kwekufamba kwekupisa kunogona kufamba nepamusoro, sekubata mamwe maatomu anoungana kuita masumbu. Masumbu anonyanya kuitika apo kushushikana kuri pamusoro pe substrate kwakakwira, kana pamatanho ekugadziriswa kwekristaro substrate, nekuti izvi zvinoderedza simba remahara remaatomu adsorbed. Iyi ndiyo nucleation process. Kumwezve kuiswa kwemaatomu (mamorekuru) kunoguma nekuwedzera kwemasumbu akaita sechitsuwa (nuclei) ataurwa pamusoro kusvika awedzerwa kuita firimu rinoenderera. Naizvozvo, chimiro uye zvimiro zvevacuum evaporated polycrystalline mafirimu ane hukama zvakanyanya neiyo evaporation rate uye substrate tembiricha. Kazhinji, kudzikisira tembiricha yepasi, kunowedzera kunyungudika kwemhepo, kunowedzera uye kuomesa tsanga yefirimu.
-Chinyorwa ichi chakaburitswa navacuum coating machine mugadziriGuangdong Zhenhua
Nguva yekutumira: Mar-23-2024