In mahlale a sejoale-joale a ho roala ka vacuum, ts'ebetso ea optical ea lifilimi tse tšesaane e hokahane ka botebo le sebopeho le boleng ba thepa e reretsoeng e sebelisoang lits'ebetsong tsa ho beha. Ebang ke ho PVD, magnetron sputtering, kapa litsamaiso tse tsoetseng pele tsa ALD le PECVD, sepheo se sebetsa e le mohloli oa motheo oa thepa e qetellang e theha lera le sebetsang holim'a substrate. Sebopeho sa eona sa mantlha, bohloeki le sebopeho sa micro li na le tšusumetso e matla ho index ea refractive, coefficient ea ho fela, le boitšoaro ba spectral ka kakaretso ba filimi e behiloeng.
Liphetoho tsa sebopeho sa sepheo li ama ka ho toba stoichiometry le botenya ba filimi e tšesaane, e leng se etsang qeto ea li-constant tsa eona tsa optical le botsitso ba ts'ebetso. Mohlala, liphahlong tsa dielectric tse etselitsoeng lits'ebetso tsa anti-reflection kapa high-reflectivity, taolo e nepahetseng ea likarohano tsa oxide ea tšepe—tse kang TiO₂, SiO₂, kapa Al₂O₃—ke tsa bohlokoa. Esita le ho kheloha ho honyenyane ka tekanyo ea oksijene kapa likarohano tsa cation ka har'a sepheo ho ka lebisa liphetohong tsa refractive index, keketseho ea ho monngoa ha optical, kapa ho se lumellane hantle ha sehlopha sa spectral, tse behang kotsing katleho ea sesebelisoa lits'ebetsong tsa optical.
Ka ho tšoanang, lifiliming tse tšesaane tsa tšepe, sebopeho sa sepheo se laola bongata ba lielektrone tse lokolohileng, boitšoaro ba plasmone ea holim'a metsi, le ho bonahatsa khanya ho pholletsa le spectrum e bonahalang le ea infrared. Lipheo tsa koporo, silevera, kapa aluminium tse hloekileng haholo li netefatsa ho kenngoa ho tšoanang le ho fokotsa litsi tsa ho hasanya tse ka senyang homogeneity ea optical. Lipheo tse kopantsoeng kapa tse nang le dope hangata li etsoa ho ntlafatsa thepa e itseng ea filimi, joalo ka ho hanyetsa ho bola, ho thatafala ha mechini, kapa ho monngoa ha optical ho ka fetoloang, empa li hloka taolo e nepahetseng ea metallurgical ho qoba ho hlahisa liphoso tse sitisang ts'ebetso ea optical.
Ho feta moo, litšobotsi tsa sebopeho sa microstructural tsa sepheo—boholo ba koro, masoba, le tataiso ea kristale—li ka susumetsa sebopeho le bongata ba ho paka ha filimi e kentsoeng. Ka mohlala, ho sputtering ea magnetron, sebopeho sa microstructure se ama chai ea sputter, kabo ea angular ea mefuta e ntšitsoeng, le khatello ea filimi, tseo kaofela li tlatsetsang ho ts'oanang ha optical le ho tšoarella.
Ho fihlella lifilimi tse tšesaane tse sebetsang hantle, ho bohlokoa ho kopanya moralo oa sepheo le liparamente tsa ts'ebetso. Khetho ea mokhoa oa ho beha, mocheso oa substrate, matla a ho phunya, le tikoloho ea vacuum e tlameha ho ntlafatsoa hammoho le sebopeho sa sepheo ho laola stoichiometry ea filimi, bongata le ho thehoa ha sekoli. Litharollo tse tsoetseng pele tsa ho koahela vacuum li sebelisa litsamaiso tsa tlhokomelo ea kahare le tsa maikutlo ho fetola maemo a ho beha ka mokhoa o feto-fetohang, ho netefatsa hore thepa ea optical ea filimi e lumellana haufi-ufi le litlhaloso tsa moralo.
Ka bokhutšoanyane, thepa e reretsoeng ha se mohloli oa liathomo feela ka har'a vacuum covering—ke motheo oa thepa ea optical ea filimi e tšesaane. Taolo e hlokolosi holim'a metsoako ea eona ea lik'hemik'hale, bohloeki le sebopeho sa micro ke ea bohlokoa ho fihlella li-indices tse nepahetseng tsa refractive, botšepehi ba spectral, le botsitso ba nako e telele ka har'a dielectric le metallic coating. Ha mahlale a ho koahela vacuum a ntse a fetoha ho ea ho nepahalo e phahameng le meralo e rarahaneng ea mekhahlelo e mengata, karolo ea thepa e reretsoeng e ntse e ba ea bohlokoa le ho feta, e tšehetsa ts'ebetso ea likarolo tsa optical litsamaisong tsa ponts'o, li-photonics, li-sensor le lisebelisoa tsa matla.
Sengoloa sena se phatlalalitsoe kemoetsi oa lisebelisoa tsa ho roala ka vacuumLetsoho la Zhenhua
Nako ea poso: Hlakubele-03-2026