ITO / ISI kab rov tav txuas ntxiv txheej ntau lawm kab yog ib qho loj planar magnetron sputtering txuas ntxiv cov khoom siv ntau lawm, uas siv cov qauv tsim modular los pab txhawb kev nthuav dav thiab kev txhim kho yav tom ntej. Nruab nrog ntau pawg ntawm cov cathodes magnetron loj, nws tuaj yeem siv rau kev sib xyaw ua ke ntawm ntau cov qauv membrane. Kev tswj hwm tsis siv neeg tag nrho thiab kev ruaj khov kis tau zoo, uas tuaj yeem txuas nrog lub manipulator kom paub txog kev ua haujlwm txuas ntxiv thiab ruaj khov. Kev tsim khoom sai thiab muaj peev xwm ntau lawm.
Cov kab txheej no yog tsim rau plating ITO, AZO, TCO thiab lwm yam yeeb yaj kiab conductive pob tshab, nrog rau cov hlau elemental Ti, Ag, Cu, Al, Cr, Ni thiab lwm yam khoom siv. Nws yog siv rau hauv vaj huam sib luag ntse hauv tsev, zaub screen, kov screen, iav tsheb, vaj huam sib luag photovoltaic thiab lwm yam khoom.