Cov txheej txheem ntawm cov khoom siv cua sov nyob rau hauv lub tshuab nqus tsev siab kom sublimate los yog evaporate thiab tso rau ntawm ib qho substrate kom tau ib zaj duab xis nyias yog hu ua lub tshuab nqus tsev evaporation txheej (hu ua evaporation txheej).
Keeb kwm ntawm kev npaj ntawm nyias zaj duab xis los ntawm lub tshuab nqus tsev evaporation txheej txheem tuaj yeem taug qab mus rau xyoo 1850's. Xyoo 1857, M. Farrar tau pib ua lub tshuab nqus tsev los ntawm evaporating hlau xaim hauv nitrogen los ua cov yeeb yaj kiab nyias. Vim lub tshuab nqus tsev tsis tshua muaj nyob rau lub sijhawm ntawd, kev npaj ntawm cov yeeb yaj kiab nyias hauv txoj kev no yog siv sijhawm ntev heev thiab tsis ua haujlwm. Kom txog rau thaum 1930 roj diffusion twj tso kua mis ib tug neeg kho tshuab twj tso kua mis twj tso kua mis system tau tsim, lub tshuab nqus tsev twj yuav ua tau sai heev, tsuas yog ua kom lub evaporation thiab sputtering txheej ua ib tug tswv yim technology.
Txawm hais tias lub tshuab nqus tsev vacuum evaporation yog txheej txheej txheej txheej txheej txheej txheej thaum ub, tab sis nws yog qhov chaw kuaj thiab chaw tsim khoom siv nyob rau hauv ntau txoj kev. Nws cov txiaj ntsig tseem ceeb yog kev ua haujlwm yooj yim, tswj tau yooj yim ntawm kev tso nyiaj tsis txaus thiab siab purity ntawm cov yeeb yaj kiab uas tau tshwm sim. Lub tshuab nqus tsev txheej txheej txheem tuaj yeem muab faib ua peb kauj ruam hauv qab no.
1) cov khoom siv yog rhuab thiab yaj kom evaporate lossis sublimate; 2) cov vapor raug tshem tawm los ntawm cov khoom siv kom evaporate lossis sublimate.
2) Vapor yog kis los ntawm cov khoom siv mus rau substrate.
3) Cov vapor condenses rau ntawm qhov chaw substrate los ua ib zaj duab xis.
Nqus evaporation ntawm nyias zaj duab xis, feem ntau yog polycrystalline zaj duab xis los yog amorphous zaj duab xis, zaj duab xis rau cov kob loj hlob yog tseem ceeb, los ntawm nucleation thiab zaj duab xis ob txheej txheem. Evaporated atoms (los yog molecules) sib tsoo nrog lub substrate, ib feem ntawm qhov txuas mus tas li rau lub substrate, ib feem ntawm cov adsorption thiab ces evaporate tawm ntawm lub substrate, thiab ib feem ntawm qhov ncaj qha rov qab los ntawm substrate nto. Adhesion rau lub substrate nto ntawm atoms (los yog molecules) vim thermal txav txav mus rau saum npoo, xws li kov lwm cov atoms yuav sib sau ua ke. Cov pawg feem ntau yuav tshwm sim qhov twg qhov kev ntxhov siab ntawm lub substrate nto yog siab, los yog nyob rau hauv kev daws teeb meem ntawm crystal substrate, vim hais tias qhov no minimizes lub free zog ntawm lub adsorbed atoms. Qhov no yog txheej txheem nucleation. Kev tso tawm ntxiv ntawm atoms (molecules) ua rau nthuav dav ntawm cov kob-zoo li pawg (nuclei) uas tau hais los saum toj no kom txog thaum lawv txuas mus rau hauv cov yeeb yaj kiab txuas ntxiv. Yog li ntawd, cov qauv thiab cov khoom ntawm lub tshuab nqus tsev vacuum evaporated polycrystalline films yog ze ze rau tus nqi evaporation thiab substrate kub. Feem ntau hais lus, qhov qis dua qhov kub ntawm lub substrate, qhov siab dua qhov evaporation tus nqi, qhov finer thiab denser zaj duab xis nplej.
– Zaj lus no yog tso tawm los ntawmtshuab nqus tsev txheej tshuab manufacturersGuangdong Zhenhua
Post lub sij hawm: Mar-23-2024