Te whakatakotoranga kohu matū whakarei ake i te toto

Ngā āhuatanga o te toto
Ko te āhua o te plasma i roto i te whakatakotoranga kohu matū whakarei ake i te plasma, ko tōna whakawhirinaki ki te kaha nekeneke o ngā irahiko i roto i te plasma hei whakahohe i ngā tauhohenga matū i roto i te wāhanga hau. Nā te mea he kohinga o ngā katote, ngā irahiko, ngā ngota kūpapa me ngā ngota ngota te plasma, he kūpapa hiko i te taumata makaro. I roto i te plasma, he nui te kaha e rongoatia ana i roto i te kaha ā-roto o te plasma. I te tīmatanga, ka wehea te plasma ki te plasma wera me te plasma matao. I roto i te pūnaha PECVD, he plasma matao e hangaia ana e te tukunga hau pēhanga iti. Ko tēnei plasma i hangaia e te tukunga pehanga iti i raro i te rau Pa, he plasma hau kore-taurite.
Ko te āhua o tēnei plasma e whai ake nei:
(1)Ka nui ake te nekehanga wera koretake o ngā irahiko me ngā katote i tā rātou nekehanga kua tohua.
(2) Ko te nuinga o te wā ka puta tōna tukanga ionization nā te tukinga o ngā irahiko tere ki ngā ngota hau.
(3) Ko te kaha nekehanga wera toharite o ngā irahiko he 1 ki te 2 ngā raupapa teitei ake i tō ngā matūriki taumaha, pērā i ngā ngota, ngā ngota, ngā katote me ngā rauropi kore utu.
(4) Ka taea te whakaea te ngaronga pūngao i muri i te tukinga o ngā irahiko me ngā matūriki taumaha mai i te papa hiko i waenganui i ngā tukinga.
He uaua ki te whakaahua i tētahi plasma kore-taurite pāmahana-iti me te iti o ngā tawhā, nā te mea he plasma kore-taurite pāmahana-iti i roto i tētahi pūnaha PECVD, kāore te pāmahana irahiko Te i rite ki te pāmahana Tj o ngā matūriki taumaha. I roto i te hangarau PECVD, ko te mahi matua o te plasma he whakaputa i ngā katote hohe matū me ngā irahiko kore utu. Ka tauhohe ēnei katote me ngā irahiko kore utu ki ētahi atu katote, ngota me ngā ngota i roto i te wāhanga hau, ka puta rānei he kino whatunga me ngā tauhohenga matū ki runga i te mata o te papa, ā, ko te hua o te rauemi hohe he mahi a te kiato irahiko, te kukū o te matū hohe me te tauwehenga hua. Arā, ko te hua o te rauemi hohe e whakawhirinaki ana ki te kaha o te mara hiko, te pēhanga hau, me te whānuitanga kore utu toharite o ngā matūriki i te wā o te tukinga. I te mea ka wehea te hau matū hohe i roto i te plasma nā te tukinga o ngā irahiko kaha-teitei, ka taea te wikitoria i te arai whakahohenga o te tauhohenga matū, ā, ka taea te whakaiti i te pāmahana o te hau matū hohe. Ko te rerekētanga matua i waenga i te PECVD me te CVD tikanga ko te rerekētanga o ngā mātāpono thermodynamic o te tauhohenga matū. Kāore te wehenga o ngā ngota hau i roto i te plasma e whiriwhiria, nō reira he tino rerekē te paparanga kiriata i whakatakotoria e te PECVD i te CVD tuku iho. Tērā pea he ahurei te hanganga āhua i hangaia e te PECVD, ā, kāore tōna hanganga e herea ana e te nekenekehanga taurite. Ko te paparanga kiriata tino noa ko te āhua kore-āhua.

Ngā āhuatanga o te PECVD
(1) Te pāmahana whakatakotoranga iti.
(2) Whakaitihia te ahotea ā-roto i puta mai i te kore taurite o te tauwehenga whānui raina o te kiriuhi/rauemi turanga.
(3) He tino teitei te tere o te whakatakoto, inā koa te whakatakoto i te pāmahana iti, he mea pai mō te whiwhi kiriata kore-āhua me te kiriata moroiti.

Nā te tukanga pāmahana iti o te PECVD, ka taea te whakaiti i te kino o te wera, ka taea te whakaiti i te horapa me te tauhohenga i waenga i te paparanga kiriata me te rauemi papa, me ētahi atu, kia taea ai te pani i ngā wāhanga hiko i mua i te hanganga, i te hiahia rānei kia mahi anō. Mō te hanga i ngā ara iahiko whakauru tauine-rahi (VLSI, ULSI), kua angitu te whakamahi i te hangarau PECVD ki te hanganga o te kiriata silicon nitride (SiN) hei kiriata tiaki whakamutunga i muri i te hanganga o te waea hiko Al, me te whakapara me te hanganga o te kiriata silicon oxide hei whakamarumaru i waenga i ngā papa. Hei taputapu kiriata angiangi, kua angitu hoki te whakamahi i te hangarau PECVD ki te hanga i ngā transistors kiriata angiangi (TFT) mō ngā whakaaturanga LCD, me ētahi atu, mā te whakamahi i te karāhe hei papa i roto i te tikanga matrix hohe. I te whanaketanga o ngā ara iahiko whakauru ki te tauine nui ake me te whakaurunga teitei ake me te whakamahinga whānui o ngā taputapu semiconductor matū, me mahi te PECVD i ngā tukanga pāmahana iti ake me te kaha hiko teitei ake. Hei whakatutuki i tēnei whakaritenga, me whakawhanake ngā hangarau ka taea te hanga kiriata papatahi teitei ake i ngā pāmahana iti ake. Kua rangahaua whānuitia ngā kiriata SiN me SiOx mā te whakamahi i te plasma ECR me te hangarau hou o te plasma chemical vapor deposition (PCVD) me te plasma helical, ā, kua eke ki tētahi taumata mahi i roto i te whakamahinga o ngā kiriata whakamahana ā-paparanga mō ngā ara iahiko whakauru nui ake, me ētahi atu.