Usoro ikpo ọkụ ihe siri ike na ebe dị elu na-adịghị ahụkebe iji sublimate ma ọ bụ kpochapu ma tinye ha n'otu mkpụrụ iji nweta ihe nkiri dị mkpa ka a maara dị ka mkpuchi evaporation na-ekpo ọkụ (nke a na-akpọ mkpuchi evaporation).
Enwere ike ịchọta akụkọ ihe mere eme nke nkwadebe nke ihe nkiri dị mkpa site na usoro ikuku evaporation na 1850. Na 1857, M. Farrar malitere mgbalị nke agụụ mkpuchi site evaporating metal wires na nitrogen na-etolite mkpa fim. N'ihi teknụzụ ikuku na-adịghị ala n'oge ahụ, nkwadebe nke ihe nkiri ndị dị mkpa n'ụzọ dị otú a na-ewe oge dị ukwuu, ọ bụghịkwa ihe bara uru. Ruo 1930 mmanụ mgbasa mgbapụta e guzobere mebere mgbapụta mgbapụta usoro, na agụụ technology nwere ike ịbụ ngwa ngwa mmepe, naanị ime ka evaporation na sputtering mkpuchi ghọọ a bara uru technology.
Ọ bụ ezie na agụụ evaporation bụ ihe ochie mkpa film deposition technology, ma ọ bụ laabu na ulo oru ebe a na-ejikarị usoro. Isi uru ya bụ ọrụ dị mfe, njikwa dị mfe nke nkwụnye ego na ịdị ọcha dị elu nke ihe nkiri ndị na-esi na ya pụta. Enwere ike kewaa usoro mkpuchi oghere n'ime usoro atọ ndị a.
1) ihe isi iyi na-ekpo ọkụ ma gbazee ka ọ pụta ma ọ bụ mebie; 2) a na-ewepụ vepo site na isi iyi ihe iji kpochapu ma ọ bụ mebie.
2) A na-ebufe vepo site na isi ihe na-emepụta ihe.
3) The vepo condens na mkpụrụ n'elu na-etolite a siri ike ihe nkiri.
Vacuum evaporation nke mkpa fim, n'ozuzu bụ polycrystalline film ma ọ bụ amorphous film, film ka agwaetiti ibu bụ na-achị, site nucleation na film abụọ usoro. Atọm (ma ọ bụ ụmụ irighiri ihe) kpokọtara na mkpụrụ osisi ahụ, akụkụ nke mgbakwunye na-adịgide adịgide na mkpụrụ, akụkụ nke mgbasa ozi wee wepụ ya na mkpụrụ, na akụkụ nke nlegharị anya ozugbo site n'elu mkpụrụ. Ịrapara n'elu mkpụrụ nke atọm (ma ọ bụ ụmụ irighiri ihe) n'ihi mmegharị ọkụ nwere ike ịgafe n'elu, dị ka imetụ atom ndị ọzọ aka ga-agbakọta n'ime ụyọkọ. Ọyọkọ nwere ike ime ebe nrụgide dị n'elu mkpụrụ osisi dị elu, ma ọ bụ n'usoro mgbaze nke mkpụrụ kristal, n'ihi na nke a na-ebelata ike efu nke atom adsorbed. Nke a bụ usoro nucleation. Ndokwa ọzọ nke atọm (molecules) na-ebute mgbasawanye nke ụyọkọ (nuclei) nke a kpọtụrụ aha n'elu ruo mgbe a na-agbatị ha n'ime ihe nkiri na-aga n'ihu. Ya mere, ihe owuwu na akụrụngwa nke ihe nkiri polycrystalline na-ekpochapụ agụụ na-enwe njikọ chiri anya na ọnụego evaporation na ọnọdụ okpomọkụ. N'ikwu okwu n'ozuzu, na-ebelata okpomọkụ mkpụrụ, nke dị elu nke evaporation ọnụego, nke kacha mma na denser ihe nkiri ọka.
–E wepụtara akụkọ aonye na-emepụta igwe mkpuchi ikukuGuangdong Zhenhua
Oge nzipu: Mar-23-2024