In matekinoroji emazuva ano ekuputira vacuum, mashandiro ekuona kwemafirimu matete akabatana nekuumbwa uye kunaka kwezvinhu zvinoshandiswa mukuisa zvinhu mumagadzirirwo ekuisa zvinhu. Ingava muPVD, magnetron sputtering, kana masisitimu epamusoro eALD nePECVD, chinangwa chinoshanda senzvimbo huru yezvinhu zvinozopedzisira zvaumba functional layer pa substrate. Kuumbwa kwayo kwezvinhu, kuchena, uye microstructure zvine simba guru pa refractive index, extinction coefficient, uye whole spectral behavior yefirimu yakachengetwa.
Kusiyana kwekugadzirwa kwechinangwa kunokanganisa zvakananga stoichiometry uye density yefirimu rakatetepa, izvo zvinozosarudza ma optical constants ayo uye kugadzikana kwekushanda. Semuenzaniso, mu dielectric coatings dzakagadzirirwa anti-reflection kana high-reflectivity applications, kudzora kwakanyatsojeka kwe metal oxide ratios - senge TiO₂, SiO₂, kana Al₂O₃ - kwakakosha. Kunyangwe kutsauka kudiki mu oxygen content kana cation ratios muchinangwa kunogona kutungamira kuchinjwa mu refractive index, kuwedzera optical absorption, kana spectral band misalignment, izvo zvinokanganisa kushanda zvakanaka kwemudziyo muma optical systems.
Saizvozvowo, mumafirimu esimbi akatetepa, chimiro chechinhu chinotarisa huwandu hwemaerekitironi akasununguka, maitiro eplasmoni pamusoro, uye kupenya kwechiedza mu spectrum inooneka neinfrared. Zvinangwa zvemhangura, sirivha, kana aruminiyamu zvakachena zvine pure zvakanyanya zvinovimbisa kuiswa kwakafanana uye kuderedza nzvimbo dzinopararira dzinogona kukanganisa homogeneity ye optical. Zvinangwa zvakasanganiswa kana zvakaiswa dope zvinowanzogadzirwa kuti zviwedzere hunhu hwefirimu, hwakadai sekudzivirira ngura, kuomarara kwemuchina, kana kunyudzwa kwe optical, asi zvinoda kudzora metallurgical chaiyo kudzivirira kuunza zvikanganiso zvinokanganisa mashandiro e optical.
Uyezve, hunhu hwezvinhu zviri muchikamu chechinhu chinotsvagwa—hukuru hwetsanga, porosity, uye crystallographic orientation—zvinogona kukanganisa chimiro uye huwandu hwepakeji yefirimu rakaiswa. Semuenzaniso, mukuputa kwemagnetron, chimiro chechinhu chinokanganisa kubereka kwesputter, kupararira kwemakona emhando dzakaburitswa, uye kushushikana kwefirimu, izvo zvese zvinobatsira mukufanana kwemaziso uye kugara kwenguva refu.
Kuti uwane mafirimu matete anoshanda zvakanyanya, zvakakosha kubatanidza dhizaini yechinangwa nematanho ekuita. Sarudzo yenzira yekuisa, tembiricha yesubstrate, simba rekuputira, uye nzvimbo yekubvisa chando inofanira kugadziriswa pamwe chete nekugadzirwa kwechinangwa kudzora stoichiometry yefirimu, huwandu hwevanhu, uye kugadzirwa kwezvikanganiso. Mhinduro dzepamusoro dzekuvhara chando dzinoshandisa masisitimu ekutarisa ari mukati uye ekupa mhinduro kugadzirisa mamiriro ekuisa chando nenzira inochinja, kuve nechokwadi chekuti hunhu hweoptical hwefirimu hunoenderana nezvinodiwa zvedhizaini.
Muchidimbu, chinhu chinotsvagwa hachisi kungowanikwa maatomu mu vacuum coating - ndicho chinhu chikuru chinoratidza hunhu hwe thin film optical. Kudzora zvine hungwaru pakuumbwa kwemakemikari, kuchena, uye microstructure kwakakosha kuti pave ne refractive indices chaiyo, spectral fidelity, uye kugadzikana kwenguva refu mu dielectric ne metallic coating. Sezvo matekinoroji e vacuum coating achichinja kuenda pakunyatsojeka uye kuomarara kwema multi-layer architectures, basa rezvinhu zvinotsvagwa rinowedzera kukosha, zvichitsigira mashandiro e optical components muma display systems, photonics, sensors, uye energy devices.
Nyaya iyi yakabudiswa namugadziri wemidziyo yekuputira vacuumZhenhua Vacuum
Nguva yekutumira: Kurume-03-2026