In ngā hangarau paninga korehau hou, ko te mahi whatu o ngā kiriata angiangi e hono pū ana ki te hanganga me te kounga o te rauemi ūnga e whakamahia ana i roto i ngā tukanga whakatakotoranga. Ahakoa i roto i te PVD, te magnetron sputtering, i ngā pūnaha ALD me PECVD matatau rānei, ko te ūnga te pūtake taketake o te rauemi e hanga ana i te paparanga mahi i runga i te papa. Ko tōna hanganga taketake, te parakore, me te hanganga moroiti he awe nui ki te taupū whakaata, te tauwehenga mate, me te whanonga whānui o te kiriata kua whakatakotoranga.
Ka pā tika ngā rerekētanga o te hanganga o te ūnga ki te stoichiometry me te mātotoru o te kiriata angiangi, ā, koia nei te mea e whakatau ana i ōna pūmau whatu me te pumau o te mahi. Hei tauira, i roto i ngā paninga dielectric i hangaia mō ngā tono ārai-whakaata, whakaata-teitei rānei, he mea nui te whakahaere tika i ngā ōwehenga waikura whakarewa—pērā i te TiO₂, SiO₂, Al₂O₃ rānei. Ahakoa ngā rerekētanga iti o te ihirangi hāora, ngā ōwehenga cation rānei i roto i te ūnga, ka arahi pea ki ngā nekehanga o te taupū whakaata, te pikinga o te mimiti whatu, te hē rānei o te hononga spectral, ka whakararu i te whai huatanga o te taputapu i roto i ngā pūnaha whatu.
Waihoki, i roto i ngā kiriata angiangi whakarewa, ko te hanganga o te ūnga e whakatau ana i te kiato irahiko kore utu, te whanonga plasmon mata, me te whakaata puta noa i te whānuitanga e kitea ana me te whero-whero. Mā ngā ūnga parahi, hiriwa, konumohe rānei e tino parakore ana ka whakarite kia ōrite te whakatakotoranga me te whakaiti i ngā pokapū marara ka taea te whakaheke i te ōritetanga o te whatu. He maha ngā wā ka hangaia ngā ūnga kua whakakoitia, kua tāpirihia rānei hei whakarei ake i ngā āhuatanga kiriata motuhake, pērā i te ātete ki te waikura, te pakeke miihini, te mimiti whatu ka taea te whakarerekē, engari me whakahaere tika te whakarewa kia kore ai e whakauru mai ngā hapa e whakararuraru i te mahi whatu.
Heoi anō, ko ngā āhuatanga hanganga moroiti o te ūnga—te rahi o te kōpura, te porosity, me te whakatakotoranga tioata—ka pā ki te āhua me te mātotoru o te kiriata kua whakatakotoria. Hei tauira, i roto i te magnetron sputtering, ka pā te hanganga moroiti ūnga ki te hua sputter, te tohatoha koki o ngā momo kua peia, me te ahotea kiriata, e whai wāhi katoa ana ki te ōritetanga whatu me te roa.
Hei whakatutuki i ngā kiriata angiangi mahi-teitei, he mea nui kia whakauruhia te hoahoa ūnga ki ngā tawhā tukanga. Me arotau te whiriwhiri i te tikanga whakatakotoranga, te pāmahana o te papa, te kaha pupuhi, me te taiao korehau me te hanganga ūnga hei whakahaere i te stoichiometry kiriata, te kiato, me te hanganga hapa. Ka whakamahia e ngā otinga paninga korehau matatau ngā pūnaha aroturuki me te urupare ā-roto hei whakarerekē i ngā āhuatanga whakatakotoranga hihiri, me te whakarite kia ōrite ngā āhuatanga whatu o te kiriata ki ngā whakaritenga hoahoa.
Hei whakarāpopototanga, ehara te rauemi ūnga i te pūtake noa iho o ngā ngota i roto i te paninga korehau—koinei te mea matua e whakatau ana i ngā āhuatanga whatu kiriata angiangi. He mea nui te whakahaere tupato i tōna hanganga matū, te parakore, me te hanganga moroiti hei whakatutuki i ngā tohu whakaata tika, te pono o te hihi, me te pumau mo te wa roa i roto i ngā paninga dielectric me te konganuku. I te whanaketanga o ngā hangarau paninga korehau ki te hanga i ngā hanganga maha-paparanga matatini me te tika teitei ake, ka nui haere te hiranga o te tūranga o ngā rauemi ūnga, hei tautoko i te mahi a ngā wāhanga whatu i roto i ngā pūnaha whakaatu, ngā photonics, ngā pūoko, me ngā taputapu pūngao.
I whakaputaina tēnei tuhinga ekaihanga taputapu paninga korehauZhenhua Vacuum
Wā tuku: Maehe-03-2026