Kwezesayensi yezinto zokwakha kanye nobunjiniyela, insimu yezingubo zefilimu encane idlala indima ebalulekile ezimbonini ezisukela ku-elekthronikhi kuya ekukhiqizeni okuthuthukile. Phakathi kobuchwepheshe obuhlukahlukene obutholakalayo, ukusputtering kwe-physical vapor deposition (PVD) sekuvele njengendlela entsha nephumelelayo yokufaka amafilimu amancane kuma-substrate. Lesi sihloko sizongena ezweni lokusputtering kwe-PVD, sixoxe ngezinhlelo zokusebenza zalo, izinzuzo kanye nentuthuko yakamuva. Ukusputtering kwe-PVD, okwaziwa nangokuthi ukusputtering kwe-magnetron, kuyindlela esetshenziswa kabanzi embonini ye-semiconductor ukufaka amafilimu amancane kuma-wafer. Kuhilela ukusebenzisa i-plasma ukususa ama-athomu ezintweni eziqondiwe, ezibe sezifakwa kwi-substrate, zakha ifilimu encane.
Le nqubo inikeza izinzuzo eziningi, njengokulawula okunembile kobukhulu befilimu, ukunamathela okuhle kakhulu, kanye nekhono lokufaka izinto ezahlukahlukene okuhlanganisa izinsimbi, ama-oxide, kanye nama-nitride. Ukusetshenziswa kwe-PVD sputtering kubanzi futhi kuyahlukahluka. Embonini ye-elekthronikhi, kuvame ukusetshenziswa ukufaka izinto eziqhubayo njenge-aluminium nethusi, okuvumela ukukhiqizwa kwezingxenye ezincane kanye namasekethe ahlanganisiwe. Ngaphezu kwalokho, i-PVD sputtering isetshenziswa kabanzi embonini yokumboza okubonakalayo, njenge-anti-reflective coating kumalensi nasezibukweni ukuthuthukisa ukusebenza kokudlulisa ukukhanya. Intuthuko yakamuva kubuchwepheshe be-PVD sputtering iyenza ithandwe kakhulu. Intuthuko ephawulekayo ukwethulwa kwe-reactive sputtering, okungabeka amafilimu amancane amakhemikhali anezakhiwo ezithuthukisiwe. Ngokungenisa amagesi aphendulayo ekamelweni le-vacuum ngesikhathi sokufakwa, abakhiqizi bangalawula ukwakheka kanye ne-stoichiometry yamafilimu afakiwe, okuhlinzeka ngokusebenza okuthuthukisiwe kanye nokusebenza.
Ngaphezu kwalokho, ukusungula izinto ezintsha eziqondiwe kuye kwandisa amakhono okuchitha ama-PVD. Isibonelo, ukusebenzisa ama-composite target aqukethe izinto eziningi kungabeka amafilimu amancane akhethekile kakhulu anezakhiwo ezihlukile. Lokhu kuvula umnyango wokuthuthukiswa kwezinto ezintsha ze-elekthronikhi ezithuthukisiwe, isitoreji samandla kanye namadivayisi ezokwelapha. Ngamafuphi, ukuchitha ama-PVD kuyindlela enamandla yokumboza amafilimu amancane enezinhlelo zokusebenza eziningi kanye nentuthuko yakamuva. Ngokulawula okunembile ukufakwa kwamafilimu amancane kanye nokuhambisana nezinto ezahlukahlukene, sekuyinto ebalulekile ezimbonini ezifana ne-elekthronikhi kanye ne-optics. Ucwaningo oluqhubekayo kanye nokusungula izinto ezintsha emkhakheni wokuchitha ama-PVD kulindeleke ukuthi kuthuthukise amakhono ayo, kuvumele ukudalwa kwezinto ezintsha futhi kudlule imingcele yentuthuko yezobuchwepheshe.
–Lesi sihloko sikhishwe yi-umenzi womshini wokumboza nge-vacuumI-Zhenhua Vacuum.
Isikhathi sokuthunyelwe: Meyi-27-2025