Umgca wokugquma usebenzisa isakhiwo semodyuli, esinokunyusa igumbi ngokweemfuno zenkqubo kunye nokusebenza kakuhle, kwaye sinokugquma kumacala omabini, nto leyo eguquguqukayo kwaye ilula. Ixhotyiswe ngenkqubo yokucoca i-ion, inkqubo yokufudumeza ngokukhawuleza kunye nenkqubo yokutshiza i-DC magnetron, inokufaka ngokufanelekileyo ugquma olulula lwesinyithi. Izixhobo zinokubetha okukhawulezayo, ukubopha okulula kunye nokusebenza kakuhle okuphezulu.
Umgca wokugquma uxhotyiswe ngokucoca ii-ion kunye nenkqubo yokubhaka eshushu kakhulu, ngoko ke ukunamathela kwefilimu egciniweyo kungcono. Ukutshiza okuncinci okune-angle ejikelezayo kulungile ekubekeni ifilimu kumphezulu ongaphakathi we-aperture encinci.
1. Izixhobo zinesakhiwo esincinci kunye nomgangatho omncinci.
2. Inkqubo yokufunxa ixhotyiswe ngepompo yemolekyuli yokukhupha umoya, enokusetyenziswa kwamandla aphantsi.
3. Ukubuyiselwa ngokuzenzekelayo kwerakhi yezinto ezibonakalayo kusindisa abasebenzi.
4. Iiparameter zenkqubo zinokulandelwa, kwaye inkqubo yemveliso inokujongwa kuyo yonke inkqubo ukuze kube lula ukulandelelwa kweziphene zemveliso.
5. Umgca wokugquma unezinga eliphezulu lokuzenzekelayo. Ungasetyenziswa kunye ne-manipulator ukudibanisa iinkqubo zangaphambili nangasemva kunye nokunciphisa iindleko zomsebenzi.
Ingathatha indawo yokuprinta isilivere xa kusenziwa i-capacitor, ngobuchule obuphezulu kunye neendleko eziphantsi.
Isebenza kwiTi, Cu, Al, Cr, Ni, Ag, Sn kunye nezinye izinyithi ezilula. Isetyenziswe kakhulu kwizixhobo ze-elektroniki ze-semiconductor, ezinje nge-ceramic substrates, i-ceramic capacitors, i-led ceramic supports, njl.