Hangarau paninga taputapu

Kua roa te hangarau tāpae PVD e whakamahia ana hei hangarau whakarerekētanga mata hou, inā koa te hangarau paninga katote korehau, kua tino whanakehia i ngā tau tata nei, ā, kua whānuitia te whakamahinga ināianei mō te tukatuka i ngā taputapu, ngā pokepokea ai, ngā mowhiti piston, ngā taputapu me ētahi atu wāhanga. Ka taea e ngā taputapu paninga i whakaritea mā te hangarau paninga katote korehau te whakaiti i te tauwehenga waku, te whakapai ake i te ātete-kakahu me ētahi ātete-waikura, ā, kua noho hei kaupapa matua me te wāhi wera o te rangahau i roto i te mara o te hangarau whakapakari mata taputapu.

Ko ngā rauemi e whakamahia whānuitia ana mō ngā taputapu ko te maitai whakarewa, te maitai whakarewa, te rino whakarewa, ngā konganuku kore-ferrous (parahi, konumohe) me ngā kirihou. Ko te maitai he maitai 45, 35SiMn, 40Cr, 40CrNi, 40MnB, 38CrMoAl. Ko te maitai waro iti e whakamahia ana i roto i te 20Cr, 20CrMnTi, 20MnB, 20CrMnTo. He whānui ake te whakamahinga o te maitai whakarewa i roto i ngā taputapu nā te mea he pai ake te mahi, ko te maitai whakarewa ia e whakamahia ana hei hanga taputapu he diameter > 400mm me te hanganga uaua. He ātete ki te piri me te ātete ki te poka ngā taputapu rino whakarewa, engari kāore e ātete ki te pānga me te kakahu, ko te nuinga mō te mahi pumau, ehara i te tere iti, i te rahi nui me te āhua uaua rānei, ka taea te mahi i raro i te āhua o te kore hinu, he pai mō te tuku tuwhera. Ko ngā konganuku kore-whakarewa e whakamahia whānuitia ana ko te parahi tine, te parahi konumohe-rino me te koranu konumohe whakarewa, e whakamahia whānuitia ana i roto i te hanga tāwhana, i ngā taputapu rānei, engari he ngoikore ngā āhuatanga reti me te ārai-waku, ā, he pai noa iho mō ngā taputapu mama, taumaha waenga me te tere-iti. Ko ngā taputapu rauemi kore-whakarewa e whakamahia whānuitia ana i roto i ētahi mara me ngā whakaritenga motuhake, pērā i te whakahinuhinu kore-hinu me te pono teitei. Ko te mara o ngā āhuatanga pērā i te iti o te parahanga, pērā i ngā taputapu whare, ngā taputapu hauora, ngā mīhini kai me ngā mīhini kakahu.

Ngā rauemi paninga taputapu

He rauemi tino whai hua ngā rauemi uku hangarau, he kaha me te pakeke, inā koa te ātete wera, te iti o te kawe wera me te whakawhānui wera, te ātete kakahu me te ātete waikura. He maha ngā rangahau kua whakaatu he ātete wera ngā rauemi uku, ā, he iti te kakahu o ngā konganuku. Nō reira, mā te whakamahi i ngā rauemi uku hei utu mō ngā rauemi whakarewa mō ngā wāhanga ātete kakahu ka taea te whakapai ake i te roa o te waku o te sub, ka taea te whakatutuki i ētahi o ngā rauemi ātete pāmahana teitei me te kakahu teitei, maha-mahi me ētahi atu whakaritenga uaua. I tēnei wā, kua whakamahia ngā rauemi uku hangarau i roto i te hanga o ngā wāhanga ātete wera miihini, te tuku miihini i roto i ngā wāhanga kakahu, ngā taputapu matū i roto i ngā wāhanga ātete waikura me ngā wāhanga hiri, e whakaatu ana i te whānui o te tono o ngā rauemi uku.

Ko ngā whenua whakawhanake pēnei i a Tiamana, Hapani, Te Hononga o Amerika, te United Kingdom me ētahi atu whenua e aro nui ana ki te whanaketanga me te whakamahinga o ngā rauemi uku hangarau, e whakangao ana i te nui o te moni me te kaha tangata ki te whakawhanake i te ariā tukatuka me te hangarau o ngā uku hangarau. Kua whakarewahia e Tiamana tētahi kaupapa e kiia nei ko "SFB442", ko tōna kaupapa he whakamahi i te hangarau PVD hei hanga i tētahi kiriata e tika ana ki te mata o ngā wāhanga hei whakakapi i te mea whakahinuhinu kino pea ki te taiao me te tinana tangata. I whakamahia e PW Gold me ētahi atu i Tiamana te pūtea mai i SFB442 hei whakamahi i te hangarau PVD hei whakatakoto i ngā kiriata angiangi ki te mata o ngā peera hurihuri, ā, i kitea kua tino pai ake te mahi ārai-kakahu o ngā peera hurihuri, ā, ka taea e ngā kiriata i whakatakotoria ki te mata te whakakapi katoa i te mahi a ngā tāpiringa ārai-kakahu pēhanga nui. I whakamahia e Joachim, Franz me ētahi atu i Tiamana te hangarau PVD hei whakarite i ngā kiriata WC/C e whakaatu ana i ngā āhuatanga ārai-ngoikore pai rawa atu, he teitei ake i ērā o ngā hinu whakahinuhinu kei roto ngā tāpiringa EP, he hua e puta ai te āheinga ki te whakakapi i ngā tāpiringa kino ki ngā paninga. I whakaatu a E. Lugscheider me ētahi atu o te Institute of Materials Science, Technical University of Aachen, Tiamana, me te pūtea mai i te DFG (GermanResearch Commission), i tētahi pikinga nui o te ātete ngenge i muri i te whakatakoto i ngā kiriata e tika ana ki te maitai 100Cr6 mā te whakamahi i te hangarau PVD. Hei tāpiri, ko te United States Kua tīmata a General Motors ki te whakamahi i te kiriata whakatakotoranga mata taputapu waka momo VolvoS80Turbo hei whakapai ake i te ātete ki te poka ngenge; kua whakarewahia e te kamupene rongonui a Timken te ingoa kiriata mata taputapu ES200; kua puta te tohu hokohoko rehita MAXIT paninga taputapu i Tiamana; kei te wātea hoki ngā tohu hokohoko rehita Graphit-iC me Dymon-iC i te UK.

He mea nui ngā taputapu i roto i te ahumahi hei wāhanga e manawapa ana mō te tuku miihini, nō reira he mea tino nui te ako i te whakamahinga o ngā rauemi uku ki ngā taputapu. I tēnei wā, ko ngā mea matua e whakamahia ana ki ngā taputapu ko ngā uku hangarau.

1, paparanga paninga TiN
1, TiN

Ko te paparanga uku TiN paninga katote tētahi o ngā paninga mata kua whakarerekētia e whakamahia whānuitia ana, he pakeke teitei, he kaha piri teitei, he iti te tauwehenga waku, he pai te ātete ki te waikura, me ētahi atu. Kua whakamahia whānuitia i roto i ngā mara maha, inā koa i roto i te umanga taputapu me te pokepokea ai. Ko te take matua e pā ana ki te tono paninga uku ki ngā taputapu ko te raruraru hononga i waenga i te paninga uku me te papa. Nā te mea he uaua ake ngā āhuatanga mahi me ngā āhuatanga awe o ngā taputapu i ērā o ngā taputapu me ngā pokepokea ai, he tino herea te tono paninga TiN kotahi ki te maimoatanga mata taputapu. Ahakoa he pai ngā painga o te paninga uku ko te pakeke teitei, te iti o te tauwehenga waku me te ātete ki te waikura, he pakarukaru, he uaua ki te whiwhi paninga matotoru ake, nō reira me whai papa pakeke teitei me te kaha teitei hei tautoko i te paninga kia mau ai ōna āhuatanga. Nō reira, ko te paninga uku te nuinga o te wā e whakamahia ana mō te mata maitai waro me te tere-teitei. He ngohengohe te rauemi taputapu ki te rauemi uku, ā, he nui te rerekētanga i waenganui i te āhua o te papa me te paninga, nō reira he ngoikore te huinga o te paninga me te papa, ā, kāore te paninga i te rawaka hei tautoko i te paninga, ka ngāwari te taka o te paninga i te wā e whakamahia ana, ehara i te mea kāore e taea te whakamahi i ngā painga o te paninga uku, engari ko ngā matūriki paninga uku e taka ana ka puta he kakahu pakarukaru ki te taputapu, ka tere ake te ngaronga o te kakahu o te taputapu. Ko te otinga o nāianei ko te whakamahi i te hangarau maimoatanga mata hiato hei whakapai ake i te hononga i waenganui i te uku me te papa. Ko te hangarau maimoatanga mata hiato e pā ana ki te whakakotahitanga o te paninga whakatakotoranga kohu tinana me ētahi atu tukanga maimoatanga mata, paninga rānei, mā te whakamahi i ngā mata/papa o raro e rua hei whakarerekē i te mata o te rauemi papa hei whiwhi i ngā āhuatanga miihini hiato kāore e taea te whakatutuki mā te tukanga maimoatanga mata kotahi. Ko te paninga hiato TiN i whakatakotoria e te nitriding ion me te PVD tētahi o ngā paninga hiato tino rangahauhia. He kaha te hononga o te papa nitriding plasma me te paninga hiato uku TiN, ā, kua tino pai ake te ātete kakahu.

Ko te matotoru tino pai o te paparanga kiriata TiN me te ātete pai ki te kakahu me te here turanga kiriata he tata ki te 3~4μm. Mena he iti iho i te 2μm te matotoru o te paparanga kiriata, kāore e tino pai ake te ātete kakahu. Mena he nui ake i te 5μm te matotoru o te paparanga kiriata, ka heke te here turanga kiriata.

2, Paninga TiN maha-paparanga, maha-wāhanga

I te haere tonu o te whakamahinga o ngā paninga TiN, ā, kua nui haere ngā rangahau mō te whakapai ake me te whakarei ake i ngā paninga TiN. I ngā tau tata nei, kua whakawhanakehia ngā paninga maha-wāhanga me ngā paninga maha-paparanga i runga i ngā paninga TiN rua, pērā i te Ti-CN, Ti-CNB, Ti-Al-N, Ti-BN, (Tix,Cr1-x)N, TiN/Al2O3, me ētahi atu. Mā te tāpiri i ngā huānga pērā i te Al me te Si ki ngā paninga TiN, ka taea te whakapai ake i te ātete ki te waikura pāmahana teitei me te pakeke o ngā paninga, ā, mā te tāpiri i ngā huānga pērā i te B ka taea te whakapai ake i te pakeke me te kaha piri o ngā paninga.

Nā te uaua o te hanganga maha-wāhanga, he maha ngā tautohenga o tēnei rangahau. I roto i te rangahau o ngā paninga maha-wāhanga (Tix,Cr1-x)N, he tautohenga nui kei roto i ngā hua rangahau. E whakapono ana ētahi tāngata ko ngā paninga (Tix,Cr1-x)N he mea hanga ki te TiN, ā, ka taea anake te noho o te Cr i roto i te āhua o te otinga totoka whakakapinga i roto i te TiN dot matrix, engari ehara i te mea he wāhanga CrN motuhake. E whakaatu ana ētahi atu rangahau he iti noa te maha o ngā ngota Cr e whakakapi tika ana i ngā ngota Ti i roto i ngā paninga (Tix,Cr1-x)N, ā, ko te toenga o te Cr kei roto i te āhua takitahi, ka hanga rānei i ngā matūriki me te N. E whakaatu ana ngā hua whakamātautau ko te tāpiri o te Cr ki te paninga ka whakaiti i te rahi o te matūriki mata, ka whakanui ake i te pakeke, ā, ka eke te pakeke o te paninga ki tōna uara teitei rawa atu ina tae te ōrau papatipu o te Cr ki te 3l%, engari ka eke hoki te ahotea o roto o te paninga ki tōna uara teitei rawa atu.

3, Ētahi atu paparanga paninga

Haunga ngā paninga TiN e whakamahia whānuitia ana, he maha atu anō ngā momo uku hangarau e whakamahia ana mō te whakapakari i te mata o ngā taputapu.

(1) I rangahau a Y. Terauchi me ētahi atu o Hapani i te ātete ki te kakahu waku o ngā taputapu uku titanium carbide, titanium nitride rānei i whakatakotoria mā te tikanga whakatakoto kohu. I whakakāparahia ngā taputapu, ā, i whakakanapahia kia eke ki te pakeke o te mata o te HV720 me te taratara o te mata o te 2.4 μm i mua i te paninga, ā, i whakaritea ngā paninga uku mā te whakatakoto kohu matū (CVD) mō te titanium carbide me te whakatakoto kohu tinana (PVD) mō te titanium nitride, me te matotoru o te kiriata uku o te 2 μm. I tirotirohia ngā āhuatanga kakahu waku i te aroaro o te hinu me te waku maroke. I kitea ko te ātete whakapataritari me te ātete rakuraku o te anga taputapu i tino piki ake i muri i te paninga ki te uku.

(2) I whakaritea te paninga hiato o te Ni-P me te TiN kua pania ki te matū mā te paninga i mua i te Ni-P hei paparanga whakawhiti, kātahi ka whakatakotoria te TiN. E whakaatu ana te rangahau kua pai ake te pakeke o te mata o tēnei paninga hiato ki tētahi taumata, ā, kua pai ake te piri o te paninga ki te papa, ā, he pai ake te ātete ki te kakahu.

(3) WC/C, kiriata angiangi B4C
I whakamahia e M. Murakawa me ētahi atu, o te Tari Hangarau Mīhini, te Whare Hangarau o Hapani, te hangarau PVD hei whakatakoto i te kiriata angiangi WC/C ki runga i te mata o ngā taputapu, ā, e toru ngā wā o tōna roanga mahi i ērā o ngā taputapu kua tineihia, kua hurihia hoki i raro i ngā tikanga whakahinuhinu kore-hinu. I whakamahia e Franz J me ētahi atu te hangarau PVD hei whakatakoto i te kiriata angiangi WC/C me te B4C ki runga i te mata o ngā taputapu FEZ-A me FEZ-C, ā, i whakaatuhia e te whakamātautau he tino whakaiti te paninga PVD i te waku o te taputapu, he iti ake te ngawari o te taputapu ki te piri wera, ki te piri rānei, ā, he pai ake te kaha o te taputapu ki te kawe kawenga.

(4) Ngā kiriata CrN
He rite ngā kiriata CrN ki ngā kiriata TiN nā te mea he nui ake te pakeke, ā, he ātete ake ngā kiriata CrN ki te waikura pāmahana teitei i te TiN, he pai ake te ātete ki te waikura, he iti ake te ahotea o roto i ngā kiriata TiN, ā, he pai ake te pakari. I whakaritea e Chen Ling me ētahi atu he kiriata hiato TiAlCrN/CrN ātete-kakahu me te hononga kiriata pai rawa atu i runga i te mata o te HSS, ā, i whakaarohia hoki e ia te ariā tāpae nekehanga o te kiriata paparanga maha, ki te nui te rerekētanga pūngao nekehanga i waenga i ngā paparanga e rua, ka uaua te nekehanga e puta ana i te paparanga kotahi ki te whakawhiti i tōna atanga ki tetahi atu paparanga, ka hangaia te tāpae nekehanga i te atanga, ā, ka whai wāhi ki te whakapakari i te rauemi. I ako a Zhong Bin me ētahi atu i te pānga o te ihirangi hauota ki te hanganga ā-wāhanga me ngā āhuatanga kakahu waku o ngā kiriata CrNx, ā, i whakaatuhia e te rangahau ko te tihi diffraction Cr2N (211) i roto i ngā kiriata ka ngoikore haere, ā, ka piki haere te tihi CrN (220) me te pikinga o te ihirangi N2, ka heke haere ngā matūriki nui i runga i te mata o te kiriata, ā, he papatahi te mata. I te wā i 25 ml/min te hauhautanga o te N2 (ko te iahiko pūtake whāinga ko te 75 A), he pai te kounga o te mata o te kiriata CrN kua whakatakotoria, he pakeke pai, ā, he tino pai te ātete ki te kakahu ina ko te iahiko pūtake whāinga ko te 25ml/min (ko te iahiko pūtake whāinga ko te 75A, ko te pēhanga kino ko te 100V).

(5) Kiriata pakari rawa
Ko te kiriata tino mārō he kiriata totoka he nui ake te pakeke i te 40GPa, he ātete pai ki te kakahu, he ātete pāmahana teitei me te tauwehenga waku iti me te tauwehenga whānui wera iti, ko te nuinga o te kiriata taimana amorphous me te kiriata CN. He āhuatanga amorphous ngā kiriata taimana amorphous, kāore he hanganga raupapa tawhiti, ā, he maha ngā hononga tetrahedral CC kei roto, nō reira ka kiia hoki ko ngā kiriata waro amorphous tetrahedral. Hei momo kiriata waro amorphous, he maha ngā āhuatanga pai o te paninga rite taimana (DLC) e rite ana ki te taimana, pērā i te kawe wera teitei, te pakeke teitei, te modulus elastic teitei, te tauwehenga whānui wera iti, te pumau matū pai, te ātete kakahu pai me te tauwehenga waku iti. Kua whakaatuhia ko te paninga kiriata rite taimana ki runga i ngā mata taputapu ka taea te whakaroa i te roa o te ratonga mā te 6 tauwehenga me te whakapai ake i te ātete ngenge. Ko ngā kiriata CN, e mōhiotia ana ko ngā kiriata waro-hauota amorphous, he hanganga karaihe rite ki te hanganga o ngā matū honohono β-Si3N4 ā, e mōhiotia ana ko te β-C3N4. Liu and Cohen et al. I whakahaerehia ngā tātaitanga ariā pakari mā te whakamahi i ngā tātaitanga roopu pūmanawa-pēnei mai i te mātāpono tuatahi-āhua, i whakaūtia he nui te kaha here o te β-C3N4, he hanganga miihini pumau, he iti rawa te kotahi te āhua pumau, ā, he rite tōna modulus rapa ki te taimana, he pai ngā āhuatanga, ka taea te whakapai ake i te pakeketanga o te mata me te ātete kakahu o te rauemi me te whakaiti i te tauwehenga waku.

(6) Ētahi atu paparanga paninga ātete-mau o te koranu
Kua whakamātauhia hoki ētahi paninga ātete-kakahu koranu kia whakamahia ki ngā taputapu, hei tauira, ko te whakatakoto i te paparanga koranu Ni-P-Co ki runga i te mata niho o ngā taputapu maitai 45# he paparanga koranu hei whiwhi i te whakaritenga kōhatu tino-pai, ka taea te whakaroa i te roanga o te ora ki te 1.144~1.533 ngā wā. Kua rangahauhia hoki ko te paparanga konganuku Cu me te paninga koranu Ni-W ka whakamahia ki runga i te mata niho o te taputapu rino maka koranu Cu-Cr-P hei whakapai ake i tōna kaha; ka whakamahia te paninga koranu Ni-W me Ni-Co ki runga i te mata niho o te taputapu rino maka HT250 hei whakapai ake i te ātete kakahu mā te 4~6 ngā wā ki te whakataurite ki te taputapu kāore i pania.