In ubuchwepheshe besimanje bokumboza nge-vacuum, ukusebenza kwe-optical kwamafilimu amancane kuhlotshaniswa ngaphakathi nokwakheka kanye nekhwalithi yezinto eziqondiwe ezisetshenziswa ezinqubweni zokubeka. Kungakhathaliseki ukuthi ku-PVD, i-magnetron sputtering, noma izinhlelo ze-ALD ne-PECVD ezithuthukisiwe, i-target isebenza njengomthombo oyisisekelo wezinto ezigcina zakha ungqimba olusebenzayo ku-substrate. Ukwakheka kwayo okuyisisekelo, ubumsulwa, kanye ne-microstructure kunethonya elibalulekile ku-refractive index, i-extinction coefficient, kanye nokuziphatha kwe-spectral jikelele kwefilimu efakiwe.
Ukwehluka kokwakheka kwethagethi kuthinta ngqo i-stoichiometry kanye nobuningi befilimu encane, okubuye kunqume ama-optical constant ayo kanye nokuqina kokusebenza. Isibonelo, ezimbozweni ze-dielectric ezenzelwe izinhlelo zokusebenza ezilwa nokukhanya noma ukukhanyisa okuphezulu, ukulawulwa okunembile kwezilinganiso ze-metal oxide—njenge-TiO₂, i-SiO₂, noma i-Al₂O₃—kubalulekile. Ngisho nokuphambuka okuncane kokuqukethwe kwe-oxygen noma izilinganiso ze-cation kuthagethi kungaholela ekushintsheni kwenkomba yokukhanya, ukwanda kokumuncwa kwe-optical, noma ukungalungi kahle kwebhendi ye-spectral, okuphazamisa ukusebenza kahle kwedivayisi ezinhlelweni zokukhanya.
Ngokufanayo, kumafilimu amancane ensimbi, ukwakheka okuqondiwe kunquma ukuminyana kwama-electron akhululekile, ukuziphatha kwe-plasmon engaphezulu, kanye nokukhanya okubonakalayo kuyo yonke i-spectrum ebonakalayo neye-infrared. Ama-target ethusi, isiliva, noma i-aluminium ahlanzekile kakhulu aqinisekisa ukufakwa okufanayo futhi anciphise izikhungo zokuhlakazeka ezingonakalisa ukuhlangana kwe-optical. Ama-target axubile noma axubile avame ukwakhiwa ukuze athuthukise izakhiwo ezithile zefilimu, njengokumelana nokugqwala, ubulukhuni bemishini, noma ukumuncwa kwe-optical okulungisekayo, kodwa adinga ukulawulwa okunembile kwe-metallurgical ukuze kugwenywe ukwethula amaphutha aphazamisa ukusebenza kwe-optical.
Ngaphezu kwalokho, izici zesakhiwo esincane sento eqondiwe—usayizi wezinhlamvu, ukuvuleka kwenhlabathi, kanye nokuma kwekristalo—kungathonya isimo kanye nobuningi bokupakisha kwefilimu efakiwe. Ekuqhumeni kwe-magnetron, isibonelo, isakhiwo esincane sento eqondiwe sithinta isivuno se-sputter, ukusatshalaliswa kwe-angular kwezinhlobo ezikhishwe, kanye nokucindezeleka kwefilimu, konke okufaka isandla ekufaneni nasekuqineni kokukhanya.
Ukuze kufezwe amafilimu amancane asebenza kahle kakhulu, kubalulekile ukuhlanganisa ukwakheka kwethagethi nemingcele yenqubo. Ukukhetha indlela yokufaka, izinga lokushisa le-substrate, amandla okukhipha amanzi, kanye nendawo yokuhlanza kumele kulungiselelwe kanye nokwakheka kwethagethi ukulawula i-stoichiometry yefilimu, ubuningi, kanye nokwakheka kwamaphutha. Izixazululo zokumboza i-vacuum ezithuthukisiwe zisebenzisa izinhlelo zokuqapha ezisendaweni kanye nezimpendulo ukulungisa izimo zokufaka ngendlela eguquguqukayo, ukuqinisekisa ukuthi izakhiwo ezibonakalayo zefilimu zihambisana kahle nemininingwane yokuklama.
Ngamafuphi, izinto eziqondiwe aziwona nje umthombo wama-athomu ekumbozweni kwe-vacuum—yisona sizathu esiyisisekelo sezakhiwo ze-optical zefilimu encane. Ukulawula ngokucophelela ukwakheka kwamakhemikhali, ubumsulwa, kanye nesakhiwo sayo esincane kubalulekile ekufinyeleleni izinkomba eziqondile zokukhanya, ukuthembeka kwe-spectral, kanye nokuzinza kwesikhathi eside kokubili ekumbozweni kwe-dielectric kanye ne-metallic. Njengoba ubuchwepheshe bokumbozwa kwe-vacuum buguqukela ekuqondeni okuphezulu kanye nokwakhiwa okuyinkimbinkimbi kwezingqimba eziningi, indima yezinto eziqondiwe iba yinto ebaluleke kakhulu, isekela ukusebenza kwezingxenye ze-optical ezinhlelweni zokubonisa, ama-photonics, ama-sensor, kanye namadivayisi wamandla.
Lesi sihloko sishicilelwe nguumenzi wemishini yokumboza nge-vacuumI-Zhenhua Vacuum
Isikhathi sokuthunyelwe: Mashi-03-2026