Cov kab txheej siv cov qauv modular, uas tuaj yeem ua rau lub chamber nce ntxiv raws li cov txheej txheem thiab kev ua haujlwm zoo, thiab tuaj yeem txheej rau ob sab, uas yog qhov yooj ywm thiab yooj yim. Nruab nrog lub kaw lus ntxuav ion, lub kaw lus cua sov sai thiab DC magnetron sputtering system, nws tuaj yeem tso cov hlau yooj yim. Cov khoom siv muaj kev nrawm nrawm, yooj yim clamping thiab ua haujlwm tau zoo.
Cov kab txheej yog nruab nrog kev ntxuav ion thiab lub kaw lus ci kub siab, yog li qhov nplaum ntawm cov zaj duab xis tso tawm zoo dua. Lub kaum sab me me sputtering nrog lub hom phiaj tig yog qhov zoo rau kev tso cov zaj duab xis rau ntawm qhov chaw sab hauv ntawm qhov me me.
1. Cov khoom siv muaj cov qauv me me thiab thaj chaw hauv pem teb me.
2. Lub tshuab nqus tsev yog nruab nrog lub twj tso kua mis molecular rau kev rho tawm huab cua, nrog rau kev siv hluav taws xob tsawg.
3. Kev xa rov qab ntawm cov khoom siv khib nyiab txuag tau neeg ua haujlwm.
4. Cov txheej txheem txheej txheem tuaj yeem taug qab tau, thiab cov txheej txheem ntau lawm tuaj yeem saib xyuas hauv tag nrho cov txheej txheem kom pab txhawb kev taug qab cov teeb meem ntau lawm.
5. Cov kab txheej muaj qib siab ntawm kev ua haujlwm tsis siv neeg. Nws tuaj yeem siv nrog lub tshuab tswj hwm los txuas cov txheej txheem pem hauv ntej thiab tom qab thiab txo cov nqi zog ua haujlwm.
Nws tuaj yeem hloov cov ntawv luam ntawv nyiaj hauv cov txheej txheem tsim khoom capacitor, nrog kev ua haujlwm zoo dua thiab tus nqi qis dua.
Nws siv tau rau Ti, Cu, Al, Cr, Ni, Ag, Sn thiab lwm yam hlau yooj yim. Nws tau siv dav hauv cov khoom siv hluav taws xob semiconductor, xws li cov khoom siv ceramic, cov capacitors ceramic, cov khoom siv ceramic coj, thiab lwm yam.