In ubuchwepheshe banamhlanje bokugquma nge-vacuum, ukusebenza kwe-optical kweefilimu ezincinci kunxulunyaniswa ngokuyintloko nokwakheka kunye nomgangatho wezinto ezijoliswe kuzo ezisetyenziswa kwiinkqubo zokubeka. Nokuba kwi-PVD, i-magnetron sputtering, okanye kwiinkqubo ze-ALD kunye ne-PECVD eziphambili, ithagethi isebenza njengomthombo osisiseko wezinto ezithi ekugqibeleni zenze umaleko osebenzayo kwi-substrate. Ukwakheka kwayo kwezinto ezisisiseko, ubunyulu, kunye ne-microstructure kunempembelelo enkulu kwi-refractive index, i-extinction coefficient, kunye nokuziphatha kwe-spectral iyonke yefilimu ebekelweyo.
Utshintsho kwindlela ekujoliswe ngayo luchaphazela ngokuthe ngqo i-stoichiometry kunye noxinano lwefilimu encinci, nto leyo egqiba ii-optical constants zayo kunye nokuzinza kokusebenza. Umzekelo, kwiingubo ze-dielectric ezenzelwe ukusetyenziswa kwe-anti-reflection okanye i-high-reflectivity, ulawulo oluchanekileyo lwe-metal oxide ratios—ezifana ne-TiO₂, i-SiO₂, okanye i-Al₂O₃—lubalulekile. Nokuba ukuphambuka okuncinci kumxholo we-oxygen okanye i-cation ratios kwithagethi kunokukhokelela kutshintsho kwi-refractive index, ukwanda kwe-optical absorption, okanye i-spectral band misalignment, nto leyo ebeka emngciphekweni ukusebenza kakuhle kwesixhobo kwiinkqubo ze-optical.
Ngokufanayo, kwiifilimu ezibhityileyo zesinyithi, ukwakheka kwethagethi kulawula uxinano lwee-electron ezikhululekileyo, ukuziphatha kwe-plasmon yomphezulu, kunye nokukhanya kwayo kuyo yonke i-spectrum ebonakalayo neye-infrared. Iithagethi ze-copper, isilivere, okanye i-aluminium ezicocekileyo kakhulu ziqinisekisa ukufakwa okufanayo kwaye zinciphisa amaziko okusasazeka anokonakalisa ukuhambelana kwe-optical. Iithagethi ezixutyiweyo okanye ezixutyiweyo zihlala ziyilelwe ukuphucula iipropati ezithile zefilimu, ezinje ngokuxhathisa ukugqwala, ubunzima bomatshini, okanye ukufunxwa kwe-optical okuhlengahlengiswayo, kodwa zifuna ulawulo oluchanekileyo lwe-metallurgical ukuze kuthintelwe ukungenisa iziphene eziphazamisa ukusebenza kwe-optical.
Ngaphezu koko, iimpawu zesakhiwo se-microstructural se-target—ubukhulu be-grain, i-porosity, kunye ne-crystallographic orientation—zinokuchaphazela i-morphology kunye noxinano lokupakisha kwefilimu egciniweyo. Kwi-magnetron sputtering, umzekelo, i-target microstructure ichaphazela i-sputter yield, ukusasazwa kwe-angular kweentlobo ezikhutshiweyo, kunye noxinzelelo lwefilimu, zonke ezinegalelo ekufaneni nasekuqineni kwe-optical.
Ukuze kufezekiswe iifilimu ezincinci ezisebenza kakuhle, kubalulekile ukudibanisa uyilo lweethagethi kunye neeparamitha zenkqubo. Ukukhetha indlela yokufaka, ubushushu be-substrate, amandla okutshiza, kunye nendawo yokucoca kufuneka kuphuculwe kunye nokwakheka kweethagethi ukulawula i-stoichiometry yefilimu, uxinano, kunye nokwakheka kweziphene. Izisombululo zokugquma i-vacuum eziphambili zisebenzisa iinkqubo zokubeka esweni kwindawo kunye nempendulo ukulungisa iimeko zokufaka ngendlela eguquguqukayo, ukuqinisekisa ukuba iipropati zokukhanya zefilimu zihambelana ngokusondeleyo neenkcukacha zoyilo.
Ngamafutshane, izinto ekujoliswe kuzo azingomthombo nje weeathom kwi-vacuum coating—zisisiseko seempawu ze-thin film optical. Ulawulo olucokisekileyo malunga nokwakheka kweekhemikhali, ubunyulu, kunye ne-microstructure yazo kubalulekile ekufezekiseni i-refractive indices echanekileyo, ukuthembeka kwe-spectral, kunye nokuzinza kwexesha elide kwi-dielectric kunye ne-metallic coating. Njengoko ubuchwepheshe be-vacuum coating buguqukela ekuchanekeni okuphezulu kunye ne-multi-layer architectures ezintsonkothileyo, indima yezinto ekujoliswe kuzo iba yinto ebaluleke ngakumbi, ixhasa ukusebenza kwezixhobo ze-optical kwiinkqubo zokubonisa, ii-photonics, ii-sensors, kunye nezixhobo zamandla.
Eli nqaku lipapashwe nguumenzi wezixhobo zokugquma nge-vacuumI-Zhenhua Vacuum
Ixesha lokuthumela: Matshi-03-2026