Hauv kev tshawb fawb txog cov ntaub ntawv thiab kev tsim kho, thaj chaw ntawm cov txheej txheej nyias nyias ua lub luag haujlwm tseem ceeb hauv kev lag luam xws li cov khoom siv hluav taws xob mus rau kev tsim khoom siab heev. Ntawm ntau yam thev naus laus zis muaj, lub cev vapor deposition (PVD) sputtering tau tshwm sim los ua ib txoj hauv kev tshiab thiab ua tau zoo rau kev tso cov yeeb yaj kiab nyias nyias rau ntawm cov substrates. Tsab xov xwm no yuav nkag mus rau hauv lub ntiaj teb ntawm PVD sputtering, tham txog nws cov ntawv thov, cov txiaj ntsig thiab kev txhim kho tshiab. PVD sputtering, tseem hu ua magnetron sputtering, yog ib txoj hauv kev siv dav hauv kev lag luam semiconductor los tso cov yeeb yaj kiab nyias nyias rau ntawm wafers. Nws cuam tshuam nrog kev siv plasma los tshem tawm cov atoms ntawm cov khoom siv, uas tom qab ntawd tso rau ntawm lub substrate, tsim cov yeeb yaj kiab nyias nyias.
Cov txheej txheem muaj ntau yam zoo, xws li kev tswj hwm qhov tuab ntawm zaj duab xis, kev nplaum zoo heev, thiab lub peev xwm los tso ntau yam khoom siv suav nrog cov hlau, oxides, thiab nitrides. Cov ntawv thov ntawm PVD sputtering yog dav thiab ntau yam. Hauv kev lag luam hluav taws xob, nws feem ntau siv los tso cov khoom siv hluav taws xob xws li txhuas thiab tooj liab, ua rau muaj cov khoom me me thiab cov voj voog sib xyaw. Tsis tas li ntawd, PVD sputtering yog siv dav hauv kev lag luam txheej txheem kho qhov muag, xws li cov txheej txheem tiv thaiv kev cuam tshuam ntawm cov iav thiab daim iav los txhim kho kev ua haujlwm kis tau lub teeb. Kev nce qib tsis ntev los no hauv PVD sputtering thev naus laus zis ua rau nws nrov dua thiab ntau dua. Ib qho kev txhim kho tseem ceeb yog kev qhia txog kev sib xyaw ua ke, uas tuaj yeem tso cov yeeb yaj kiab nyias ntawm cov tshuaj nrog cov khoom txhim kho. Los ntawm kev qhia cov pa roj reactive rau hauv lub tshuab nqus tsev thaum lub sijhawm tso tawm, cov chaw tsim khoom tuaj yeem tswj cov khoom sib xyaw thiab stoichiometry ntawm cov yeeb yaj kiab tso tawm, muab kev ua tau zoo dua thiab kev ua haujlwm.
Tsis tas li ntawd xwb, kev tsim kho tshiab ntawm lub hom phiaj tau nthuav dav lub peev xwm ntawm PVD sputtering. Piv txwv li, kev siv cov hom phiaj sib xyaw ua ke uas muaj ntau yam khoom siv tuaj yeem tso cov zaj duab xis nyias tshwj xeeb nrog cov khoom tshwj xeeb. Qhov no qhib lub qhov rooj rau kev tsim cov khoom siv tshiab rau cov khoom siv hluav taws xob siab heev, kev khaws cia lub zog thiab cov khoom siv biomedical. Hauv kev xaus, PVD sputtering yog ib txoj kev txheej txheem txheej txheej nyias nyias muaj zog nrog ntau yam kev siv thiab kev nce qib tsis ntev los no. Nrog kev tswj hwm meej ntawm kev tso zaj duab xis nyias thiab kev sib raug zoo nrog ntau yam khoom siv, nws tau dhau los ua ib qho tseem ceeb hauv kev lag luam xws li khoom siv hluav taws xob thiab optics. Kev tshawb fawb thiab kev tsim kho tshiab hauv thaj chaw ntawm PVD sputtering yuav tsum txhim kho nws cov peev xwm ntxiv, ua rau muaj kev tsim cov khoom siv tshiab thiab thawb cov ciam teb ntawm kev nce qib thev naus laus zis.
– Tsab xov xwm no yog tso tawm los ntawmlub tshuab nqus tsev txheej tshuab chaw tsim khoomZhenhua Nqus Tsev.
Lub sijhawm tshaj tawm: Tsib Hlis-27-2025