I roto i te pūtaiao rauemi me te hangarau, he mea nui te mahi a te mara o ngā paninga kiriata angiangi i roto i ngā ahumahi mai i te hikohiko ki te hanga matatau. I roto i ngā hangarau rerekē e wātea ana, kua puta ake te pupuhi kohu tinana (PVD) hei tikanga auaha me te whai hua mō te whakatakoto kiriata angiangi ki runga i ngā papa. Ka rukuhia e tēnei tuhinga te ao o te pupuhi PVD, me te matapaki i ōna tono, ōna painga me ngā whanaketanga hou. Ko te pupuhi PVD, e mōhiotia ana ko te pupuhi magnetron, he tikanga e whakamahia whānuitia ana i roto i te umanga semiconductor hei whakatakoto kiriata angiangi ki runga i ngā wafers. Kei roto ko te whakamahi i te plasma hei tango i ngā ngota mai i tētahi rauemi ūnga, ka whakatakotoria ki runga i tētahi papa, ka hanga he kiriata angiangi.
He maha ngā painga o tēnei tukanga, pērā i te whakahaere tika i te matotoru o te kiriata, te piri pai, me te kaha ki te whakatakoto i ngā momo rauemi tae atu ki ngā konganuku, ngā waikura, me ngā nitride. He whānui, he rerekē hoki ngā whakamahinga o te PVD sputtering. I roto i te umanga hikohiko, he mea noa te whakamahi hei whakatakoto i ngā rauemi kawe hiko pērā i te konumohe me te parahi, e āhei ai te hanga i ngā wāhanga iti me ngā ara iahiko whakauru. Hei tāpiri, he whānui te whakamahinga o te PVD sputtering i roto i te umanga paninga whatu, pērā i ngā paninga ārai-whakaata i runga i ngā karāhe me ngā whakaata hei whakarei ake i te mahi tuku mārama. Ko ngā whanaketanga hou o te hangarau PVD sputtering kei te whakanui ake i tōna rongonui. Ko tētahi whanaketanga nui ko te whakaurunga o te tauhohenga sputtering, ka taea te whakatakoto i ngā kiriata angiangi o ngā matū me ngā āhuatanga whakarei ake. Mā te whakauru i ngā hau tauhohenga ki roto i te rūma korehau i te wā e whakatakoto ana, ka taea e ngā kaihanga te whakahaere i te hanganga me te stoichiometry o ngā kiriata kua whakatakotoria, ka whakarato i te mahi me te mahi pai ake.
Hei tāpiritanga, kua whakawhānui ake ngā auahatanga ūnga i ngā āheinga o te PVD sputtering. Hei tauira, mā te whakamahi i ngā ūnga hiato kei roto he maha ngā rauemi ka taea te whakatakoto i ngā kiriata angiangi tino motuhake me ngā āhuatanga ahurei. Mā tēnei ka huaki te kuaha ki te whanaketanga o ngā rauemi hou mō ngā hikohiko matatau, te rokiroki pūngao me ngā taputapu hauora. Hei whakarāpopototanga, he tikanga paninga kiriata angiangi kaha te PVD sputtering me te whānuitanga o ngā tono me ngā whanaketanga hou. Mā te whakahaere tika i te whakatakotoranga kiriata angiangi me te hototahi ki ngā rauemi rerekē, kua noho hei mea nui i roto i ngā ahumahi pēnei i te hikohiko me te whatu. E tumanakohia ana ka whakarei ake te rangahau me te auahatanga tonu i roto i te mara o te PVD sputtering i ōna āheinga, ka taea ai te hanga rauemi hou me te pana i ngā rohe o te ahunga whakamua hangarau.
–Nā tekaihanga mīhini paninga korehauPūrere horoi horoi Zhenhua.
Wā tuku: Mei-27-2025