Igikorwa cyo gushyushya ibikoresho bikomeye ahantu hahanamye cyane kugirango habeho kugabanuka cyangwa guhumeka no kubishyira kuri substrate yihariye kugirango ubone firime yoroheje izwi kwizina rya vacuum evaporation coating (bita coating evaporation).
Amateka yo gutegura firime yoroheje na vacuum evaporation inzira irashobora guhera mu myaka ya 1850. Mu 1857, M. Farrar yatangiye kugerageza gutwikira vacuum ihinduranya insinga z'icyuma muri azote kugirango zikore firime zoroshye. Bitewe nubuhanga buke bwa vacuum muri kiriya gihe, gutegura firime yoroheje murubu buryo byatwaraga igihe kinini kandi ntabwo byari bifatika. Kugeza mu 1930, gukwirakwiza amavuta ya pompe ya pompe ya pompe ihuriweho na pompe yashizweho, tekinoroji ya vacuum irashobora kwihuta mu iterambere, gusa bigatuma impumuro hamwe no gusohora ibintu bihinduka ikoranabuhanga rifatika.
Nubwo vacuum evaporation ari tekinoroji ya kera ya tekinoroji yo kubika, ariko ni laboratoire ninganda zikoreshwa muburyo busanzwe. Ibyiza byingenzi byingenzi nibikorwa byoroshye, kugenzura byoroshye ibipimo byo kubika hamwe nubuziranenge bwinshi bwa firime zavuyemo. Inzira ya vacuum irashobora kugabanywamo intambwe eshatu zikurikira.
1) ibikoresho nkomoko birashyuha kandi bigashonga kugirango bivemo cyangwa byoroshye; 2) imyuka ikurwa mubikoresho byaturutse kugirango bivemo cyangwa byoroshye.
2) Umwuka wimurwa uva mubikoresho biva muri substrate.
3) Imyuka yegeranye hejuru yubutaka kugirango ikore firime ikomeye.
Imyuka ya Vacuum ya firime yoroheje, mubisanzwe ni firime polycrystalline cyangwa firime ya amorphous, firime ikura ryizinga iriganje, binyuze muri nucleation na firime inzira ebyiri. Impumuro za atome (cyangwa molekile) zigongana na substrate, igice cyumugereka uhoraho kuri substrate, igice cya adsorption hanyuma kigahumuka kiva munsi yubutaka, ikindi gice cyo kugaragarira amaso inyuma kiva hejuru yubutaka. Kwizirika hejuru yubutaka bwa atome (cyangwa molekile) bitewe nubushyuhe bwumuriro burashobora kugenda hejuru yubuso, nko gukoraho andi atome bizirundanyiriza hamwe. Ihuriro rishobora kugaragara cyane aho guhangayikishwa hejuru yubutaka buri hejuru, cyangwa ku ntambwe zo gukiza za kristu ya substrate, kuko ibi bigabanya ingufu zubusa za atome zamamaza. Ubu ni inzira ya nucleation. Ubundi gushira kwa atome (molekile) bituma habaho kwaguka kwamatsinda yibirwa (nuclei) yavuzwe haruguru kugeza igihe byongerewe muri firime ikomeza. Kubwibyo, imiterere nimiterere ya firime vacuum ihumeka polycrystalline ifitanye isano rya bugufi nigipimo cyuka nubushyuhe bwa substrate. Muri rusange, uko ubushyuhe bwa substrate bugabanuka, niko igipimo cyo guhumeka, niko ingano ya firime nziza.
–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua
Igihe cyo kohereza: Werurwe-23-2024

