Kutulutsa Ma PVD: Kupita Patsogolo kwa Ukadaulo Wopaka Mafilimu Ochepa

Mu sayansi ya zinthu ndi uinjiniya, gawo la zokutira filimu yopyapyala limagwira ntchito yofunika kwambiri m'mafakitale kuyambira zamagetsi mpaka kupanga zinthu zapamwamba. Pakati pa ukadaulo wosiyanasiyana womwe ulipo, kupopera kwa physical vapor deposition (PVD) kwawonekera ngati njira yatsopano komanso yothandiza yopopera mafilimu opyapyala pa zinthu zopyapyala. Nkhaniyi ifufuza dziko la kupopera kwa PVD, kukambirana za ntchito zake, ubwino wake ndi zomwe zachitika posachedwa. Kupopera kwa PVD, komwe kumadziwikanso kuti magnetron sputtering, ndi njira yomwe imagwiritsidwa ntchito kwambiri mumakampani opanga ma semiconductor kupopera mafilimu opyapyala pa ma wafer. Zimaphatikizapo kugwiritsa ntchito plasma kuchotsa maatomu kuchokera ku chinthu chomwe mukufuna, chomwe chimayikidwa pa chinthu chopyapyala, ndikupanga filimu yopyapyala.

Njirayi imapereka zabwino zambiri, monga kuwongolera molondola makulidwe a filimu, kumamatira bwino, komanso kuthekera koyika zinthu zosiyanasiyana kuphatikiza zitsulo, ma oxide, ndi ma nitride. Kugwiritsa ntchito kwa PVD sputtering ndi kwakukulu komanso kosiyanasiyana. Mumakampani opanga zamagetsi, nthawi zambiri imagwiritsidwa ntchito kuyika zinthu zoyendetsera monga aluminiyamu ndi mkuwa, zomwe zimathandiza kupanga zinthu zazing'ono komanso ma circuits ophatikizika. Kuphatikiza apo, PVD sputtering imagwiritsidwa ntchito kwambiri mumakampani opanga zokutira za kuwala, monga zokutira zotsutsana ndi kuwala pa magalasi ndi magalasi kuti ziwonjezere magwiridwe antchito a kuwala. Kupita patsogolo kwaposachedwa muukadaulo wa PVD sputtering kukupangitsa kuti ikhale yotchuka kwambiri. Chinthu chodziwika bwino ndi kuyambitsa sputtering yogwira ntchito, yomwe imatha kuyika mafilimu oonda azinthu zokhala ndi mawonekedwe owonjezera. Mwa kuyambitsa mpweya wochitapo kanthu mu chipinda chopanda mpweya panthawi yoyika, opanga amatha kuwongolera kapangidwe ndi stoichiometry ya mafilimu omwe adayikidwa, kupereka magwiridwe antchito abwino komanso magwiridwe antchito.

Kuphatikiza apo, zatsopano zomwe zapangidwa zakulitsa kuthekera kwa PVD sputtering. Mwachitsanzo, kugwiritsa ntchito mipherezero yophatikizika yokhala ndi zinthu zingapo kumatha kuyika mafilimu opyapyala apadera kwambiri okhala ndi mawonekedwe apadera. Izi zimatsegula chitseko cha kupanga zipangizo zatsopano zamagetsi apamwamba, kusungira mphamvu ndi zida zamankhwala. Mwachidule, PVD sputtering ndi njira yamphamvu yophikira filimu yopyapyala yokhala ndi ntchito zosiyanasiyana komanso kupita patsogolo kwaposachedwa. Ndi kuwongolera molondola kuyika filimu yopyapyala komanso kugwirizana ndi zinthu zosiyanasiyana, yakhala yofunika kwambiri m'mafakitale monga zamagetsi ndi optics. Kafukufuku wopitilira komanso zatsopano m'munda wa PVD sputtering akuyembekezeka kupititsa patsogolo luso lake, kulola kupanga zipangizo zatsopano ndikupititsa patsogolo ukadaulo.

– Nkhaniyi yatulutsidwa ndiwopanga makina ophikira vacuumZhenhua Vacuum.