In nā ʻenehana uhi vacuum hou, pili pono ka hana optical o nā kiʻiʻoniʻoni lahilahi i ka haku mele a me ka maikaʻi o ka mea i hoʻohana ʻia i nā kaʻina hana waiho. Inā paha ma PVD, magnetron sputtering, a i ʻole nā ʻōnaehana ALD a me PECVD holomua, lawelawe ka pahuhopu ma ke ʻano he kumu kumu o ka mea e hana hope loa i ka papa hana ma ka substrate. ʻO kona haku mele elemental, ka maʻemaʻe, a me ka microstructure e hoʻoikaika i ka refractive index, ka extinction coefficient, a me ke ʻano spectral holoʻokoʻa o ka kiʻiʻoniʻoni i waiho ʻia.
Hoʻopilikia pololei nā ʻano like ʻole o ka hoʻonohonoho ʻana o ka pahuhopu i ka stoichiometry a me ka nui o ka ʻili lahilahi, ka mea e hoʻoholo ai i kona mau kūpaʻa optical a me ke kūpaʻa o ka hana. No ka laʻana, i nā uhi dielectric i hoʻolālā ʻia no nā noi anti-reflection a i ʻole nā noi reflectivity kiʻekiʻe, he mea nui ka kaohi pololei ʻana i nā lakio oxide metala—e like me TiO₂, SiO₂, a i ʻole Al₂O₃. ʻOiai nā ʻokoʻa liʻiliʻi i ka ʻike oxygen a i ʻole nā lakio cation i loko o ka pahuhopu hiki ke alakaʻi i nā hoʻololi i ka refractive index, hoʻonui i ka optical absorption, a i ʻole ka spectral band misalignment, ka mea e hoʻopilikia ai i ka pono o ka hāmeʻa i nā ʻōnaehana optical.
Pēlā nō, i loko o nā kiʻiʻoniʻoni lahilahi metala, ʻo ka hoʻonohonoho ʻana o ka pahuhopu e kuhikuhi i ka nui o ka electron manuahi, ke ʻano o ka plasmon ʻili, a me ka noʻonoʻo ʻana ma waena o ka spectrum ʻike ʻia a me ka infrared. ʻO nā pahuhopu keleawe, kālā, a alumini paha maʻemaʻe kiʻekiʻe e hōʻoia i ka waiho like ʻana a hoʻemi i nā kikowaena hoʻopuehu e hiki ke hoʻohaʻahaʻa i ka homogeneity optical. Hoʻolālā pinepine ʻia nā pahuhopu alloyed a i ʻole doped e hoʻonui i nā waiwai kiʻiʻoniʻoni kikoʻī, e like me ke kūpaʻa ʻana i ka corrosion, ka paʻakikī mechanical, a i ʻole ka tunable optical absorption, akā koi i ka mana metallurgical pololei e pale aku i ka hoʻokomo ʻana i nā hemahema e hōʻino ai i ka hana optical.
Eia kekahi, ʻo nā ʻano microstructural o ka pahuhopu—ka nui o ka palaoa, ka porosity, a me ke kuhikuhi crystallographic—hiki ke hoʻohuli i ke ʻano a me ka packing density o ke kiʻiʻoniʻoni i waiho ʻia. I ka magnetron sputtering, no ka laʻana, hoʻopilikia ka microstructure target i ka sputter yield, ka angular distribution o nā ʻano i hoʻokuʻu ʻia, a me ke kaumaha o ke kiʻiʻoniʻoni, nā mea a pau e hāʻawi i ka optical uniformity a me ka durability.
No ka hoʻokō ʻana i nā ʻili lahilahi hana kiʻekiʻe, he mea nui e hoʻohui i ka hoʻolālā pahuhopu me nā palena hana. Pono e hoʻomaikaʻi ʻia ke koho ʻana o ke ʻano hana waiho ʻana, ka mahana o ka substrate, ka mana sputtering, a me ke kaiapuni vacuum e pili ana i ka hoʻohui ʻana o ka pahuhopu e kāohi i ka stoichiometry kiʻiʻoniʻoni, ka density, a me ka hoʻokumu ʻana o nā hemahema. Hoʻohana nā hoʻonā uhi vacuum holomua i nā ʻōnaehana nānā in-situ a me nā manaʻo hoʻihoʻi e hoʻoponopono i nā kūlana waiho ʻana me ka dynamically, e hōʻoiaʻiʻo ana e kūlike nā waiwai optical o ke kiʻiʻoniʻoni i nā kikoʻī hoʻolālā.
I ka hōʻuluʻulu manaʻo, ʻaʻole wale ka mea i manaʻo ʻia he kumu o nā ʻātoma i loko o ka uhi ʻana o ka vacuum—ʻo ia ke kumu hoʻoholo o nā waiwai optical ʻili lahilahi. He mea nui ka kaohi pono ʻana i kona ʻano kemika, ka maʻemaʻe, a me ka microstructure no ka hoʻokō ʻana i nā ʻōkuhi refractive pololei, ka hilinaʻi spectral, a me ke kūpaʻa lōʻihi i nā uhi dielectric a me nā metala. I ka ulu ʻana o nā ʻenehana uhi ʻana o ka vacuum i nā ʻano hana multi-layer paʻakikī a me ka pololei kiʻekiʻe, lilo ka hana o nā mea i manaʻo ʻia i mea koʻikoʻi loa, e kākoʻo ana i ka hana o nā ʻāpana optical i nā ʻōnaehana hōʻike, photonics, sensors, a me nā mea hana ikehu.
Ua paʻi ʻia kēia ʻatikala emea hana lako uhi vacuumʻO Zhenhua Vacuum
Ka manawa hoʻouna: Malaki-03-2026