PVD Sputtering: He Holomua i ka ʻenehana uhi ʻili lahilahi

I loko o ka ʻepekema mea a me ka ʻenekinia, he kuleana koʻikoʻi ke kahua o nā uhi ʻili lahilahi i nā ʻoihana mai nā mea uila a hiki i ka hana ʻana i nā mea holomua. Ma waena o nā ʻenehana like ʻole i loaʻa, ua puka mai ka physical vapor deposition (PVD) sputtering ma ke ʻano he ʻano hana hou a maikaʻi hoʻi no ka waiho ʻana i nā ʻili lahilahi ma nā substrates. E luʻu kēia ʻatikala i loko o ke ao o PVD sputtering, e kūkākūkā ana i kāna mau noi, nā pono a me nā hoʻomohala hou loa. ʻO ka PVD sputtering, i ʻike ʻia hoʻi ʻo magnetron sputtering, he ʻenehana i hoʻohana nui ʻia i ka ʻoihana semiconductor e waiho i nā ʻili lahilahi ma nā wafers. Pili ia i ka hoʻohana ʻana i ka plasma e wehe i nā ʻātoma mai kahi mea i manaʻo ʻia, a laila waiho ʻia ma luna o kahi substrate, e hana ana i kahi ʻili lahilahi.

Hāʻawi ke kaʻina hana i nā pono he nui, e like me ka kaohi pololei ʻana i ka mānoanoa o ke kiʻiʻoniʻoni, ka hoʻopili maikaʻi loa, a me ka hiki ke waiho i nā ʻano mea like ʻole me nā metala, nā oxides, a me nā nitrides. He ākea a ʻokoʻa nā noi o ka PVD sputtering. I ka ʻoihana uila, hoʻohana pinepine ʻia ia e waiho i nā mea conductive e like me ka alumini a me ke keleawe, e hiki ai ke hana i nā ʻāpana liʻiliʻi a me nā kaapuni i hoʻohui ʻia. Eia kekahi, hoʻohana nui ʻia ka PVD sputtering i ka ʻoihana uhi optical, e like me nā uhi anti-reflective ma nā aniani a me nā aniani e hoʻomaikaʻi i ka hana hoʻoili mālamalama. ʻO nā holomua hou i ka ʻenehana PVD sputtering e hoʻolilo nei i mea kaulana. ʻO kahi hoʻomohala koʻikoʻi ka hoʻolauna ʻana o ka reactive sputtering, hiki ke waiho i nā kiʻiʻoniʻoni lahilahi o nā hui me nā waiwai i hoʻonui ʻia. Ma ka hoʻokomo ʻana i nā kinoea reactive i loko o ke keʻena vacuum i ka wā o ka waiho ʻana, hiki i nā mea hana ke kaohi i ka haku mele a me ka stoichiometry o nā kiʻiʻoniʻoni i waiho ʻia, e hāʻawi ana i ka hana a me ka hana i hoʻomaikaʻi ʻia.

Eia kekahi, ua hoʻonui nā hana hou i hoʻolālā ʻia i nā hiki o ka PVD sputtering. No ka laʻana, ʻo ka hoʻohana ʻana i nā pahuhopu hui pū ʻia e loaʻa ana nā mea he nui hiki ke waiho i nā kiʻiʻoniʻoni lahilahi kūikawā me nā waiwai kū hoʻokahi. Wehe kēia i ka puka i ka hoʻomohala ʻana i nā mea hou no nā mea uila holomua, ka mālama ikehu a me nā mea hana biomedical. I ka hōʻuluʻulu manaʻo, ʻo ka PVD sputtering kahi ʻenehana uhi kiʻiʻoniʻoni lahilahi ikaika me kahi ākea o nā noi a me nā holomua hou. Me ka kaohi pololei ma luna o ka waiho ʻana o ka kiʻiʻoniʻoni lahilahi a me ka hoʻohālikelike ʻana me nā mea like ʻole, ua lilo ia i mea nui i nā ʻoihana e like me nā mea uila a me nā optics. Manaʻo ʻia ka noiʻi a me ka hana hou i ke kahua o PVD sputtering e hoʻonui hou i kona mau hiki, e hiki ai ke hana i nā mea hou a me ka hoʻokuke ʻana i nā palena o ka holomua ʻenehana.

–Ua hoʻokuʻu ʻia kēia ʻatikala emea hana mīkini uhi hakahakaʻO Zhenhua Vacuum.